Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

8 NCM Bumper A y Urethane Cushion seal B !9 Urethane 40 or larger: The same as bumper A Bumper B u NBR Cushion ring gasket A @0 NCA Stainless steel Snap ring i 32 or larger: The same as A NBR Cushion ring gasket B @1 Resin Wear ring o NBR Rod seal @2 DRolled steel Nickel plated Rod end nut !0 NBR Piston seal @3 NBR Piston gasket !1 NBR Tube gasket @4 -X Brass Cushion ring A !

IDG

0.87) 0.77 (0.90) 1.50 (1.65) 1.50 (1.65) 1.55 (1.70) BM65 IDG60/75/100 Note 1) No freezing.

SMC Pneumatic Clean Series

8 30.4 104 78 76 76 M6 x 1 depth 11 M5 x 0.8 depth 9 26-0.033 0 1/4 1/8 1/8 26-0.033 0 27 22 11 8 21.5 15 9 7 M8 x 1.25 depth 14 M6 x 1 depth 11 8 22 27 Series CBM2 10-/1121-/22Cylinder with end lock/ 20, 25, 32, 40 (Head side lock) How to Order Clean series 10 11 Relief type Vacuum suction type 10 C D B M 2 B 20 100 H N H7B 21 C D B M 2 B 20 100 H N H7B Nil Built-in magnet No Number of

MNB

8 11 11 13 16 46 52 65 75 95 114 97 104 120.5 134.5 169 189 1/8 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/8 1/8 1/8 1/8 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 13 13 14 14 20 20 25 31 38.5 39.5 45.5 54 7 9 9 9 12 14 3 3 2 2 4 4 10 10 12 12 16 16 72 83 100 115 126 150 38 46 52 62 63 75 87 101 120 135 153 178 56 65 77 92 100 120 54 63 75 90 102 116 Bore size (mm) 32 40 50 63 80 100 K MM N P Q H S T V

ZP

8 G: M5 x 0.8 G: Rc Y B C D Flat Model A E K Model F H J F H J Flat with ribs ZPT40 -B-A14 U C ZPT40D10-B-A14 55 121.5 120 18.5 32 6.5 3.3 40 43 ZPT50 -B-A14 U C ZPT40D20-B-A14 127 65 124 50 19.5 33 7.5 3.8 50 53 137 5 10 6.2 13 ZPT40D30-B-A14 75 134 Dimensions by Stroke ZPT40D50-B-A14 182 95 179 75 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 40 50 U C ZPT 20-B-A14 U C ZPT 30-

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

EA FY FZ G J K N AL E F KA MM B FA M FD S FT FX l ZZ1 ZZ H e f h 125 140 160 180 200 250 300 261 238 145 145 115 90 190 100 230 16 M14 x 1.5 98 1/2 M30 x 1.5 110 75 40 133 50 47 36 59 43 15 31 35 14 30 19 14 Up to 1400 Lube Non-lube Air-hydro 255 232 160 161 128 90 212 112 255 16 M14 x 1.5 98 1/2 M30 x 1.5 110 75 40 133 50 36 59 15 35 47 43 14 31 24 19 20 Up to 1400 0.2 x Stroke 273 252 40

MQQ

(Except clevis style) B L F G C (1) MK(2) 20 15, 30, 45, 60, 75, 100 25 15, 30, 45, 60, 75, 100 RS Q G Dealing with the stroke by the 1 mm interval is available by installing a spacer with the standard stroke cylinder. RS H A Function D (2) Nil HNote) Standard type High speed/High frequency type (Without fixed orifice) RZQ Note) Except 6 mm bore size.

MQQ

3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

Series IDG

Applicable models 0.7MPa (101.5psi) Inlet air pressure IDG3, 5 BM59 25C (77F) 25C (77F) 25C (77F) Inlet air temperature Inlet air saturation temperature Ambient temperature IDG10 BM61 1l/min (ANR) {inlet air pressure at 0.7MPa} IDG20 BM63 Dew point indicator purge air flow rate Port size (nominal size B) Weight kg (with bracket) 1/4 1/4, 3/8 1/8, 1/4 1/2 3/8, 1/2 IDG30, 50 BM64 0.11 0.25

C95

9 i@2 q r y #0$0 $2 w $3 #8 @9 A C CJ1 CJP CJ2 B CM2 Section A !2 !2 !22 $1 e $8 o $7!1@1!6 @5 u!0 $6 #7 #6 $4@8#9 @6 #4 C85 with through piston rod C76 100 80 63 50 40 32 CG1 #1 #2 Section B Section C MB MB1 80, 100 80, 100 CP95 Description Material Note Parts list Description Material Note Parts list No. q w e r t y u i o !

2–4

A B C D A B C D Bore size (mm) Port aperture A 12 (1) (1) (1) 16 (2) (2) (2) B D 20 (2) (2) (2) View from piston rod end 25 (2) (2) (2) 32 C (2) 40 (2) 50 (2) Operating Range Auto Switch Mounting Bracket/Part No. (mm) Reed switch Solid state switch Applicable switch Auto switch model Bore size Bore size (mm) Mounting bracket part no.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Mounting hole 1.5 ZZ + Stroke S + Stroke F FY 40 (mm) B WB 13 13 13 16 ZZ H H2 H1 B2 B1 80 80 82 108 F S 1/8 1/8 1/8 1/4 P A 20 25 32 40 AL 18 22 22 24 D 15.5 19.5 19.5 21 C2 34 40 40 52 FD 30 37 37 47.3 E 8 10 12 14 GC 13 13 13 16 FT 7 7 7 7 KA FL 10.5 10.5 10.5 13.5 FX 4 4 4 5 FY 60 60 60 66 FZ 36 Z 75 75 75 82 GA 8 8 8 11 GB 6 8 10 12 I 6 6 6 6 K 28 33.5 37.5 46.5 MM 5 5.5 5.5 7 NN 24

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B ZZ -t2 xstrokes.1 12 + 2X!

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

LJ1H

LJ1-7-G/Matsushita Electric Industrial Co., Ltd. 100 Driver Non-standard motor electric actuators LJ1 and LG1 75 90 5 30 (195) AC servomotor short stroke electric actuator LX How to order 13 Compatible model 1 G LJ1 05 B 1 LJ1-7-R/Mitsubishi Electric Corporation Brake G R Y Nil B Matsushita Electric Industrial Co., Ltd.

7ND9071en

Fail Action Fail to Close, Fail to Open 5 Valve Travel 85.2 % 5 Positioner Information 5 Dead Angle (a0) 0.0 % [0..99%] 6 Temperature 24.7 C 6 Units 6 Performance Level A(1)-Aggressive, b(1)-fast, C(1)-Optimum, d(1)-Stable, E-Max. stability, (1) = Capac.

70astamb1

501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501 to 600 264 264 601 to 700 289 289 701 to 800 32 40 50 63 80 100 36 23 12.5 12.5 12.5 12.5 12.5 12.5 75 75 75 75 75 75 136

mb1

F N N C B Cylinder tube sectional view B-B Stroke range Bore size (mm) Width across flats Effective thread length C B G F E A V W H ZZ S P N MM J MB 32 40 50 63 80 100 9 6.5 13 14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 22 30 35 35 40 40 47 51 58 58 72 72 135 139 156 156 190 190 84 84 94 94 114 114 1/8 1/4 1/4 3/8 3/8 1/2 26.5 26.5 31

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

A B A B A B A B A B A B Hs Hs Hs Hs Ht Hs Ht Hs Hw Hs Hw 0 (0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 1 (0) 1 (0) 5.5 (1.5) 8.5 (4) 10.5 (6.5) 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 4.5 (1.5) 4.5 (1.5) 9 (5) 12 (7.5) 14 (10) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 3 (0) 3 (0) 7.5 (3.5) 10.5 (6) 12.5 (8.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 5 (2) 5 (2) 9.5 (5.5) 12.5 (8) 14.5 7.5 8.5 1.5 (0) 1.5 (0) 6 (2) 9 (4.5

VQZ1000/2000/3000

A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.