Magnet: Built-in, Mounting: Double Rear Clevis, Bore: 125mm, Stroke: 200mm, Rod Boot: Single Rod, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 1.0m Cord Length, M12-4 Pin Connector, Number: -

Magnet: Built-in, Mounting: Double Rear Clevis, Bore: 125mm, Stroke: 160mm, Rod Boot: w/o Rod Boot, Rod Type: Single Rod, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 1 pc.

DOC1023126

400 30 to 500 Work load[kg] *1 Horizontal 8 26 40 70 30 50 90 100 Vertical 2 8 16 30 3 13 26 46 Pushing force [N] Note2),3),4) 36 to 76 63 to 122 126 to 238 232 to 452 50 to 118 80 to 189 156 to 370 296 to 707 to 300 30 to 900 18 to 700 9 to 450 5 to 225 30 to 900 24 to 800 12 to 400 6 to 200 Stroke Speed [mm/s] 350 to 400 30 to 900 18 to 600 9 to 300 5 to 150 30 to 900 24 to 640 12 to 320

ATX-OM-F004E

Outer dimensions and descriptions of each part 4Outer dimensions and descriptions of each part 1) Outer dimensions Model HAA15-10 HAA22-14 PORT SIZE 1B union 11/2B union A 460 588 B 394 484 C 33 52 D 70 70 E 59 60 F 485 580 G 428 505 H 320 333 J 150 150 K 150 150 L 320 400 M 70 94 N 58 65 P 200 200 Q 480 610 R 220 220 S 225 238 HAA Series 6 4 1) Outer dimensions ATX-OM-F004E Air-Cooled Aftercooler

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

. -4- 1.1.2 Specification Model LEJS100T9H LEJS100T9A LEJS100T9B Stroke [mm] *1 200300400500600800100012001500 3000(mm/s2) 60 150 400 5000(mm/s2) 43 93 150 Horizontal 9800(mm/s2) 22 36 Work load [kg] *2 3000(mm/s2) 14 29 80 5000(mm/s2) 12 29 30 Vertical 9800(mm/s2) 8 9 Actuatr specifications Electric specifications Lock unit to 500 2300 1250 500 Max. speed *3 501 to 1000 1600 800 320 [mm/

180

Angular Type Air Gripper MHY2/MHW2 Series 10, 16, 20, 25 MHZ MHF MHL MHR MHK MHS MHC MHT MHY MHY MHW MHW -X MRHQ MA D697 180 Angular Type Air Gripper MHY2/MHW2 Series Cam Type Rack & Pinion Type MHY2 Series/Cam Type Light and compact size in small bore sizes Over length L (mm) Gripping moment Weight (g) Bore size (mm) Model (Nm) L MHY2-10D 10 0.16 70 71 MHY2-16D 16 150 0.54 84 MHY2-20D 20 320

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

(PAT.PEND) MHF MHL Over length L (mm) Gripping moment Weight (g) Bore size (mm) Model MHR (Nm) L MHK Over length L(mm) MHY2-10D 10 0.16 70 Gripping moment 71 Weight (g) Bore size (mm) Model (Nm) MHY2-16D 16 150 0.54 84 MHS L MHY2-20D 20 320 1.10 106 MHW2-20D 68 300 20 0.30 MHY2-25D 25 560 2.28 131 MHC MHW2-25D 510 25 0.73 78 At the pressure of 0.5 MPa 905 MHW2-32D 32 93.5 1.61 MHT Auto

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Holding force 25 320 N 32 500 N 40 800 N MLGC Shock absorber can absorb small to large impacts without adjustments due to self compensation. CNG MNB Brake construction is designed not to allow loads on guide.

Secondary Batteries

AMD250C to 550C, 650, 850 Micro Mist Separator Clean Air Filters : Available as standard Remarks Description Series 90SFD100 Compatible with standard models Clean Air Filter SFD200 AMP220, 320, 420 With element service indicator Exhaust Cleaner for Clean Rooms With element service indicator [1500 l/min (ANR)] AMP420-06-T-X1 Air Filters/Pressure Control Equipment : Available as standard :

CL

D-C7 D-C8 2 (Different side) 15 1 10 D-H7 D-H7W D-H7NF D-H7BAL D-C73C D-C80C D-H7C 2 (Same side) 60 2 (Different side) 15 1 2 Ek= m2 Band mounting 1 10 2 (Same side) 65 2 (Different side) 15 1 10 2 (Same side) 65 D-H7LF 2 (Different side) 25 1 15 Weight (g) 16 Bore size (mm) Basic weight 9 320 8 Additional weight per 15mm stroke 6.5 27 Axial direction foot 7 Mounting bracket Load weight (

2–4

343 366 389 182 205 228 250 274 297 IN 113 189 264 25 40 0692 0823 421 446 471 497 269 295 320 345 370 396 OUT 147 245 344 50 1133 1341 701 740 780 821 500 540 580 620 661 IN 181 302 422 32 With auto switch (built-in magnet) OUT 241 402 563 Unit: g IN 317 528 739 Cylinder stroke (mm) Bore size (mm) 5 40 OUT 377 628 880 10 100 40 45 50 75 15 20 25 30 35 12 IN 495 825 1150 52 59 68

CS1

36 59 16 15 35 14 19 14 30 98 47 90 43 31 to 1400 Lube Non-lube Air-hydro 128 M30 X 1.5 1/2 161 75 40 160 212 112 255 M14 X 1.5 110 232 133 255 50 36 59 16 15 35 20 47 90 43 14 19 31 24 98 to 1400 0.2 X Stroke 144 M36 X 1.5 3/4 182 18.5 106 75 40 180 236 118 275 M16 X 1.5 120 252 141 273 20 19 56 53 40 90 59 43 14 17 36 26 39 to 1400 162 3/4 M40 X 1.5 204 85 45 18.5 111 200 115 265 132 320

MHL2

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Model MHS MHL2-10D MHL2-10D1 MHL2-10D2 MHL2-16D MHL2-16D1 MHL2-16D2 MHL2-20D MHL2-20D1 MHL2-20D2 MHL2-25D MHL2-25D1 MHL2-25D2 MHL2-32D MHL2-32D1 MHL2-32D2 MHL2-40D MHL2-40D1 MHL2-40D2 280 345 425 585 795 935 1025 1495 1690 1690 2560 2775 2905 3820 4655 5270 6830 7905 76 118 156 98 170 210 122 222 262 150 282 320

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHY2-10D 10 0.16 70 Gripping moment 71 Weight (g) Bore size (mm) Model (Nm) MHY2-16D 16 150 0.54 84 MHS L MHY2-20D 20 320 1.10 106 MHW2-20D 300 68 20 0.30 MHY2-25D 25 560 2.28 131 MHC MHW2-25D 510 25 0.73 78 At the pressure of 0.5 MPa 905 MHW2-32D 32

AMC

Note 2) On the AMC220,an R(PT)1/4 fitting can be attached by Note 1) Female thread: Available only AMC220, 320, 520 N NPT 04 1 2 F G(PF) 06 3 4 removing the drain cock. (It becomes the drain piping style) How to Order Oil Case Assembly If the oil case becomes damaged, it can be replaced easily.

Series IDG

IDG60L IDG75L IDG100L Fluid Compressed air Range of operating conditions Inlet air pressure 0.3 to 1.0MPa (43.5 to 145psi) IDG30L Inlet air temperature Note1) 5 to 50C (23 to 122F) Ambient temperature IDG60L 5 to 50C (23 to 122F) Standard performance Outlet air atmospheric pressure dew point JIS symbol 40C (40F) Inlet air flow rate l/min (ANR) [(SCFM)] Note 2) 100 (3.5) 150 (5.3) 227 (8.0) 320

Ozone Resistant

-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves 0 1000 2000 4000 5000 1000 2000 3000

MB1

Dimensions GC GC S + (2 x Stroke) Stroke B Stroke A ZZ + (2 x Stroke) ZZ + Stroke (A + B) S + Stroke (A + B) ZZ 262 320 320 S 200 244 244 GC 43 52 52 ZZ 231 235 262 S 180 180 200 Bore size (mm) 32 40 50 GC 36 38 41 Bore size (mm) 63 80 100 Bore size (mm) 32 40 50 63 80 100 GC 36 38 41 43 52 52 S 178 178 198 198 242 242 ZZ 272 280 314 314 386 386 NPT ports XC18 15 Dual stroke cylinder/single

MGG

800st 700st 3 600st 2 400st 500st st: Stroke (mm) 100st 200st 300st 0 1 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Allowable end load F (N) 5 Guide Cylinder Series MGG MGGM 63Stroke 7.5 7 (Slide bearing type) 6 Deflection Y (mm) 5 1100st 1000st 4 900st 3 800st 700st 2 600st 400st 500st st: Stroke (mm) 1 100st 200st 300st 0 0 20 40 60 80 100 120 140 160 180 200 220 240 260 280 300 320

MHL2

pinion mechanism Model/Stroke Max operating frequency (c.p.m) Opening/closing stroke (L2L1)(mm) Weight (g) Width at closing (mm) (L1) Width at opening (mm) (L2) Bore size (mm) Model Built-in dust proofing mechanism 60 20 40 60 30 60 80 40 80 100 50 100 120 70 120 160 100 160 200 56 78 96 68 110 130 82 142 162 100 182 200 150 198 242 188 246 286 76 118 156 98 170 210 122 222 262 150 282 320