MG

, 175, 200 250, 300, 350, 400 78.5 1.5 62.5 12 10 6 42 11.5 9 93 M5 21 21 30 M6 x 1.0 15 M6 x 1.0 5.6 9.5 5.5 1/8 37.5 13.5 28.5 26 WA WB Bore size (mm) Standard stroke (mm) R S T U VA VB X XA XB YY YL Z 100 to 175 st 200 to 250 st 300 to 400 st 100 to 175 st 200 to 250 st 300 to 400 st 75 st or less 75 st or less 25, 50, 75, 100, 125, 150, 175, 200, 250 16 20 25 200 24 54 25 3 62 3.5 46

5 Port Solenoid Valve Series SY3000/5000/7000/9000

VQZ SQ (Station 1) (Station n) VFS (Light/surge voltage suppressor) VFR 63.3 VQ7 47.9 45.9 40.9 34.5 7.5 Block separation button (Push type) 15 14 13 12 11 10 9 8 7 6 5 4 3 2 stations 16 stations Stations n L1 285.5 273 260.5 260.5 248 235.5 223 210.5 198 185.5 185.5 148 173 298 160.5 L2 275 262.5 250 250 237.5 225 212.5 200 187.5 175 175 137.5 162.5 287.5 150 L3 223.5 213 202.5 192 181.5

Cylinder with Lock Series CLS

800 250 700 2000 600 200 200 CLJ2 500 180 Load mass: m (kg) Load mass: m (kg) 180 1000 160 700 800 900 400 CLM2 140 160 600 125 300 CLG1 500 140 400 CL1 125 300 200 200 MLGC CNG 100 500 400 300 200 100 100 500 400 300 200 100 MNB Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNA Graph 6 Graph 3 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CNS 4000 2000 250 3000 CLS 250 200 2000 180 1000 CLQ

IZx-OMT0049

250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50 50 0.5s 100 0.5s 100 1s 1s 150 150 2s 2s 200 200 5s 5s 250 250 300 300 For IZT40

CLS

ML1C 125 140 160 180 200 250 Bore size (mm) Resistance (N) 962 1206 1576 1995 2463 3848 D3.

24

T U VA VB WA WB X XA XB 75 st or less Over 75 st to 175 st Over 175 st to 250 st Over 250 st 75 st or less Over 75 st to 175 st Over 175 st to 250 st Over 250 st 20 81 54 72 44 44 120 200 300 39 77 117 167 28 3 3.5 25 91 64 82 50 44 120 200 300 39 77 117 167 34 4 4.5 MGPM (Slide bearing)/A, DB, E Dimensions MGPL (Ball bushing), MGPA (High precision ball bushing)/A, DB, E Dimensions [mm]

ISO Cylinder

1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 32 93 118 143 168 122 147 172 197 165 190 215 240 40 114 139 164 189 214 147 172 197 222 247 199 224 249 274 299 Boss-cut/Basic [mm] Item Stroke Bore size S ZZ 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 32 93 118 143 168 151

LJ1H

Applicable strokes: 250, 350, 450, 550, 650, 700, 750, 850, 900, 950, 1050, 1100, 1150, 1250, 1300, 1350, 1400, 1450 Example) LJ1H3031PD-250-F2-X2 Allowable Moment (Nm) Allowable static moment Allowable dynamic moment Pitching Rolling Yawing Mounting orientation Load movement direction 117 137 123 Model LJ1H30 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep a = 1000 2000 L1

Compact Cylinder Series NCQ8

Mounting bolt C D Mounting Bolt Size for NCDQ8B056 to 250(With Auto Switch) (Inch) Model C D Bolt size Model C D Bolt size NCDQ8B056-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8B075-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8B106-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8B150-025 037 050 062 075 087 100 125 150 175 200 250

C95

, 320, 400, 500 40 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 100 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 Intermediate strokes are available.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

C4 C6 C8 Stations n L1 L2 L3 L4 2 3 4 5 6 7 8 9 10 135.5 148 160.5 185.5 198 210.5 235.5 248 260.5 125 137.5 150 175 187.5 200 225 237.5 250 105 121 137 153 169 185 201 217 233 15 13.5 11.5 16 14.5 12.5 17 15.5 13.5 C4 C6 C8 SS5Y5-45FUStations B-Q 2 3 4 5 6 7 8 9 10 Stations n L1 L2 L3 L4 148 173 185.5 198 210.5 235.5 248 260.5 285.5 137.5 162.5 175 187.5 200 225 237.5 250 275 123 139 155

Single Axis Electric Actuator Series LJ1H

Applicable strokes: 250, 350, 450, 550, 650, 700, 750, 850, 900, 950, 1050, 1100, 1150, 1250, 1300, 1350, 1400, 1450 Example) LJ1H3031PD-250-F2-X2 Allowable Moment (Nm) Allowable static moment Allowable dynamic moment Pitching Rolling Yawing Mounting orientation Load movement direction 117 137 123 Model LJ1H30 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep a = 1000 2000 L1

TABLE OF CONTENTS

MODEL EW53 3-Way Normally Closed ATMOSPHERE EXHAUST EW53GG8DCCP EW53HH8DCCP EW53HJ8DCCP EW53JJ8DCCP EW53KK8DCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055 .075 .150 .020 .048 .075 .075 .150 DE-ENERGIZED ENERGIZED MODEL EW53 3-Way Normally Closed WITH PIPED EXHAUST ** EW53GG8XCCP EW53HH8XCCP EW53HJ8XCCP EW53JJ8XCCP EW53KK8XCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055

CATALOG VC10

MODEL EW53 3-Way Normally Closed ATMOSPHERE EXHAUST EW53GG8DCCP EW53HH8DCCP EW53HJ8DCCP EW53JJ8DCCP EW53KK8DCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055 .075 .150 .020 .048 .075 .075 .150 DE-ENERGIZED ENERGIZED MODEL EW53 3-Way Normally Closed WITH PIPED EXHAUST ** EW53GG8XCCP EW53HH8XCCP EW53HJ8XCCP EW53JJ8XCCP EW53KK8XCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055

Cylinder with Lock

12.5 25 37.5 50 75 100 125 150 175 200 225 250 50 12.5 25 37.5 50 75 100 125 150 175 200 225 250 63 12.5 25 37.5 50 75 100 125 150 175 200 225 250 80 12.5 25 37.5 50 75 100 125 150 175 200 225 250 100 12.5 25 37.5 50 75 100 125 150 175 200 225 250 13 Cylinder with Lock Double Acting, Single Rod CP96N Series Dimensions: With Mounting Bracket * Refer to Basic (B) for other dimensions.

C95

, 125, 160, 200, 250, 320, 400, 500, 600 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 Intermediate strokes are available.

Electric Slide Tables

m [kg] Work load m [kg] 300 0 50 100 150 200 250 300 350 600 Mey 250 500 Horizontal Vertical 200 400 m L3 [mm] L3 [mm] L3 [mm] 150 300 L3 100 200 50 100 0 0 Yawing Pitching Yawing Rolling 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500 L4 200 400 L4 [mm] L4 [mm] L4 [mm] 150 300 100 200 Mey

SY

Scale: 35% For 45PG (20 pins) For 45PH (10 pins) 2 Stations n L1 L2 L3 L4 3 4 5 6 7 8 9 10 135.5 148 160.5 185.5 198 210.5 235.5 248 260.5 125 150 137.5 175 187.5 200 237.5 225 250 105 121 137 153 169 185 201 217 233 15 13.5 11.5 16 14.5 12.5 17 15.5 13.5 C4 C6 C8 SS5Y5-45PUStations B(26 pins) 2 Stations n L1 L2 L3 L4 3 4 5 6 7 8 9 10 285.5 260.5 248 235.5 210.5 198 185.5 173 148 275 250

5-Port Solenoid Valve

ported Bottom ported Type 10 Type 11 Type 12 Connector connecting base Type 50 Type 52 Metal base External pilot specification 7 SY3000/5000/7000 Series Applicable to EX600-W Series Wireless Systems p. 113 p. 123 p. 165 p. 169 p. 177 Noise resistance High-speed connection Communication response Uses the 2.4 GHz ISM frequency band From power supply ON to start of communication: Min. 250

5 Port Solenoid Valve Series SV1000/2000/3000/4000

L Dimension n : Stations L n 2 135.5 125 93.5 24.5 5 160.5 150 125 21 6 173 162.5 135.5 22 7 185.5 175 146 23 8 198 187.5 156.5 24 9 198 187.5 167 19 10 210.5 200 177.5 20 11 223 212.5 188 21 12 235.5 225 198.5 22 13 248 237.5 209 23 14 260.5 250 219.5 24 15 260.5 250 230 18.5 16 273 262.5 240.5 19.5 17 285.5 275 251 20.5 18 298 287.5 261.5 21.5 4 148 137.5 114.5 20 3 135.5 125 104 19 L1