Made to Order

) 150 (150) 130 (150) 12 53 (63) 63 (63) Note 1) ( ): Denotes the dimensions with auto switch.

Integrated Controller

50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 Product weight [kg] 1.74 1.81 1.98 2.24 2.42 2.59 2.77 2.94 3.12 2.74 2.85 3.14 3.42 3.82 4.11 4.39 4.68 4.97 5.25 5.54 In-line Motor Series EQY16D Stroke [mm] 30 50 100 150 200 250 300 Product weight [kg] 0.72 0.76 0.87 1.01 1.12 1.23 1.34 Series EQY25D EQY32D Stroke [mm] 30 50 100 150 200 250 300 350 400 30 50 100

15

Model LEY25 (Top/Parallel) LEY25D (In-line) LEY32 (Top/Parallel) LEY32D (In-line) Stroke [mm] Note 1) 30, 50, 100, 150, 200, 250 300, 350, 400 30, 50, 100, 150, 200, 250 300, 350, 400, 450, 500 30, 50, 100, 150, 200, 250 300, 350, 400, 450, 500 LEF Note 2) Horizontal 18 50 50 30 60 60 30 60 60 Vertical 8 16 30 9 19 37 12 24 46 Work load [kg] LEJ Force [N] Note 3) (Set value: Rated torque

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Weight Product Weight: Top Mounting Type [kg] Series LEYG25M LEYG32M Stroke [mm] 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Weight [kg] 1.7 1.9 2.2 2.6 3.0 3.3 3.6 3.1 3.4 4.0 4.7 5.3 5.7 6.2 Series LEYG25L LEYG32L Stroke [mm] 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Weight [kg] 1.7 1.9 2.2 2.6 2.9 3.2 3.4 3.1 3.4 3.8 4.5 5.0 5.5 5.9 Product Weight: In-line Motor Type

MHZ

0.5 MPa 0.5 MPa 6 MHY 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.35 MPa 100 0.35 MPa 4 0.3 MPa 0.3 MPa MHW 50 2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

MHZ

0.5 MPa 0.5 MPa 6 MHY 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.35 MPa 100 0.35 MPa 4 0.3 MPa 0.3 MPa MHW 50 2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

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1/8 HN-T1 1/8 HNX1 1/8 HN-T2 1/8 HN-T4 Page 10 Distributed by Power Aire, Inc

Compact Cylinder

10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 55 60 65 70 75 80 85 90 95 100 110 130 150 55 60 65 70 75 80 85 90 95 100 110 130 150 M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

MY1

Wn 111 210 X-axis Xn Y-axis Yn Z-axis Zn Z Wa 0.88 kg 0 mm 5 mm 65 mm Y Wb 4.35 kg 0 mm 42.5 mm 150 mm Wc 0.795 kg 111 mm 42.5 mm 150 mm X Wd 0.5 kg 210 mm 42.5 mm 150 mm 65 150 n = a, b, c, d 3.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt C' D' 45 50 55 60 65 70 50 55 60 65 70 75 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 125 150 D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 60 65 70 75 80 85 90 95 100 105 130 155 D 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 65 70

Air Slide Table

40 ST 150 ST 150 0.400 Table displacement [mm] Table displacement [mm] Table displacement [mm] 0.020 ST 50, 75 0.350 0.015 ST 100 ST 125 ST 125 0.300 ST 10 to 100 0.015 ST 40, 50, 75 0.250 ST 125 ST 100 0.010 0.200 ST 100 0.010 0.150 ST 10 to 50 ST 125, 150 ST 10 to 30 0.005 ST 75 ST 150 0.100 0.005 0.050 0.000 0.000 0.000 0 50 100 0 50 100 0 50 100 Load [N] Load [N] Load [N] ST = Stroke

XM, XY

A A 16 50 M9N XMC XMC Flange size 16, 25, 40 M9N A 25 1 Flange size 50, 63, 80 XYC XYC Flange size 25, 40 Flange size 50, 63, 80 In-line type A 1 50 M9N Note) The XMC and XYC series with solenoid valve are also available.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 8-8-10 10 Precision Air Slide Table Series MXP Table Accuracy Traveling parallelism C C side parallelism to A side D M D side parallelism to B side B W A Port C MX M MTS B Distance from 0 of gauge dial when guide block is moved to full stroke after body is fixed on a base.

e-Rodless Actuator

(Wn) Weight (mn) Y-axis Yn Z-axis Zn X-axis Xn Z X Wa 5 mm 0.88 kg 0 mm 65 mm 111 Wb 42.5 mm 4.35 kg 0 mm 150 mm Y 210 Y Wc 42.5 mm 0.795 kg 111 mm 150 mm Wd 42.5 mm 1.0 kg 210 mm 150 mm n = a, b, c, d 3 Calculation of composite center of gravity m3 = mn = 0.88 + 4.35 + 0.795 + 1.0 = 7.025 kg 1 m3 X = x (mn x xn) 1 7.025 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 1.0 x 150) = 139.4 mm 1

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

kg 250 Load weight m (kg) 200 63 150 Since the conditions are vertical upward mounting with a speed of 500 mm/s, use graph (2).

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

75 19 8 71.5 23.5 39.5 74.5 77.5 33.5 31.5 43.5 33.5 48 38 28 28 42 42 56 84 75 22 9 60.5 32.5 46.5 88.5 88.5 42.5 46.5 52.5 32.5 Solid state auto switch: D-M9B, D-M9N Stroke B Stroke E Auto switch operating range Model A 40 50 150 75 100 10 20 30 125 75 100 150 20 30 125 10 40 50 13-/22-MXQ6(L) 0.5 0.5 0.5 7.5 7.5 9.5 9.5 9.5 17.5 17.5 1.5 10 13-/22-MXQ8(L) 2 2 6 10 25 26 36 12 12 16 20

MXQ

(mm) MXQ20-40 MXQ20-75 MXQ20-40 MXQ20-40 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-30 MXQ20-30 MXQ20-75 MXQ20-30 0.06 MXQ20-40 MXQ20-40 MXQ20-100 MXQ20-125 MXQ20-150 MXQ20-100 MXQ20-100 MXQ20-125 MXQ20-125 MXQ20-150 MXQ20-150 0.06 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-100 MXQ20-100 MXQ20-100 MXQ20-150 MXQ20-150 MXQ20-150 0.08 MXQ20-30 MXQ20-30 MXQ20

CQS

175, 200 75, 100, 125, 150 175, 200, 250, 300 25 Standard Non-rotating Rod Anti-lateral Load Reed switch D-A90/A90V D-A93/A93V D-A96/A96V Series CQSW 12 16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL Series CQSK 12

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

A A 16 25 Angle type M9N In-line type 1 5 6 2 3 4 7 2.