MY1

63 50 40 32 25 Mounting position A 278.5 323.5 184.5 229.5 139.5 B 121.5 136.5 95.5 110.5 80.5 Operating range l Note) 5.5 5.5 5 5 5 B A MY1C (Cam follower guide type) (mm) 63 50 40 32 25 Mounting position A 97.5 157.5 127.5 278.5 323.5 B 122.5 182.5 152.5 121.5 136.5 Operating range l Note) 5 5 5 5.5 5.5 B A MY1H (High precision guide type) (mm) 40 32 25 Mounting position A 180 216 131.5

CQS

12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45,

Table of Contents

3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

MGP

50 100 100 100 80 100 Load weight m (kg) 100 Load weight m (kg) 80 80 80 100 80 10 10 80 5 10 20 29 30 50 49 300 200 100 5 10 20 29 30 50 49 300 200 100 Stroke (mm) Stroke (mm) Note: 1 kg = 2.2046 lb 1 in = 25.4 mm 8 Compact Guide Cylinder Series MGP Horizontal Mounting Ball Bushing 1 7 l = 50mm V = 200m/s 1 8 l = 100mm V = 200m/s MGPL12 to 25 MGPL12 to 25 10 10 25 20 25 5 5 25 25 25 20

Air Cylinder

D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) CM2 CM3 D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) CG1 CG1 D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) CG3 D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) JMB D-C7 D-C80 5 15

C85

3.2 16 12.8 4.5 23.8 35 3.2 5 10 13 38 26 4 20 6 40 30 4.5 22 26 11 12.8 25 3.2 16 12.8 4.5 23.8 35 3.2 5 12 18 58 38 6 25 8 52 40 5.5 30 33 14 18 32 4 20 18 5.5 32 42 4 6 16 18 58 38 6 25 8 52 40 5.5 30 33 14 18 32 4 20 18 5.5 32 42 4 6 20 20 66 46 6 32 8 66 50 6.6 40 42 17 19 40 5 25 19 6.6 36 54 5 8 25 24 66 46 6 32 8 66 50 6.6 40 42 17 23 40 5 25 23 6.6 40 54 5 8 6-11-17 17 Series C85

CV/MVGQ

18 4 x 30l CVD-08 CDP-6A 5 x 30 4 94 5 79 7.5 83 73 M22 x 1.5 5 13 32 37 31 0.065 0.117 0.065 0.117 20 20 CVD-10 5 x 35 105 5 90 7.5 M26 x 1.5 16 41 47.3 39 0.065 0.117 25 10-15-59 60 Series CV3 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-B5/B64/B59W D-A5, D-A6 D-A59W Auto switch Ht Ht Auto switch

CV/MVGQ

Type C 5 16.6 + 0.048 0 5 8 25 M5 x 0.8 6.4 12 14 RHC Double Knuckle Joint Mounting Nut Rod End Nut MK(2) Knuckle pin and set ring are shipped together.

Electric Actuators

25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

20 25 Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X 500 500 500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 Mey 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] m Wall Y L5 500 500 500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1000 1000

High Vacuum Angle Valve

temperature type 5 to 150C Solid state auto switch Note) Size 25 is not applicable for H4.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Plug-in: For SS5Y -45 3 5 VQC VQZ SQ 5 5 SY 5 1 FU Single solenoid: VFS 5 SY 5 1 5C FU Double solenoid: VFR Series CE-compliant VQ7 3 SY300 5 SY500 Nil Q CE-compliant Type of actuation Manual override 1 Normally closed (N.C.) 2 Normally open (N.C.)

15

500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 5 10 15 0 5 10 15 20 25 0 1 2 3 4 5 Work load [kg] Work load [kg] Work load [kg] 807 A LEFB Series Motorless Type Calculation of Guide Load Factor Mounting Orientation 1.

REA/REB

25 20 15 10 D-Z7/Z8 9 6 6 6 6 8 D-Y5/Y6/Y7 6 5 5 5 5 6 Since this is a guideline including hysteresis, not meant to be guaranteed.

REA/REB

25 32 D-Z7/Z8 8 6 6 6 6 9 D-Y5/Y6/Y7 6 5 5 5 5 6 Since this is a guideline including hysteresis, not meant to be guaranteed.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

G thread 8-15-4 8-15-5 5 Magnetically Coupled Rodless Cylinder Basic Type Series CY3B 15, 20, 25, 32, 40 How to Order CY3B 25 300 Basic type Bore size Standard stroke 15 20 25 32 40 15 mm Refer to Standard Stroke below.

REA/REB

M1 = F x L A M2 = F x L M3 = F x L Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL Note) Deflection: Displacement of section A when force acts on section F REBH15, 25 REBH15, 25 REBH15, 25 REBH15 REBH15 REBH25 REBH15 REBH25 0.08 0.03 REBH25 0.02 Deflection (mm) Deflection (mm) Deflection (mm) 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 25 25 5 10 15 20 0 5 10 15 20 0 25 Moment

CY1

0.01 0.01 0.02 5 10 15 20 0 Moment ( Nm) 5 10 15 20 0 Moment ( Nm) 25 25 25 5 10 15 20 0 Moment ( Nm) CY1HT25, 32 CY1HT25, 32 CY1HT25, 32 0.05 CY1HT25 CY1HT25 CY1HT32 CY1HT25 CY1HT32 Deflection (mm) Deflection (mm) 0.03 0.04 0.02 0.03 CY1HT32 0.02 0.02 0.01 0.01 0.01 20 40 0 60 80 20 40 0 60 20 40 0 60 Moment ( Nm) Moment ( Nm) Moment ( Nm) Intermediate Stops Vertical operation 1) Intermediate

Table of Contents

62 50 38 62 50 38 R2 R1 P R1 R2 P Indicator light Indicator light Mounting hole 2-6.5 42.5 42.5 2-6.5 42.5 42.5 Mounting hole G1/2 (Cable 8 to 10) G1/2 (Cable 8 to 10) 137.5 137.5 125.5 125.5 93 93 25 (X port) 25(X port) 5 3 37 5 3 37 22 22 14 14 1 1 25 25 25 25 1/8 2-3/8 1/4, 3/8 X (PE) port 1/8 R1, R2 port 2-3/8 P Port 1/4, 3/8 X(PE) port P port 3-10-8 9 ISO Standard Solenoid Valve: Size

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.