In-line Air Filter

2 ZFC12/1A 3.2, 1/8" ZFC32/3A 3.2, 1/8" 0.3 MPa 0.1 MPa 0.3 MPa 0.3 MPa 30 30 30 0.1 MPa Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 0.5 MPa 0.1 MPa 0.5 MPa 20 20 20 0.5 MPa 0.7 MPa 0.7 MPa 0.7 MPa 10 10 10 0 0 0 5 10 15 0 0 10 20 30 40 60 50 0 10 20 30 40 50 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC33/3B 4, 5/32" ZFC53/5B 4, 5/32" ZFC54/5D

Table of Contents

11 14 16 20 24 22 24 32 40 50 62 17 18 25 30 38 48 3 4 6 8 10 12 5 6 8 10 7 7 7 9 10 11 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 15 16.5 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 3.2 3.2 4.5 5.5 5.5 6.6 4 9 9 13.5 2 4.5 4.5 4.5 16.5 Note) 19 21.5 23 Without auto switch With auto switch Note) 5 stroke (CU16-5D

Fitting Type: R (Run Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5C (Tube O.D. 3/4", Tubing Size 3/4"x5/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: 5D (Tube O.D. 3/4", Tubing Size 1/2"x3/8"), Piping: M (Male), Thread: N (NPT)

Fitting Type: H (Connector), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5D (Tube O.D. 3/4", Tubing Size 1/2"x3/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: N (NPT)

Fitting Type: B (Branch Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5D (Tube O.D. 3/4", Tubing Size 1/2"x3/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: N (NPT)

Fitting Type: H (Connector), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5D (Tube O.D. 3/4", Tubing Size 1/2"x3/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male)

Fitting Type: L (Elbow), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5D (Tube O.D. 3/4", Tubing Size 1/2"x3/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: N (NPT)

Fitting Type: B (Branch Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5D (Tube O.D. 3/4", Tubing Size 1/2"x3/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female), Thread: N (NPT)

Fitting Type: L (Elbow), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5D (Tube O.D. 3/4", Tubing Size 1/2"x3/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female), Thread: N (NPT)

Fitting Type: L (Elbow), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5D (Tube O.D. 3/4", Tubing Size 1/2"x3/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: R, Rc, Packaging: 1 (Standard Packaging Equivalent to Class M5.5

Magnet: D (Built-in), Mounting: A (Both Ends Tapped), Type: Standard, Bore Size: 32mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 5mm

Magnet: Built-in, Mounting: Both Ends Tapped, Type: Standard, Bore Size: 32mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 5mm, Body Option: -, Auto Switch Groove: -, Mounting Bolt: -, Rod End Bracket: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Mounting Threads: -, Rod Type: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

1

Mounting style Bore size Stroke NCA CM2 XC8 Mounting style Bore size Stroke Cushion Stroke adjustment symbol DCG1 XC8 Mounting style Type Bore size Stroke adjustment symbol Stroke -X CBM2 CBA2 Mounting style XC8 Stroke adjustment symbol Manual release type H Bore size Stroke 20MB MB1 XC8 Mounting style Bore size Stroke Suffix Stroke adjustment symbol Data CA2 XC8 Mounting style Bore size

Made to Order

types CQSB D(M) XC8 Bore size Stroke CQ2B(H) D(M) (Z) XC8 Bore size Stroke MTS (R) XC8 Bore size Stroke Z Stroke MGP XC8 Bearing type Bore size Stroke adjustment symbol MGG XC8 Bearing type Mounting type Port thread type Stroke Bore size Stroke adjustment symbol XC8 MGC Bearing type Mounting type Stroke Bore size Port thread type Stroke adjustment symbol Equipped/Not equipped back plate

Rotary Actuator

Combination between -XCl and -XCl Symbol Description Applicable shaft type Applicable size Combination S W X Y Z T J K -XC7 Reversed shaft V V V V V 50, 63, 80, 100 -XC7 -XC8 to -XC11 Change of rotation range V V V -XC8 to -XC11 -XC30 Changed to fluorine grease V V V V V V V V 30 to 100 S,W,X,T,J* S,W,Y* -XC30 -XC31 to -XC36 Change of rotation range and shaft rotation direction V V V

Air Cylinder

Single knuckle joint -XC6 Made of stainless steel -XC8 Adjustable stroke cylinder/Adjustable extension type -XC9 Adjustable stroke cylinder/Adjustable retraction type * Single knuckle joint and auto switch are shipped together with the product, but not assembled.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-XC8 to XC11 1 2 Reversed Shaft Change of Rotating Range -XC7 CRB2 CRBU2 CRA1 Refer to How to Order on page 11-7-40. XC8 CRA1 Refer toHow to Order on page 11-7-40.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-XC8 to XC11 1 2 Reversed Shaft Change of Rotating Range -XC7 CRB2 CRBU2 CRA1 Refer to How to Order on page 11-7-40. XC8 CRA1 Refer toHow to Order on page 11-7-40.

Air Cylinder Series CM2

XC8 Adjustable stroke cylinder/Adjustable extension type Auto switch mounting rail style XC13 Fluororubber seals XC22 No fixed orifice of connecting port XC25 XC27 Double clevis pin and double knuckle pin made of stainless steel Refer to pages 214 to 218 for cylinders with auto switches.

Air Cylinder Series MB

10Clean series 20Copper and Fluorine-free R V MB Water resistant XA Change of rod end shape XB5 Oversized rod cylinder XB6 Heat-resistant cylinder (10 to 150C) XB13 Low-speed cylinder (5 to 50 mm/s) XC3 Special port position XC4 With heavy duty scraper XC5 Heat-resistant cylinder (10 to 110C) XC6 Made of stainless steel Tie-rod, cushion valve, tie-rod nut, etc. made of stainless steel XC7 XC8