ARM10/11

150 0 20 40 60 80 100 Flow rate /min(ANR) Flow rate /min(ANR) ARM10F-08 ARM10-08 (One-touch fittings: IN/OUT 6) ARM10F-08-1 ARM10-08-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 300 0.00 0 50 100 150 200 Flow rate

ARM10/11

150 0 20 40 60 80 100 Flow rate /min(ANR) Flow rate /min(ANR) ARM10F-08 ARM10-08 (One-touch fittings: IN/OUT 6) ARM10F-08-1 ARM10-08-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 300 0.00 0 50 100 150 200 Flow rate

VFR

400 300 200 100 0 VF B VFR VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VZS C VFS VS4 800 700 600 500 400 300 200 100 0 VQ7 D EVS VFN 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out

Compact 5-Port Solenoid Valve

to 100 N Without pressure switch for vacuum/pressure sensor 100 to 100 i Option4 (For details on the Function/Application, refer to page 121.)

CV/MVGQ

Different sides RZQ 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Different sides MI W S n 100 + 100 (n 2) n = 2, 4, 6, 8 Same side CEP1 10 35 55 75 80 90 100 100 100 75 80 90 1 Different sides CE1 2 Same side 35 + 30 (n 2) n = 2, 3, 4 75 + 30 (

CV/MVGQ

110 + 50 (n 2) n = 2, 4, 6, 8 Same side 15 90 100 110 35 100 100 110 100 1 Different sides 2 Same side 100 100 110 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8 Different sides n 100 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Same side 100 100 110 90 100

AS-FG/ASD-FG

ASD230FG ASD330FG ASD430FG 100 200 400 1.5 3 6 07, 08, 09, 10, 11 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area mm Effective area mm Effective area mm 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle revolutions Number of needle revolutions Number of needle revolutions ASD530FG ASD630FG 1500 1000 14 20 12 Flow rate l/min

0.4

How to Order Manifold VV5Q 1 1 08 C6 FU1 CE-compliant Series Nil CE-compliant VQ1000 1 Q Note) For CE-compliant models, DC-type only.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

VCHC ASD230FG ASD330FG ASD430FG ASR ASQ 100 200 400 07,08,09,10,11 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 300 06 200 50 100 100 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530FG ASD630FG ASD530FG ASD630FG 1500 1000 10,11 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 10,11,12 08,09 1000 500 06,07

CL

-04M BD1-05M BD1-06M BD1-08M BD1-10M BA-04 BA-05 BA-06 BA-08 BA-10 BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 Mounting brackets are provided with D-A3C, A44C, G39C, and K39C.

KR

(100) 44.5 112 16 22 1 2 KGT16-04 40.5 46 116 Reference dimensions after R thread installation.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

-08 80 18 depth 12 52 13 38 11 16 d1 d2 YB-10 100 21 depth 14 62 17 50 14 19 L UT Weight (g) Bore size (mm) RS W T1 T2 V Part no.

CQ2

B bracket A bracket YB-03 YU-03 YA-03 32, 40 25 YB-05 YU-05 YA-05 50, 63 40 Bore size (mm) YB-08 YU-08 YA-08 80 90 Part No. B D E J M O YB-10 YU-10 YA-10 100 160 12 YB-03 7 25 9 34 11.5 Depth 7.5 32, 40 12 YB-05 9 32 11 42 14.5 Depth 8.5 50, 63 16 YB-08 11 38 13 52 18 Depth 12 80 19 YB-10 14 50 17 62 21 Depth 14 100 Weight (g) Bore size (mm) Part No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

-08 80 18 depth 12 52 13 38 11 16 d1 d2 YB-10 100 21 depth 14 62 17 50 14 19 L UT Weight (g) Bore size (mm) RS W T1 T2 V Part no.

Micro Mechanical Valve Series VM1000

VM1100-4NU-08 VM1000-4NU-08 Applicable tube P.T.

CLQ

CLS YA YB YU Type A mounting bracket Type B mounting bracket Joint 32, 40 50, 63 80 100 YA-03 YA-05 YA-08 YA-10 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 CLQ MLGP Applicable mounting bracket Bore size (mm) Joint RLQ Type A mounting bracket Type B mounting bracket Type B Mounting Bracket 32, 40 YU-03 YA-03 YB-03 MLU 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 ML1C 100 YU-10 YA-10

CLQ

A type mounting bracket B type mounting bracket Joint YA YB YU 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 Applicable mounting brackets Bore size (mm) Joint A type B type B type mounting brackets 32, 40 YU-03 YA-03 YB-03 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 100 YU-10 YA-10 YB-10 Allowable eccentricity (mm) RS 32 40 50 63 80 100 Bore

Compact Cylinder with Air Cushion

eccentricity mm 80 YA-08 100 340 36 12 100 YA-10 Bore size 32 40 50 63 80 100 B type mounting bracket 1 1.5 2 Eccentricity tolerance 0.5 Backlash Joints are not included with A type and B type mounting brackets.

RQ

RQ Applicable air cylinder bore YA-03 32, 40 42 6 16 6.8 18 6.5 10 MU YA-05 50, 63 50 8 20 9 20 6.5 12 YA-08 80 62 10 25 11 26 8.5 16 03 05 08 10 For 32, 40 For 50, 63 80 100 Mounting bracket DYA-10 100 76 12 30 14 31 10.5 18 Type A mounting bracket YA YB YU Bore size (mm) Type B mounting bracket Joint W V U Weight (g) Part no.

Compact Cylinder with Lock Series CLQ

A type mounting bracket B type mounting bracket Joint YA YB YU 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 Applicable mounting brackets Bore size (mm) Joint A type B type B type mounting brackets 32, 40 YU-03 YA-03 YB-03 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 100 YU-10 YA-10 YB-10 Allowable eccentricity (mm) RS 32 40 50 63 80 100 Bore