Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/Multiple Connector, End Lock: -
Solenoid: No.2 Solenoid, Body Option: 32A, Style: Energized Closed/N.O., Option: Brass, Copper or BC6 Body & Shading Coil, NBR Seal, Class B Coil, Port Size: Flange 32A, Thread: Rc, Voltage: 200VAC 50/60HZ, Lead Wire: Conduit, Surge Suppressor: -, Bracket: -
Solenoid: No.3 Solenoid, Body Size: 50A, Style: Energized Open/N.C., Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 20 [2 (50A)], Thread: NPT, Voltage: 200VAC 50/60HZ, Lead Wire: Conduit, Surge Suppressor: -
Solenoid: No.1 Solenoid, Body Size: 20A, Style: Energized Open/N.C., Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 04 [1/2 (20A)], Thread: Rc, Voltage: 200VAC 50/60HZ, Lead Wire: Conduit, Surge Suppressor: -
SI Unit: D (EtherCAT), End Plate: 2 (M12 power supply connector, B-coded), I/O Unit Stations: 1 (1 Station), Electro-pneumatic regulator stations: 2 (2 Stations), P, E Port Entry: C (U-Side, Built-in Silencer)
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
Nominal Size: 63mm, Stroke: 100mm, Size: Small Flow Style, Control Valve: Speed Controller For Minimal Flow (CCVS Only), Combination Valve: None, Voltage: -, Electrical Entry: -
Nominal Size: 63mm, Stroke: 200mm, Size: High Flow Style, Control Valve: Metering Valve, Combination Valve: None, Voltage: -, Electrical Entry: -
Nominal Size: 63mm, Stroke: 300mm, Size: Small Flow Style, Control Valve: Metering Valve, Combination Valve: None, Voltage: -, Electrical Entry: -
Nominal Size: 63mm, Stroke: 200mm, Size: Small Flow Style, Control Valve: Speed Controller For Minimal Flow (CCVS Only), Combination Valve: None, Voltage: -, Electrical Entry: -
Nominal Size: 63mm, Stroke: 100mm, Size: S (Small Flow Style), Control Valve: 1 (Speed Controller), Combination Valve: 0 (None)
Nominal Size: 63mm, Stroke: 100mm, Size: S (Small Flow Style), Control Valve: 2 (Metering Valve), Combination Valve: 0 (None)
Nominal Size: 63mm, Stroke: 100mm, Size: S (Small Flow Style), Control Valve: 3 (Speed Controller For Minimal Flow (CCVS Only)), Combination Valve: 0 (None)
Nominal Size: 63mm, Stroke: 200mm, Size: L (High Flow Style), Control Valve: 2 (Metering Valve), Combination Valve: 0 (None)
Nominal Size: 63mm, Stroke: 200mm, Size: S (Small Flow Style), Control Valve: 1 (Speed Controller), Combination Valve: 0 (None)
Nominal Size: 63mm, Stroke: 300mm, Size: S (Small Flow Style), Control Valve: 2 (Metering Valve), Combination Valve: 0 (None)
Nominal Size: 63mm, Stroke: 50mm, Size: S (Small Flow Style), Control Valve: 1 (Speed Controller), Combination Valve: 0 (None)
Nominal Size: 63mm, Stroke: 50mm, Size: S (Small Flow Style), Control Valve: 2 (Metering Valve), Combination Valve: 0 (None)
Nominal Size: 63mm, Stroke: 500mm, Size: S (Small Flow Style), Control Valve: 1 (Speed Controller), Combination Valve: 0 (None)
Nominal Size: 63mm, Stroke: 50mm, Size: S (Small Flow Style), Control Valve: 3 (Speed Controller For Minimal Flow (CCVS Only)), Combination Valve: 0 (None)