Square Tube Type Air Cylinder Series MB1

to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 750 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 32 40 50 63 80 100 36 23 12.5 25 37.5 50 125 98 111 75 136 100 161 73 186 230 256 280 306 356 406 456 86 41 23 12.5

Free Mount Cylinder

ZPT U N 02 B4 ZP U N 04 X11 Dia. (mm) Vacuum entry (Mounting thread diameter) Dia. (mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

V100 SY Blanking plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 SYJ VK Dimensions L (mm) VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A Applicable fittings fitting d Model A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 16 16 18

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

SY SYJ VK Blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 VZ L Dimensions VT A One-touch fitting d Part No. A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 D VP Color: White VG VP L DIN rail AXT100-DR-l 12.5 (Pitch) 5.25 7.5 VQ Enter suffix number into l from the table below.

CQ2

136 161 106 131 176 201 136 161 106 131 CQS 10 to 50, 75,100 189.5 214.5 145.5 170.5 111.5 136.5 189.5 214.5 145.5 170.5 111.5 136.5 mm CQ2 Bore (mm) L LD LG LH LT LX LY LZ X Y 18 11 5 46 3.2 95 91.5 63 80 100 113 16.2 9 MU 13 7 59 4.5 118 114 140 19.5 11 20 13 7 71 6 137 136 162 23 12.5 22 Flange/CQ2WF, CDQ2WF Rod end male thread (mm) Without auto switch A1 L3 With auto switch Bore (mm)

VZS

DXT170-176-2-01 DXT170-176-2-02 100 VAC 200 VAC 100V 200V DXT170-176-2-03 220V 110V 110 VAC DXT170-176-2-04 220 VAC DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 240 VAC 240V 6VD 12VD 24VD 48VD 6 VDC 12 VDC 24 VDC 48 VDC Circuit with Indicator Light AC Circuit diagram DC Circuit diagram D: Protective diode LED: Emitting diode R: Resister NL: Neon bulb R:

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

L d m t l IY-G012 IY-J015 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 NTJ-015A NT-015A NT-02 NT-03 NT-04 NT-05 NT-08 NT-10 Type C 5 for axis M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 4 5 5 6 8 11 13 16 8 10 13 17 22 27 32 41 9.2 11.5 15.0 19.6 25.4 31.2 37.0 47.3 5 5 8 10 10 14 18 22 14.6 16.6 21 25.6 41.6 50.6 64 72 4.8 4.8 7.6 9.6 9.6 13.4 17 21 10.2 12.2

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

JIS symbol Auto switch model D-A3, D-A44 D-G39, D-K39 D-A5, D-A6, D-A59W, D-F5, D-J5 D-F5W, D-J59W, D-F5NT, D-F5BA, D-F5F D-B5, D-B6 Bore size (mm) 40 50 63 80 100 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA-04 BA-05 BA-08 BA-10 BT-04 BT-06 BT-06 BT-08 BT-08 Standard Strokes Bore size (mm) Standard strokes (mm) 40 50 63 80 100 125 160 25 to 1000 25 to 1000 25 to 1000 25 to 1300 25 to 1500

Digital Flow Switches Series PF2A

Rc NPT G Symbol N M12 3 m lead wire with connector Without lead wire Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Port size Output specification Port size Applicable model Flow rate (l/min) Symbol Symbol Output specification 100 200 500 50 10 01 02 03 04 1/8 1/4 3/8 1/2 27 NPN open collector 2 outputs PF2A710/750 PF2A711/721 PF2A751 67 PNP open collector 2 outputs

CG1

Bore size (mm) Auto switch model 20 25 32 40 50 63 80 100 D-C7/C8 BMA2-020 BMA2-025 BMA2-032 BMA2-040 BMA2-050 BMA2-063 D-H7 D-B5/B6 BA-01 BA-02 BA-32 BA-04 BA-05 BA-06 BA-08 BA-10 D-G5/K5 A set of following stainless steel mounting screws is attached. (A switch mounting band is not attached. Please order the band separately.)

Cylinder with Lock Series MNB

to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501 to 600 264 264 601 to

Air Cylinder Series MB

to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 801 to 900 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 32 40 50 63 80 100 73 37.5 50 75 100 125 86 98 111 136 161 186 36 23 12.5 25 81 37.5 50 75 100 125 94 106 119 144 169 194 41 23 12.5 25 89 37.5 50 75 100 125 102 114 127 152 177 202 51 25

ZP3

Form w 1 Material e r Vacuum inlet Connection thread N S U F GN GS HS 04 06 08 UM 02 10.8 7 2 1.4 KQ2H02-M5N C2 04 14.7 8 4 2.5 KQ2H04-M5N ZP3 Y B3 02 10.8 7 2 1.4 KQ2H02-M5N 04 14.7 8 4 2.5 KQ2H04-M5N 06 10 6 KQ2H06-M5N Vacuum inlet: One-touch fitting 10 13 16 Applicable tubing O.D.

A

62 40 62 Y52-03 3/8 14 24 41 Y61-03 3/8 15 30 50.5 Y61-04 1/2 15 30 50.5 Courtesy of Steven Engineering, Inc. !

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

type> (Lead wire length) 75.4 [82.4] Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 73.6 34.5 15.5 17.5 29.5 29.5 44.5 [1(P), 5(EA), 3(EB) port] 3/8, 1/2 96.5 L plug connector (L): M plug connector (M): DIN terminal (D, Y): 10-SY9140(R)-WO03 04 M8 connector (WO): D Y 10-SY9140(R)10-SY9140(R)-M10-SY9140(R)-L03 04 03 04 03 04

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

CE-compliant P, R port thread type Valve stations Nil Rc Stations Note Symbol 00F 04 G 4 stations 00N Double wiring Note 1) NPT 00T 08 NPTF 8 stations 04 4 stations Specified layout Note 2) SI unit part no. (Up to 16 solenoids) 16 Page SI unit part no. SI unit specifications Symbol 16 stations Nil EX510-S001 NPN output (+ COM.)

Table of Contents

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Red (+) Insulation: Black () 0.3 mm2 4.1 51.2 48.5 (92) Cable type (TT) 52-SY9240 (R) -TT03 04 Max.10 L 217.6 (Lead wire length) Lead wire marking No.1 (+), No.2 () 0.75 mm2 (108.8) 21 ATEX Compliant Base Mounted Type Series 52-SY9000 Dimensions 29 30 3-position closed centre/exhaust centre/ pressure centre L plug connector (L) 17.5 52-SY9440 (R) -L03 04 3 5 123 51.2 86.5 Manual override

Smooth Cylinder/Low Speed Cylinder

NT-02 NT-03 NT-04 13 15.0 12.5 M8 x 1.25 5 M10 x 1.25 17 19.6 16.5 6 M14 x 1.5 22 25.4 21.0 8 2 x LD Mounting Nut Applicable pin part no. Part no.

Intrinsically Safe Valve

-LLL (Lead wire length) 148.3 Insulator: Red (+) Insulator: Black () 0.3 mm2 4.1 5.9 51.2 03 04 Terminal type (TT) 53-SY9140-TTMax. 10 L (Lead wire length) 165.1 Lead wire marking No. 1 (+), No. 2 () 0.75 mm2 48.5 29 Base Mounted Series 53-SY5000/7000/9000 Dimensions: 53-SY9000 2-position double L-type plug connector (L) 53-SY9240-L03 04 29 30 17.5 106 86.5 51.2 2 x 5.4 (For mounting) 25