2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !
Valve side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17
D-A90(V) OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT() Blue Weight (g) D-A93(V) Model D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V LED Brown OUT (+) Brown 41 Lead wire length (m) 0.5 6 6 6 6 8 8 Contact protection box CD-P11 CD-P12 Resistor 3 30 30 30 30 41 Reed switch Zener diode Dimensions (mm) OUT () Blue Blue D-A90/D-A93/D-A96 2 2.8 4.5 2.7 D-A96(V) DC (+) Brown 4 LED
8 Piston rod B Rod seal e Aluminum bearing alloy NBR !
8 Piston rod B Rod seal e Aluminum bearing alloy NBR !
2r e y @4@8 !0 @0 oi @3 u@4 @8@7@2r !9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.
L1 L2 + A5 L3 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com V 1000 1 2 420 1000 1 2 E = W (-) 2 E = 1 (-) 2= 0.088 Find the kinetic energy E (J) of the load. Find the allowable kinetic energy Ea (J).
Sizes 10, 15 Sizes 20, 30, 40 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Flat Key Port B Port B 0 0 0 0 0 19 1 1 0 to to to 19 0 Port A 0 0 8 8 Port A to e 17 at g 0 n fl ra e 17 of ng n o e at ra ti g ta n fl ra ro on of e n Angle adjustment 5 Angle adjustment 5 ov io ti at e o ta gr ot ng R ey ro K ra ve n oo io at
2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.
9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.
9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.
Determination of kinetic energy of load (E) E > Es E Es Bore size determination Tentative determination of L type W V 2 E = () 2 1000 P Ps Note 2) E > Es Determination of pressure (P) when making intermediate stop P > Ps Consider made-to-order products, depending on an operating condition. Tentative determination of L type (For intermediate stops, refer to page 8-15-52.)
8 e CXTM Carbon steel Aluminum alloy Hard anodized Hard chrome plated Cylinder tub !
V W FA AL T A K N N C B F M S + Stroke H BY ZZ + Stroke BW With rod boot 180, 200, 250 BV e BZ BG BE l f 15 h + l 4-MA Effective thread depth MB (To attach eyebolt) ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) 125 140 160 180 200 250 A B BA BB BC BD BE BG BZ BW BP C D EA GB GC H J K MM MA MB BY BV AL E F KA FA N GA M 145 75 18 110 136 115 90 90 90 115 115 140 16 107 58 110 M14 x 1.5
Grease pack part number: GR-S010 (10 g), GR-S-020 (20 g) 59 Series C96 Dimensions Bore size Stroke Basic: C96S(D)B SW PL 2 x EE PL KK WA B D B R E WB Cushion valve 8 x RT VD L9 BG L2 L12 A WH G H G L8 + Stroke VA ZZ + Stroke R E With rod boot e d f l h h + L8 + VA + Stroke Stroke range (mm) A B d11 D EE PL RT L12 KK SW G BG L8 VD VA WA WB WH ZZ E R Bore size (mm) Without rod boot With rod
A B Reed switch: D-A93 Stroke B Stroke E Model Auto switch operation range A 100 75 125 10 20 30 125 40 50 150 75 100 30 150 20 50 10 40 21.6 (19.1) 20.9 (18.4) 18.4 (15.9) 11.7 (9.2) 15.6 (13.1) 18.5 (16) 15.6 (13.1) 12.9 (10.4) 8.4 (5.9) 6.7 (4.2) 10.6 (8.1) 15.5 (13) 3.6 (1.1) 4.9 (2.4) 6.4 (3.9) 6.7 (4.2) 10.6 (8.1) 15.5 (13) 3.6 (1.1) 3.9 (1.4) 16.4 (13.9) 16.7 (14.2) 20.6 (18.1) 25.5