IDG Standard dew point: 40C IDG30L IDG50L IDG60L IDG75L IDG100L Compressed air Fluid Range of operating conditions Standard performance conditions Inlet air pressure (MPa) 0.3 to 1.0 IDG30L 5 to 50 Inlet air temperature (C) (1) IDG60L 5 to 50 Ambient temperature (C) Outlet air atmospheric pressure dew point (C) Inlet air flowrate (l/min(ANR))(2) Standard performance JIS Symbol 40 100 150 227 320
With internal shock absorber With adjustment bolt With internal shock absorber With external shock absorber With external shock absorber With adjustment bolt For high energy For low energy 1 2 3 7 10 20 30 50 70 100 200 1 0.2 to 0.7 1.5 2 6 39 7 161 231 116 25 0.2 to 1.0 Note) 574 1060 0.2 to 0.7 0.2 to 1.0 116 48 805 1210 294 81 1310 1820 0.2 to 1.5 1100 240 0.2 to 1.0 0.2 to 2.0 1600 320
MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 Accessory Bore size (mm) Clamp stroke (mm) 12 16 20 25 32 40 50 63 J 10 20 50 70 100 250 280 500 595 Clamp bolt Hexagon socket head cap screw Hexagon nut Spring washer MK-A020 87 123 290 320 525 640 1100 1520 D1350 1805 MK-A032 (g) Additional Weight 12 -X MK-A050 16 20 25 32 40 50 63 Bore size (mm) 20Both ends tapped style 6
343 366 389 182 205 228 250 274 297 IN 113 189 264 25 40 0692 0823 421 446 471 497 269 295 320 345 370 396 OUT 147 245 344 50 1133 1341 701 740 780 821 500 540 580 620 661 IN 181 302 422 32 With Auto Switch (Built-in magnet) OUT 241 402 563 Unit: g IN 317 528 739 Cylinder stroke (mm) Bore size (mm) 5 40 OUT 377 628 880 10 100 40 45 50 75 15 20 25 30 35 12 IN 495 825 1150 59 52 68
x 2-5.2 through 2 x 2-9.5 counterbore depth 5 -X End lock mechanism 4-M6 x 1.0 thread depth 9 (6H7 hole pitch) 20Data Thread depth 4 4 positions for set screws for fixing shock absorbers 6H7 depth 8 +0.012 0 2-RB1006X552 Shock absorber 6H7 +0.012 0 (mm) F L P 35 60 75 90 90 90 90 ZZ 205 255 305 355 405 455 505 S SS 104 129 154 179 204 229 254 Z 156 206 256 306 356 406 456 Q 170 220 270 320
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0 20 40 60 80 100 120 140 160 180 200 220 240 260 280 300 320 340 360 380 400 Allowable end load F (N) CX DMGGM80Stroke -X 8 (Slide bearing type) 207 Data 6 Deflection Y (mm) 1200 st 5 1100 st 4 1000 st 900 st 3 800 st 700 st 2 600 st 400 st 500 st
Calculation: (Example) CLJ2L16-60 Basic weight320 (16) Additional weight6.5/15 stroke Cylinder stroke60 stroke 320 + 6.5/15 x 60 + 27 = 373 g 4 4.4 5 3 2 1 Stopping Accuracy (Not including tolerance of control system.)
Holding force 25 320 N 32 500 N 40 800 N MLGC Shock absorber can absorb small to large impacts without adjustments due to self compensation. CNG MNB Brake construction is designed not to allow loads on guide.
Weight reduced by 53% at the maximum Overall length (Z + Stroke) Overall Length (Z) Weight (mm) (kg) Series MY3A MY3B MY1B Series MY3A MY3B MY1B 63 63 40 40 25 25 16 16 320 8.26 240 2.95 150 0.99 110 0.34 356 8.99 276 3.08 178 1.09 122 0.35 460 14.5 340 4.41 220 1.57 160 0.73 At a 100 mm stroke Series Variations Positioning cushion mechanism The uniquely designed piston shape enables reduction
Lead Stroke [mm] Symbol [mm] 30 50 100 150 200 250 300 350 400 450 500 600 700 800 A 12 900 600 B 6 450 300 C 3 225 150 LEY25 Motor mounting position: Top/Parallel, In-line 100 W /40 (Motor rotation speed) (4500 rpm) (3000 rpm) A 20 1200 800 B 10 600 400 C 5 300 200 LEY32 Motor mounting position: Top/Parallel 200 W /60 (Motor rotation speed) (3600 rpm) (2400 rpm) A 16 1000 640 B 8 500 320
6 to 160 Actuator specifications 450 to 500 30 to 900 24 to 640 12 to 320 6 to 160 Max. acceleration/ deceleration [mm/s2] Horizontal 101 Vertical 50001 Pushing speed [mm/s2]5 25 35 30 Positioning repeatability [mm] 0.02 Lost motion [mm]6 0.1 or less Lead [mm] 10 5 2.5 20 12 6 3 24 16 8 4 Impact/Vibration resistance [m/s2]7 50/20 Actuation type Ball screw + Belt (EQYH), Ball screw (EQYDH
320 Model Port size Nominal size (B) ID20 ID30 ID40 ID60 1 4 1 2 1 2 3 4 120 120 170 170 45 45 75 75 520 615 850 961 128.5 128.5 243.5 243.5 59.5 59.5 66.5 66.5 95 95 95 95 134.5 134.5 183 183 222 222 302 302 59.5 59.5 88 88 9 9 9 9 136 ID Series Specific Product Precautions Be sure to read this before handling the products.
Allowable Stroke Speed [mm/s] Model AC servo motor Lead Stroke [mm] Symbol [mm] Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 Up to 1300 Up to 1400 Up to 1500 H 24 1800 1580 1170 910 720 580 480 410 A 16 1200 1050 780 600 480 390 320 270 LEJS40 100 W/ m40 B 8 600 520 390 300 240 190 160 130 (Motor rotation speed) (4500 rpm
2 Stations 1 One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 8 9 60 37 26 For top ported 4 4 4 4 4 4 4 4 3 R P 1 2 2 2 2 2 2 2 2 7.5 13.1 29.6 58.1 43.5 P=11.5 One-touch fitting, thread piping [4(A), 2(B) port] Applicable tubing O.D.: 3.2 : 4 : 6 Thread size: M5 L n Formula L1 = 11.5n + 55.5 L2 = 11.5n + 73 n: Stations (Max. 24 stations) Dimensions 24 331.5 349 375 385.5 23 320
Allowable Stroke Speed [mm/s] Model AC servo motor Lead Stroke [mm] Symbol [mm] Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 Up to 1300 Up to 1400 Up to 1500 H 24 1800 1580 1170 910 720 580 480 410 A 16 1200 1050 780 600 480 390 320 270 LEJS40 100 W/ m40 B 8 600 520 390 300 240 190 160 130 (Motor rotation speed) (4500 rpm
Angular Type Air Gripper MHY2/MHW2 Series 10, 16, 20, 25 MHZ MHF MHL MHR MHK MHS MHC MHT MHY MHY MHW MHW -X MRHQ MA D697 180 Angular Type Air Gripper MHY2/MHW2 Series Cam Type Rack & Pinion Type MHY2 Series/Cam Type Light and compact size in small bore sizes Over length L (mm) Gripping moment Weight (g) Bore size (mm) Model (Nm) L MHY2-10D 10 0.16 70 71 MHY2-16D 16 150 0.54 84 MHY2-20D 20 320
(PAT.PEND) MHF MHL Over length L (mm) Gripping moment Weight (g) Bore size (mm) Model MHR (Nm) L MHK Over length L(mm) MHY2-10D 10 0.16 70 Gripping moment 71 Weight (g) Bore size (mm) Model (Nm) MHY2-16D 16 150 0.54 84 MHS L MHY2-20D 20 320 1.10 106 MHW2-20D 68 300 20 0.30 MHY2-25D 25 560 2.28 131 MHC MHW2-25D 510 25 0.73 78 At the pressure of 0.5 MPa 905 MHW2-32D 32 93.5 1.61 MHT Auto
Holding force 25 320 N 32 500 N 40 800 N MLGC Shock absorber can absorb small to large impacts without adjustments due to self compensation. CNG MNB Brake construction is designed not to allow loads on guide.
AMD250C to 550C, 650, 850 Micro Mist Separator Clean Air Filters : Available as standard Remarks Description Series 90SFD100 Compatible with standard models Clean Air Filter SFD200 AMP220, 320, 420 With element service indicator Exhaust Cleaner for Clean Rooms With element service indicator [1500 l/min (ANR)] AMP420-06-T-X1 Air Filters/Pressure Control Equipment : Available as standard :
D-C7 D-C8 2 (Different side) 15 1 10 D-H7 D-H7W D-H7NF D-H7BAL D-C73C D-C80C D-H7C 2 (Same side) 60 2 (Different side) 15 1 2 Ek= m2 Band mounting 1 10 2 (Same side) 65 2 (Different side) 15 1 10 2 (Same side) 65 D-H7LF 2 (Different side) 25 1 15 Weight (g) 16 Bore size (mm) Basic weight 9 320 8 Additional weight per 15mm stroke 6.5 27 Axial direction foot 7 Mounting bracket Load weight (