Integrated Controller

0.05 0.03 EQFS32 0.05 0.03 EQFS40 0.05 0.03 C side D side Traveling parallelism does not include the mounting surface accuracy.

5

Auto switch model Bore size (mm) 20 25 32 40 D-M9(V) D-M9W(V) D-A9(V) BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) REA D-M9A(V) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of b, c, d, e) BM5-040S (A set of b, c, d, e) REB Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch

IDU/IDF

dryer Applicable dryer Port size Rc E D D C A B Part No.

TABLE OF CONTENTS

Listed and CSA Certified for Hazardous LocationsClass I, Div 1, Group C and D Class II, Div 1, Groups E, F, and G; Div 2 Groups A,B,C,D,E,F, AND G. Mtg.

Series CQ2

C A D Model D C Model D C Mounting bolt (mm) Mounting bolt (mm) M18 x 125 l M18 x 135 l 125 135 C (D) Q2B18010DC C (D) Q2B20010DC M18 x 135 l M18 x 145 l 135 145 C (D) Q2B18020DC C (D) Q2B20020DC M18 x 145 l M18 x 155 l 145 155 C (D) Q2B18030DC C (D) Q2B20030DC M18 x 155 l M18 x 165 l 36 155 39 165 C (D) Q2B18040DC C (D) Q2B20040DC M18 x 165 l M18 x 175 l 165 175 C (D) Q2B18050DC C (D) Q2B20050DC

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

D-H7C D-B5, D-B6, D-B59W Auto switch Auto switch Hs Hs Single Acting, Spring Return Single Acting, Spring Extend Bore size (mm) A B All stroke A Bore size (mm) B Auto switch model Auto switch model 150 200 Hs Hs All stroke 150 200 125 125 50 100 50 100 25 75 25 75 20 20 30 105 95.5 55 80 45.5 70.5 55 80 45.5 70.5 24.5(27) 24.5(27) 20.5 D-C7 D-C8 D-C73C D-C80C D-C7 D-C8 D-C73C D-C80C 25 25

Table of Contents

D 2 6 8 C J R Z W AFM30 to 40 Accessory/Optional specifications B C D Accessory With bracket Float type auto-drain (N.C.)

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

B A C D A B C D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 46 26 46 26 30 42 42 30 10 48 28 48 28 32 44 44 32 Electrical entry (Fetching direction) Type Model Features D-A90 D-Z80 D-Y69A D-Y69B D-Y7PV D-Y7NWV D-Y7PWV D-Y7BWV 50, 63 Grommet (In-line) Without

7

B Grommet 100 VAC With surge voltage suppressor 12 One-touch fitting C 110 VAC G H J K 3/8 D 200 VAC 4 10A C37 N.C. 1/2 E 230 VAC 15 15A 3/8 Stainless steel B N.O. F 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC 6 25A N.C. N P C37 Stainless steel 25 1 K 200 VAC D N.O. L 230 VAC 7 32A N.C.

Proposals for Energy Saving

Stroke Refer to the catalog "Precision Cylinder Series MTS" CAT.ES20-127 C for details. 17 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO Free Mount Cylinder for Vacuum Air Blow Series ZCUK How to Order C 16 ZCUK D 20 Basic type C S D 16 D 20 ZC UK A90 With auto switch Built-in magnet Number of auto switches Nil 2 pcs.

Series VQ Base Mounted Metal Seal/Rubber Seal

relief that conform to MIL-C-83503.

10

Auto Switch Proper Mounting Height (Standard type) [mm] Auto switch model D-F5l D-J59 D-F59F D-F5lW D-J59W D-F5BA D-F5NT D-Y59l D-Y7P D-Y7lW D-Y7BA D-Z7l D-Z80 D-M9l D-M9lW D-M9lA D-A9l D-A9lV D-M9lV D-M9lWV D-M9lAV D-A5l D-A6l D-A59W D-Y69l D-Y7PV D-Y7lWV D-P3DWA D-P4DW D-G39 D-K39 D-A3l D-A44 Bore size Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 32 24.5 23 27.5 23

0.4

W Note) VQC 4/5 Note) VQ2000 only VQZ D side U side Manual override Nil B C D 1 2 3 Stations 4-position dual port (N.C. +N.C.) 4-position dual port (N.O. +N.O.) 4-position dual port (N.C. +N.O.)

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

MLGP

Modification method D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W Number of auto switches D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL Part number 20, 25, 32 1 to 349 Applicable stroke (mm) 40 to 80 5 to 345 1 pc. 15 5 10 20 25 100 25 to 345 2 pcs. 15 5 15 20 25 Part no.: MLGPM2039F A 1mm spacer is installed in MLGPM2040F. Dimension C is 77mm. Note) Model D-P5DW can only be mounted with bore sizes 40 to 100.

MLGP

Modification method D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W Number of auto switches D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL Part number 20, 25, 32 1 to 349 Applicable stroke (mm) 40 to 80 5 to 345 1 pc. 15 5 10 20 25 100 25 to 345 2 pcs. 15 5 15 20 25 Part no.: MLGPM2039F A 1mm spacer is installed in MLGPM2040F. Dimension C is 77mm. Note) Model D-P5DW can only be mounted with bore sizes 40 to 100.

LG1H

A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4sec.)

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

U side D side D D D D D D 3 2 1 Stations How to Order Solenoid Valve 10 SV 1 1 0 0 F 5 Note) Clean series Note) Available with manifold block for station additions. Refer to the WEB catalog.

Large Bore Compact Cylinder Series CQ2

C A D Model D C Model D C Mounting bolt (mm) Mounting bolt (mm) M18 x 125 l M18 x 135 l 125 135 C (D) Q2B18010DC C (D) Q2B20010DC M18 x 135 l M18 x 145 l 135 145 C (D) Q2B18020DC C (D) Q2B20020DC M18 x 145 l M18 x 155 l 145 155 C (D) Q2B18030DC C (D) Q2B20030DC M18 x 155 l M18 x 165 l 36 155 39 165 C (D) Q2B18040DC C (D) Q2B20040DC M18 x 165 l M18 x 175 l 165 175 C (D) Q2B18050DC C (D) Q2B20050DC

Environment

Size Lead Order no. 19 63 A/B/C LE-D-2-5 Piston rod GR-S-010 (10 g) GR-S-020 (20 g) L LE-D-2-6 * Apply grease on the piston rod periodically.