V

(400) / / / / L Type 400 (400) 10 20 34 68 Air Consumption S Type 660 (100) 10 20 34 68 L Type 360 (400) H O W T O O R D E R ZH V A C U U M E J E C T O R *Vacuum pressure is quoted as mmHg below atmospheric (Torr Absolute) 1 Torr = 0.0197PSI D ZH D I M E N S I O N S M A X I M U M S U C T I O N F L O W R AT E/ A I R C O N S U M P T I O N U N I T (ln/min) N O Z Z L E D I A M E T E R E X H

Table of Contents

Vacuum Equipment Precautions . 349 350 350 352 353 354 359 359 359 360 360 360 361 361 361 362 363 366 369 370 370 371 374 375 377 379 381 383 385 387 389 391 393 395 397 399 401 403 405 405 405 406 407 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 Vacuum Equipment

The CRQ2 series is a compact rotary, rack and pinion style actuator. Single and double shaft types are available in all sizes (10~40mm). The CRQ2 uses internal cushioning and the body can be used as a flange. The use of a double piston eliminates backlash. Auto switches are available.Low profile , Both single shaft and double shaft are available in all sizes , 2 auto switches are mountable

CNA

to 500 20 to 600 20 to 600 20 to 750 20 to 750 43 52 52 65 65 11.2 11.2 11.2 12.5 14 59 66 66 80 81 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 42 50 59 76 92 70 80 93 116 133 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 37 to 39.5 51 58 58 71 72 153 168 182 218 246 37.5 9 11 12 15 15 8 0 0 0 0 27 27 34 44 43 13 13 16 16 17 255 284 298 360

WRF100

Limit switch Note 1) Rc1/ 4 Clamp side port 0 4 x 8H7( ) through 0.015 82 0.05 143 115 50 4 x 14 through 320 330 0.05 (mm) A B C 200 Arm type S200 S240 340 29 240 360 19 Note 1) This product does not include the limit switch.

CNA

to 500 20 to 600 20 to 600 20 to 750 20 to 750 43 52 52 65 65 11.2 11.2 11.2 12.5 14 59 66 66 80 81 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 42 50 59 76 92 70 80 93 116 133 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 37 to 39.5 51 58 58 71 72 153 168 182 218 246 37.5 9 11 12 15 15 8 0 0 0 0 27 27 34 44 43 13 13 16 16 17 255 284 298 360

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Dimensions [mm] Model L A B n D E F G H Without lock With lock LEKFS25Em-100m 335.5 380.5 106 210 4 100 45 LEKFS25Em-200m 435.5 480.5 206 310 6 2 240 220 LEKFS25Em-300m 535.5 580.5 306 410 8 3 360 340 LEKFS25Em-400m 635.5 680.5 406 510 8 3 360 340 LEKFS25Em-500m 735.5 780.5 506 610 10 4 480 460 35 14 LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor LEKFS32E

KJ

Two individual parts rotate 360. KQ2ZD P . 13 KQ2F P . 16 KQ2VF P . 17 Use to pipe from male thread such as pressure gauge. Triple branch universal male elbow Straight union Female elbow Use to six-branch line at right angles from female thread. Three individual parts rotate 360. KQ2ZT P . 14 KQ2H P . 16 KQ2LF P . 18 Use to pipe at right angles to male thread.

Cylinder with Lock Series CLS

1/5 stroke 30 to 1000 133 292 360 1/5 stroke 35 to 1200 141 326 401 11 Series CLS Accessory Dimensions Y Type Double Knuckle Joint Pins and snap rings for double clevis and double knuckle joint are included when shipped.

Vacuum

=a--t ---< universarJoint --l-u Manifold Common Exhaust Vacuum port of body-ported type can be rotated throughout 360 degrees. 64 $ilencen Iyrc (tuilt-in) Body-Pmtedilp Nl $en Silencer type/B type Note: One touch, porl threads, or a combination ate available for each port. Reler lo 'How To Order" 'Circles indicate on.touch litting lype lube size.

Table of Contents

Specifications. 297 297 298 299 299 300 300 301 302 307 307 308 309 309 310 311 316 321 322 324 324 324 326 327 339 339 339 340 340 341 342 352 354 354 355 357 359 359 360 360 361 362 363 363 363 364 365 367 367 367 367 368 374 374 374 378 379 379 379 383 384 384 384 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

Vacuum

=a--t ---< universarJoint --l-u Manifold Common Exhaust Vacuum port of body-ported type can be rotated throughout 360 degrees. 64 $ilencen Iyrc (tuilt-in) Body-Pmtedilp Nl $eni Silencer type/B type Note: One touch, porl threads, or a combination ate available for each port. Reler lo 'How To Order" 'Circles indicate on.touch litting lype lube size.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) Model LA LB LC LD LE LF LH LT 200 (233) 224 (257) 235 (273.5) 274 (318) 333 (399) CVRA1L50 62 108 4.5 9 44 41 263 (301.5) 316 (360) 375 (441) CVRA1L63 76 127 5 11 55 48 CVRA1L80 92 154 6 13 67 58 CVRA1L100 112 189.5 6 13 87 73.5 ( ) are the dimensions for rotation of 180 and 190.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) Model LA LB LC LD LE LF LH LT 200 (233) 224 (257) 235 (273.5) 274 (318) 333 (399) CVRA1L50 62 108 4.5 9 44 41 263 (301.5) 316 (360) 375 (441) CVRA1L63 76 127 5 11 55 48 CVRA1L80 92 154 6 13 67 58 CVRA1L100 112 189.5 6 13 87 73.5 ( ) are the dimensions for rotation of 180 and 190.

Table of Contents

How to Mount and Move the Auto Switch. 336 337 338 339 340 341 342 343 344 344 345 346 347 348 349 350 350 351 352 353 353 354 355 356 357 358 358 359 360 360 361 361 363 363 365 365 366 366 367 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 Mechanically Jointed

Refrigerated Air Dryers

1258 1350 550 64 290 388 680 414 IDU55E R2 470 1345 1440 530 53 360 30 500 75 700 526 IDU75E 1480 1575 70 855 27 IDF/IDU Series Options Refer to How to Order on pages 7, 11, 14, 19, 22, 25 for optional models.

Integrated Controller

EQFS25H EQFS32H EQFS40H Stroke [mm]1 50 to 500 50 to 800 50 to 1000 150 to 1200 Work load [kg]2 Horizontal 10 15 18 15 26 40 40 39.5 50 68 68 26 60 75 80 Vertical 3 6 12 2 6 12.5 15 4 10 16 20 4.5 4.5 25 40 Up to 400 10 to 800 5 to 400 3 to 195 20 to 1200 12 to 850 6 to 450 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 401 to 450 10 to 700 5 to 360

Modular F.R.L. Units

The inside is visible from 360. The bowl is completely protected from the environment.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

900 Up to 1000 Up to 1100 Up to 1200 Up to 1300 Up to 1400 Up to 1500 H 24 1800 1580 1170 910 720 580 480 410 A 16 1200 1050 780 600 480 390 320 270 LEJS40 100 W/ m40 B 8 600 520 390 300 240 190 160 130 (Motor rotation speed) (4500 rpm) (3938 rpm) (2925 rpm) (2250 rpm) (1800 rpm) (1463 rpm) (1200 rpm) (1013 rpm) H 30 1800 1390 1110 900 750 630 540 470 410 A 20 1200 930 740 600 500 420 360

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

SY920 --03 3 8 3 position 3 position 2.2 [2.3] 8.7 [8.3] 0.34 [0.40] 0.84 [0.84] 0.64 [0.53] 0.30 [0.27] Exhaust center Exhaust center 8.0 0.33 1.9 0.36 0.19 0.75 130 117 122 164 279 285 327 293 8.9 [3.3] 1.5 0.34 [0.40] 0.25 2.2 [0.82] 6.5 0.78 [0.71] 0.27 0.44 [0.37] 0.57 0.21 [0.18] 0.84 Pressure center Single Pressure center Single 1 8 95 119 88 91 106 111 112 153 293 296 312 318 317 360