Integrated Controller

3000 mm/s2 2 Work load: W [kg] Work load: W [kg] 3000 mm/s2 1.5 1 0.5 5000 mm/s2 10 mm/s2 0 1400 200 400 600 800 1000 1200 0 Speed: V [mm/s] Speed: V [mm/s] EQFS25HA/Ball Screw Drive Horizontal/Lead 12 Vertical/Lead 12 35 9 8 7 6 5 4 3 2 1 0 3000 mm/s2 30 Work load: W [kg] Work load: W [kg] 3000 mm/s2 25 20 15 10 10 mm/s2 5000 mm/s2 5 0 0 0 Speed: V [mm/s] 100 200 300 400 500 600 700 900

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

) 119 (124) 18 (28) 130 (164) 76 (84) 160 (198) 53 (59) 204 (215) 0.040 0.073 80 1400 750 750 750 25 116 112 102 112 31.5 110 13.5 13.5 140 45 61 129 204 4.5 44 16 27 247 48 28 235 255 192 194 65 76 45 20 34 20 205 1000 (1001 to 1500) 133 (140) 18 (29) 150 (180) 92 (100) 180 (220) 54 (60) 215 (227) 0.040 0.073 100 1500 750 750 750 25 133 136 116 136 35.5 130 13.5 13.5 162 50 64 135 212 6.0

CLK1

-050 BMA2-063 BMA2-040 D-H7A1, H7A2, H7B, H7C D-H7NW, H7PW, H7BW D-H7LF, H7NF 378 504 630 756 OUT 1260 Solid state switch 16 40 318 424 530 636 IN 1060 588 784 980 1180 OUT 1960 Reed switch D-B53, B54, B64, B59W 20 50 BA-32 BA-04 BA-05 BA-06 495 660 825 990 IN 1650 Solid state switch D-G5NTL 934 1250 1560 1870 OUT 3120 Reed switch D-A33, A34, A44 20 63 BD1-04M BD1-05M BD1-06M 840 1120 1400

Stainless Steel Heat

Based on condition y; IDFS11E is selected as the model to process an air flow larger than 1400 l/min (ANR) with a 60Hz power supply, according to data D-2. 4 4 Note) l/min (ANR) is for reference conditions of 20C, 1 ATM and 65% relative humidity. Data A Correction factor for temperature (Series IDUS) Inlet air temp. (C) Outlet air press. dew point (C) Ambient temp.

IR1000/2000/3000

100 200 300 400 500 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa IR2020-02 IR2020-02 IR2020-02 Conditions: Supply pressure 1.0MPa Conditions: Back pressure 1.0MPa 1.0 0.8 0.204 0.9 0.7 Set pressure P2 MPa Set pressure MPa 0.8 Set pressure MPa 0.6 0.202 0.7 Setting point 0.5 0.6 0.200 0.5 0.4 0.4 0.3 0.3 0.198 0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 1000 1200 1400

Ozone Resistant

test results> NBR Speed control valve Flow rate uncontrollable NBR Regulator Malfunction NBR Solenoid valve Malfunction AT Air tank AR Regulator Ozonizer Specimen CP Compressor IDF Refrigerated air dryer AFF Main line filter AM Mist separator Control panel Ozone resistance evaluation Models Operating frequency Conditions Series AS-F AS1000, 1400

MGG

288 330 371 412 412 IN 161 241 322 402 482 563 643 724 804 804 OUT 32 12 138 207 276 346 415 484 553 622 691 691 IN 252 378 504 630 756 882 1010 1130 1260 1260 OUT 40 16 212 318 424 530 636 742 848 954 1060 1060 IN 392 588 784 980 1180 1370 1570 1760 1960 1960 OUT 50 20 330 495 660 825 990 1160 1320 1490 1650 1650 IN 624 936 1250 1560 1870 2180 2500 2810 3120 3120 OUT 63 20 560 840 1120 1400

End Lock Cylinder Series CBG1

Stroke Table Long strokes (mm) Max. manufacturable stroke (mm) Bore size (mm) Standard strokes (mm) Note 1) Lock Unlock 20 25, 50, 75, 100, 125, 150, 200 201 to 350 25 301 to 400 32 301 to 450 25, 50, 75, 100, 125, 150, 200, 250, 300 40 1500 301 to 800 50, 63 301 to 1200 80 301 to 1400 Locked condition Unlocked condition 100 301 to 1500 Note 1) Intermediate strokes other than the above are

Clamp Cylinder with Lock Series CLK1

71) 424 (95) 530 (119) 636 (143) IN (1060) 1.70 588 (132) 784 (176) 980 (220) 1180 (265) OUT (1960) 3.14 Reed switch D-B53, B54, B64, B59W 20 50 BA-32 BA-04 BA-05 BA-06 495 (111) 660 (148) 825 (185) 990 (223) IN (1650) 2.64 Solid state switch D-G5NTL 934 (210) 1250 (281) 1560 (350) 1870 (420) OUT (3120) 4.99 Reed switch D-A33, A34, A44 20 63 BD1-04M BD1-05M BD1-06M 840 (189) 1120 (252) 1400

Profile Design ISO/VDMA Air Cylinder Series CP95

Bore stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500 700 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500 800 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600 1200 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600 1200 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600, 700, 800 1400 100 25, 50, 80, 100, 125, 160, 200,

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Based on condition y; IDFS11E is selected as the model to process an air flow larger than 1400 l/min (ANR) with a 60Hz power supply, according to data D-2. 4 4 Note) l/min (ANR) is for reference conditions of 20 C, 1 ATM and 65% relative humidity.

Air Slide Table Series MXQ

1000 105 40 45 160 55 + 0.2S 65 120 115 170 1100 1100 1100 1200 1400 2350 2650 2900 1750 130 65 80 310 166 + 0.5S 110 140 180 220 1750 1750 1750 1950 2400 3450 4300 4700 2750 200 110 130 560 240 + 0.5S Option Specifications Stroke Adjustment Range of Adjuster Options (Identical for extension and retraction ends) Type Stroke adjustment range Optional wide adjustment range adjusters are

Compact and Low Profile Design Rodless Cylinder Series MY2H/HT, MY2C, MY3A/3B, CY1F

MY3A/3B Made to order Basic type Rubber bumper Centralized piping MY3A Short type Bore (mm) Long stroke Stroke adjustment unit Side support Floating bracket Helical insert threads Standard piping Basic type standard 16 25 40 63 MY3B Air cushion Mounting bracket for holder Standard stroke (mm) Model Bore (mm) Manufacturable max. stroke (mm) 100 200 300 400 500 600 700 800 900 1000 1200 1400

Refrigerated Air dryer Series IDU/IDF

l/min (ANR) 4 4 Based on condition ; Based on condition ; IDU4D is selected as the model to process an air flow larger than 412 l/min IDF11C is selected as the model to process an air flow larger than 1400 l/min (ANR) with a 60Hz power supply, according to data D-2.

PSxx-OMV0003CN

ISE700x03E80x15F4 (10005620) 1023 0x03FF 0 R/W H_2 (OUT2 ) U16 1200 Y OUT2 ISE710x03E80x1556 (10005562) ISE700x02440x1450 (5805200) OUT2 OUT2 ( ) 1024 0x0400 0 R/W P2L(n2L) () U16 2200 Y ISE710x02E20x1450 (7385200) ISE700x02440x1450 (5805200) OUT2 ( ) 1025 0x0401 0 R/W P2H(n2H) () U16 3400 Y ISE710x02E20x1450 (7385200) ISE700x03E80x0CEE (10003310) OUT2 ( ) 1026 0x0402 0 R/W WH2 () U16 1400

PSxx-OMV0008CN

ISE76G0x03200x1450 (8005200) ISE77G0x03200x1450 (8005200) ISE78G0x03200x1450 (8005200) ISE70G0x02440x1450 (5805200) ISE75G0x03160x1450 (7905200) OUT2 ( ) P2H(n2H) () U16 3400 Y ISE76G0x03200x1450 (8005200) 1025 0x0401 0 R/W ISE77G0x03200x1450 (8005200) ISE78G0x03200x1450 (8005200) ISE70G0x03E80x0CEE (10003310) OUT2 ISE75G0x03E80x0C85 (10003205) OUT2 ( ) 1026 0x0402 0 R/W WH2 () U16 1400

IR1000/2000/3000

Flow rate ( /min (ANR)) Relief flow rate ( /min (ANR)) Supply pressure P1 (MPa) VY1 IR2020-02 IR2020-02 IR2020-02 Supply pressure 1.0 MPa Back pressure: 1.0 MPa 1.0 G 0.8 0.204 0.9 0.7 Set pressure P2 (MPa) 0.8 PPA Set pressure (MPa) Set pressure (MPa) 0.6 0.202 0.7 Set point 0.5 AL 0.6 0.200 0.5 0.4 0.4 0.3 0.3 0.198 0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 0 200 400 600 800 1000 1200 1400

MXQ

160 105 40 53 40 45 75 60 605 610 670 735 835 1000 55 + 0.2 S 2350 2650 2900 310 130 65 120 65 80 170 115 1100 1100 1100 1200 1400 1750 166 + 0.5 S 3450 4300 4700 560 200 110 140 110 130 220 180 1750 1750 1750 1950 2400 2750 240 + 0.5 S Option Specifications Stroke Adjustment Range of Adjuster Option (Identical for extension and retraction ends) Optional wide adjustment range adjuster

Air Cylinder

Operating range Cylinder mounting bracket, by stroke/ Auto switch mounting surfaces 80 301 to 1400 100 301 to 1500 Note 1) Manufacture of intermediate strokes at 1 mm intervals is possible. (Spacers are not used.) Note 2) Long stroke applies to the axial foot and rod flange types.

7

Unit: N Operating pressure (MPa) Bore size (mm) Operating direction Rod size (mm) Piston area (mm2) 0.5 0.6 0.4 0.3 756 630 504 378 OUT 1260 40 20 566 472 377 283 IN 943 1180 980 784 588 OUT 1960 50 20 990 825 660 495 IN 1650 1870 1560 1250 934 OUT 3120 63 20 1680 1400 1120 840 IN 2800 422 A Clamp Cylinder CK1 Series Construction CKG140, 50, 63 Rod mounting type #0 q @1 w e @2 @0 !4 y !