CV/MVGQ

n (Same side) 100 110 120 90 15 1 2 (Different sides, Same side), 1 120 130 140 25 110 D-F5NTL n = 2, 4, 6, 8 25 + 55 (n 2) 2 110 + 55 (n 4) 2 n = 4, 8, 12, 16 n = 4, 8, 12, 16 120 + 55 (n 4) 2 n = 4, 8, 12, 16 130 + 55 (n 4) 2 140 + 55 (n 4) 2 n = 4, 8, 12, 16 n (Same side) 15 75 90 90 100 100 110 110 Different sides 2 D-B5/B64 D-G5/K59 D-G5W D-K59W D-G59F D-G5NTL Same side n = 2,

Battery-less

4 A-A r t B C o @4 B C e @5 @6 D-D C-C B-B !1 !3 !6@8 D w D !2 Component Parts No. Description Material Note 19 End cover LEFS16 Aluminum alloy Anodized No.

smcmaintenancepartslist

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

Air Cylinder

(mm) Auto switch model Bore size (mm) 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V) Auto switch model Bore size 20 25 32 40 D-A9l(V) 6 6 6 6 BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9l(V) D-M9lW(V) D-M9lA(V) 3 3 4 3.5 D-M9lA(V) Note 2) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of

V

G H H Flat Flat with rib G ZPR25 U C 25 28 14 29 39.8 57.6 25 83.5 73.5 4 1.8 15 ZPR40 U C 40 43 18.5 32 42.8 60.6 25 86.5 76.5 6.5 3.3 15 ZPR32 U C 32 35 14.5 29.5 40.3 58.1 25 84 74 4.5 2.3 15 ZPR50 U C 50 53 19.5 33 43.8 61.6 25 87.5 77.5 7.5 3.8 15 D E E P T Y P E D E E P T Y P E I: M8X1 I: M6X1 I: M8X1 I: M6X1 Model A B C D E F Y Model A B C D E F Y G H H G G H H G ZPR25D 25 28 20 35

MY1

D A B Side support B MY-S B 2-J E A B C D Model A 35 43 53 61 70 87 113 136 170 206 B 43.6 53.6 65.6 75 84 105 131 158 200 236 C 12 15 25 D 21 26 38 E 3.6 4.9 6.4 F 1.8 3 4 G 6.5 6.5 8 H 3.4 3.4 4.5 J M4 x 0.7 M4 x 0.7 M5 x 0.8 Applicable cylinder MY1B 10 MY1B 16 MY1B 20 MY1B 25 MY1B 32 MY1B 40 MY1B 50 MY1B 63 MY1B 80 MY1B100 A B A B A B MY-S10 MY-S16 MY-S20 A B MY-S25 35 50 8 5 9.5 5.5

7ND9071en

_X/I09 -25 to +50 C -25 to +65 C -25 to +80 C ND91_X/I45 -25 to +50 C -25 to +64 C -25 to +80 C Number of switches: 2 Protection class of housing: IP66 (DIN 40050, IEC 60529) Conduit entry: M20 x 1.5 (ND9100U and ND9200E2, ND9300E2: 1/2 NPT) Table 12 Ambient temperatures, ND9_X Variant type II 3 G Ex nA IIC T6...T4 Gc; II 3 D Ex tc IIIC T90 C Dc II 3 G Ex ic IIC T6...T4 Gc; II 3 D Ex tc IIIC

CA2

(Different sides and same side) With 1 140 130 120 25 110 D-F5NTL (n 2) 2 110 + 55 (n 4) 2 n = 4, 8, 12, 16 120 + 55 (n 4) 2 n = 4, 8, 12, 16 130 + 55 (n 4) 2 n = 4, 8, 12, 16 140 + 55 (n 4) 2 n = 4, 8, 12, 16 25 + 55 n = 2, 4, 6, 8 n (Same side) 15 75 90 90 100 100 110 110 Different sides With 2 D-B5/B64 D-G5/K59 D-G5W D-K59W D-G5BAL D-G59F D-G5NTL Same side (n 2) 2 90 + 50 (n 4)

Table of Contents

(kg) Applicable dryer Port size NPT A B C D E D E Part no.

REA/REB

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 17.5 15 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 103 103 47 47

REA/REB

Auto switch model Bore size (mm) D-A9 A dimension D-M9 B dimension C dimension D dimension D-A9 D-M9 D-A9 D-M9 D-A9 D-M9 21.5 76.5 72.5 56.5 60.5 17.5 15 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7

SQ1000/2000

Also, indicate the option symbol "-K" for mixed wiring. w How to order applicable valves A B C A B C A B C A B C A B C SQ 1 1 4 1 C6 5 L A B C D E F G H I Series SQ1000 Switching type Electrical entry A E 1 2 3 4 5 A B C L type plug connector with lead wire L 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S

Aluminum High Vacuum Angle Valve

D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 41 113 40 38 30 35 17 23 96 60 48 129 95 62 128.5 28 43 121.5 138.5 50 48 40 40 26 25.5 63 51 120.5 97 66 121.5 154.5 40 96 113 87 66.5 38 30 35 17 23 50 121.5 138.5 89.5 69 48 40 40 26 25.5 458 XL Series Common Option 1 Heater Valve heaters are common for

Air Slide Table

D A [mm] Rubber Stopper A Model A B C D E MXQ6(A) 41.5 27 22 25 20 MXQ8(A, C) MXQ6B 41.5 27 21 25 19 MXQ12(A, C) MXQ8B 46.5 28 21 27 20 MXQ16(A) MXQ12B 51.5 30 21 28 20 MXQ20(A) MXQ16B 58.5 32 22 31 21 MXQ25(A) MXQ20B 65.5 34 22 33 21 Cap bracket RJ-X2300 A cap bracket is mounted to lengthen the A dimension.

Table of Contents

D 2 6 8 C J R Z W AFM30 to 40 Accessory/Optional specifications B C D Accessory With bracket Float type auto-drain (N.C.)

MY1

Mechanically Jointed Rodless Cylinder Cam Follower Guide Type Side Support Side support A MY-SA 2-G MX 2-H F E C D A B MTS MY Side support B MY-SB CY MG 2-J Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX DE C D A B -X 20(mm) E F G D A B C 15 25 35 45 H J M4 x

Table of Contents

(mm) 3.2 4 6 Effective area (mm2) Nylon (1) (2) 3-applicable tubing Weight (g) D Model D L Q M Urethane 2.9 4.4 10.6 KQ2T23-00 KQ2T04-00 KQ2T06-00 5 7 10 9.6 10.4 12.8 3.4 6.4 13.4 17.5 18 20 4.3 4.5 5.3 15.5 16 17 D D 8 KQ2T08-00 15.2 23 6 18.5 25.6 17.7 15 10 KQ2T10-00 18.5 26.5 6.8 21 40 28.4 25 12 KQ2T12-00 20.9 28.5 7.5 22 57.4 45.4 29 K 16 KQ2T16-00 26.5 34 10 25 100 (84) 40 Note 1)

F

U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R KCT KCJ KCE KCL KCL P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R KCE KCU H O W T O O R D E R U N I O N E T O U C H F I T T I N G S KC S E A L A N T S C O N F I G U R AT I O N H Straight L Elbow T Tee J Straight plug U Y Connector E Bulkhead

V

H E R M A N I F O L D O P T I O N S : L A T C H I N G S O L E N O I D T Y P E L A T C H I N G T Y P E V A L V E L A T C H I N G T Y P E V A L V E W I T H M A N U A L O V E R R I D E M A N I F O L D O P T I O N P A R T S A V A I L A B L E : P E R F E C T C H E C K B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !