High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

MB

d Dd9 D C L l m H B Note 1) d (Through hole diameter) Bore size (mm) Clevis Knuckle Part no.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

300 K F C E Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts J G E G A B Plug JSXM 1G(Blow port: Bottom) Port size OUT (blow) port 2 x Port size IN port JSXM 1G-F(Blow port: Front) Port size OUT (blow) port JSXM 1G(Blow port: Bottom) CS: Conduit GS: Grommet with PCB D 500 K F D 300 K F NPT1/2 C E C E J G J G B B [mm] Size Port size A B C D

Proposals for Energy Saving

Stroke Refer to the catalog "Precision Cylinder Series MTS" CAT.ES20-127 C for details. 17 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO Free Mount Cylinder for Vacuum Air Blow Series ZCUK How to Order C 16 ZCUK D 20 Basic type C S D 16 D 20 ZC UK A90 With auto switch Built-in magnet Number of auto switches Nil 2 pcs.

CY1

to 63 A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 18 97 99 43 43 74 74 18 32 21.5 108.5 108.5 46.5 46.5 83.5 83.5 21.5 40 23.5 124.5 124.5 48.5 48.5 99.5 99.5 23.5 50 27.5 148.5 148.5 52.5 52.5 123.5 123.5 27.5 63 29.5 158.5 158.5 54.5 54.5 133.5 133.5 29.5 Note) 50mm is the minimum stroke

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

180 200 Bore size (mm) Auto switch model 12 125 140 160 63 80 100 50 16 20 25 32 40 D-A7(H)(C) D-A80(H)(C) D-A9(V) D-Z7 D-Z80 D-F7(V) D-J79(C) D-F7W(V) D-F7BA(V)L D-F7NTL D-F79F D-F9(V) D-F9W(V) D-F9BA(V)L D-Y59 D-Y69 D-Y7P(V) D-Y7W(V) D-Y7BAL D-P5DW 13 13 13 12 12 13 10 10 12 12 12 12 11 11.5 9 11.5 9.5 9.5 9.5 14 14 14 15 15.5 CUJ 6 9 9 8.5 6.5 6.5 7 6 5.5 6 5.5 5 6 CU CQS 5.5 6.5

Table of Contents

D J K Y A J K B Y C D Misc.

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

LX

detail (Scale: 2/1) 120 90 4-M6 x 1 Section C 30 D Refer to page 300 for mounting.

Compact

1 LEF LEJ A A LEL B D-D #3 LEM LEM LEY !6 @3 @3 @5 @4 @7 @2 @4 @5 @1 LES #1 #0 u #2 i y LEPY LEPS !3 C-C A-A LER !8 @6 @8 @9 B w !2 C !7 D LEH LEY -X5 D #4 #4 11LEFS C o !0 !5 11LEJS Motor option: With lock 25A!1 LEC !2 LEC S !3 LEC SS-T @0 LEC Y !9 Motorless LAT Component Parts Component Parts LZ No. Description Material Note 1 Body Aluminum alloy Anodized No.

IDG

Note) When the symbol C or D is designated, the same part number of an auto-drain listed on page 14-19-33 will come together.

VZ100/300/500

(P , A, R port) VZ VS L plug connector (L) VZ54-LM plug connector (M) VZ54-M01 02 01 02 01 02 DIN terminal (D) VZ54-DVFN Applicable cable O.D.: 3.5 to 7 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor 4-6-33 34 Series VZ500 Manifold Specifications Flow Characteristics Flow characteristics Port size 1 2 (P A) 2 3 (A R) C [dm3/(sbar)] C [dm3/(sbar)]

Cylinder with Lock

MWB MWBW MWB-UT Model Selection Dd9 2 x d C D L m l H B [mm] [mm] Part no.

CNG

Applicable bore size (mm) B1 C D d H1 Applicable bore size (mm) Part No.

CQ2

Weight/Auto Switch Mounting Bracket C D Part No.

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

MNB

Dd9 2-d CL D C L l m CL1 H B MLGC Bore size (mm) Clevis Knuckle Part no.

MNB

Dd9 2-d CL D C L l m CL1 H B MLGC Bore size (mm) Clevis Knuckle Part no.

51

H ZZ MM Depth A1 CG1 20 25 32 40 50 63 80 100 Up to 200 18 22 22 30 35 35 40 40 15.5 19.5 19.5 27 32 32 37 37 35 40 40 50 58 58 71 71 94 102 104 114 144 144 178 179 Up to 300 CG3 CG3 Up to 300 Up to 300 Up to 300 JMB AL Up to 300 H A Up to 300 ZZ + Stroke ZZ + Stroke H MB Up to 300 Basic (mm) MB1 Bore size (mm) Standard stroke A AL B1 C D E F GA GB H1 H ZZ I J KA MM NA P S CA2 20 25 32 40

SQ1000/2000

Also, indicate the option symbol "-K" for mixed wiring. w How to order applicable valves A B C A B C A B C A B C A B C SQ 1 1 4 1 C6 5 L A B C D E F G H I Series SQ1000 Switching type Electrical entry A E 1 2 3 4 5 A B C L type plug connector with lead wire L 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure