Table of Contents

to 100 MGPL32 to 100 i !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Description Bore size (mm) Stroke range Stroke range 20 to 100 5 to 95 Part no.: CBQ2B40-45DC-HL CBQ2B40-50DC-HL with 5 mm width spacer inside.

MG

to 100 MGPL32 to 100 i !

MGP

40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load weight m (kg) Load weight m (kg) 80 100 80 10 10 80 5 10 100 20 29 30 49 50 300 200 5 10 100 20 29 30 49 50 300 200 Stroke (mm) Stroke (mm) Note: 1 kg = 2.2046 lb 1 in = 25.4 mm 10 Compact Guide Cylinder Series

MY1

) Backup plate Special resin Guide roller B Special resin Guide roller A Stainless steel (80, 100) MX #6 Special resin (63 to 100) #7 #8 #9 MTS End cover Nickel plated (80, 100) y Carbon steel (80, 100) (80, 100) Wear ring Special resin u i o !

MGP

5 20, 25 over 30 stroke under 100 stroke 12, 16 over 50 stroke @0 Under 50 stroke 20, 25 over 50 stroke Under 30 stroke 20, 25 over 100 stroke MGPM32 to 100 MGPL32 to 100 i !8 !7 u q y !1 !9 @3 !0 !2 @2 r o e !4 @4 @1 !0 w !3 y Over 50 Over 50 stroke t 32 to 63 over 50 stroke under 100 stroke 80, 100 over 50 stroke !

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

[Nm] Class M3.5 [Class 100] 104 Tightening torque Model Screw size CYP15 0.3 M3 x 0.5 103 Class M2.5 [Class 10] CYP32 2.45 M6 x 1 102 Plate Class M1.5 [Class 1] 101 Stroke adjustment screw (inner cover) 100 0.01 0.1 1 10 Particle diameter (m) Flat head screwdriver Note 1) This chart indicates the level of cleanliness inside the measurement chamber.

Shock Absorbers and Rate Controls

6.4 22.2 M5 100 N/A fflf15xl.5 2fs63i Ofl Sorisr60.526.C 95.3 7 6.2 8.60 54.9 12.7 29.5 9.7 flA M8 370 I fl/A lMltb4x?

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100

CYV

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Inner cover holding screw tightening torques [Nm] Tightening torque Model Screw size CYV15 0.3 M3 x 0.5 CYV32 2.45 M6 x 1 Plate Stroke adjustment screw (inner cover) Hexagon wrench Inner cover holding screw direction + direction 11 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

CYP

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note

CYPSeries

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note

CYPSeries

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note

Magnet: D (Built-in), Mounting: F (Front Flange), Bore Size: 40mm, Stroke: 100mm, Cushion: Rubber Bumper, Rod Boot: None, Lock Style: RN (Rod Side Lock/Non-locking)

Magnet: D (Built-in), Mounting: F (Front Flange), Bore Size: 40mm, Stroke: 100mm, Cushion: Rubber Bumper, Rod Boot: None, Lock Style: WL (Lock on Both Sides Locking)

Magnet: D (Built-in), Mounting: F (Front Flange), Bore Size: 40mm, Stroke: 100mm, Cushion: Rubber Bumper, Rod Boot: None, Lock Style: HN (Rear End Lock Non-locking Style)

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence, Cushion: Rubber cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Support bracket: -

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence, Cushion: Rubber cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Support bracket: -

Magnet: Built-in, Mounting: Front Flange, Bore Size: 40mm, Stroke: 100mm, Cushion: Rubber Bumper, Rod Boot: None, Lock Style: Lock on Both Sides Locking, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Bracket: -