Max Operating Pressure: 7 MPa, Construction: Element Upward Removal, Threaded, Port Size: 06 [3/4 Threaded, 20 (3/4) Flange SSA], Pressure Indicator: Differential Pressure Indication Switch, Relief Valve: None, Fluid: Petroleum, Element: Paper, Filtration: 5μm, Fluid Direction: -, Made to Order: -

Max Operating Pressure: 4 (7 MPa), Construction: 40 (Element Upward Removal, Threaded), Port Size: 08 [1 Threaded, 25 (1) Flange SSA], Pressure Indicator: 2 (Differential Pressure Indication Switch), Relief Valve: 1 (None), Fluid: 0 (Petroleum), Element: M (Micromesh), Filtration: 40μm, Fluid Direction: IN Left, Made to Order: X0 (Non-standard Filtration)

Max Operating Pressure: 4 (7 MPa), Construction: 40 (Element Upward Removal, Threaded), Port Size: 06 [3/4 Threaded, 20 (3/4) Flange SSA], Pressure Indicator: 2 (Differential Pressure Indication Switch), Relief Valve: 1 (None), Fluid: 0 (Petroleum), Element: P (Paper), Filtration: 5μm

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Lx = 220 mm, Ly = 210 mm, Lz = 430 mm 4.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

/5 to 100 50 to 100/10 to 100 12, 16, 20, 25 32, 40, 50, 63 80, 100 RQ Double rod CQ2W 7-6-25 MU Spring return/ 12, 16, 20 25, 32, 40 50 Single acting 12 to 40/5, 10 50/10, 20 D7-6-42 Spring extend CQ2 -X Non-rotating Rod 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50, 63/10 to 100 12, 16, 20 25, 32, 40 50, 63 Single rod CQ2K 7-6-62 20Double acting Data 12, 16, 20 25, 32, 40 50, 63 12,

CQ2

16 20 25 32 40 50 5.5(10) 5(7) 6.5 7 6 8.5 11.5 6(10.5) 3(7.5) 10(14.5) 5.5(7.5) 7 7.5 6.5 9 12 2.5(4.5) 4 4.5 3.5 6 9 9.5(11.5) 11 11.5 10.5 13 16 7.5(5.5) 7.5 7.5 9 13 11 12(10) 12 12 13.5 17.5 15.5 ( ): Spring extend 2.3-95 Series CQP2 12 to 50 Spring Return Without Auto Switch 12 to 25 Rod end male thread Rod end male thread (mm) Bore (mm) 12 16 20 25 H1 L1 C1 X 9 10 12 15 10.5 12 14

5

01 03 50 12 Part no.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

00F 12 stations 00N Refer to page 3-3-7 regarding how to order applicable connector assemblies.

CL

to 350 301 to 400 301 to 450 301 to 800 12 12 12 13 149 159 162 178 11 11 11 12 12 12 12 13 149 159 162 178 125 135 136 151 16 16 16 16 186 201 204 230 12 12 12 13 149 159 162 178 205.5 227.5 208.5 235 230.5 255 3.1-30 SeriesCLG1 Accessory Dimensions Single Knuckle Joint Double Knuckle Joint (Knuckle pin and snap ring are packed.)

CG5-S

10 AS4311FG-04-10 AS3311FG-02-12 -03-12 AS4311FG-04-12 R 1/4 10 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 12 In-line Type AS-FG JIS symbol SUS303 Model Model In-line type Applicable tubing O.D.

CL

227.5 230.5 255 ZZ ZZ 206 223 226 250 ZZ ZZ 206 223 226 250 20 25 32 40 186 201 204 230 149 159 162 178 12 12 12 13 20 25 32 40 190 205.5 208.5 235 149 159 162 178 12 12 12 13 125 135 136 151 186 201 204 230 149 159 162 178 12 12 12 13 14 14 14 15 201 to 350 301 to 400 301 to 450 301 to 800 11 11 11 12 20 25 32 40 9-2-32 31 Series CLG1 Fine Lock Cylinder Double Acting, Single Rod Construction

CL

227.5 230.5 255 ZZ ZZ 206 223 226 250 ZZ ZZ 206 223 226 250 20 25 32 40 186 201 204 230 149 159 162 178 12 12 12 13 20 25 32 40 190 205.5 208.5 235 149 159 162 178 12 12 12 13 125 135 136 151 186 201 204 230 149 159 162 178 14 14 14 15 12 12 12 13 201 to 350 301 to 400 301 to 450 301 to 800 11 11 11 12 20 25 32 40 9-2-32 31 Series CLG1 Fine Lock Cylinder Double Acting, Single Rod Construction

C95

12 16 16 130 145 155 170 190 205 7 9 9 9 12 14 10 12 12 16 16 20 65 75 80 90 110 140 12 15 15 20 20 25 142 160 170 190 210 230 45 52 60 70 90 110 26 28 32 40 50 60 26 28 32 40 50 60 9.5 12 12 16 16 20 32 36 45 50 63 75 10 11 12 12 14 16 4.5 4.5 5.5 5.5 6.5 6.5 144 163 175 190 215 230 142 161 170 185 210 220 32 36 45 50 63 71 7 10 10 10 12 14.5 17 22 22 28 34 40 95 106.5 122 129.5 150 160

Solid State Auto Switches

Note 4) The auto switches can operate at 12 VDC, but consider the internal voltage drop of the auto switch described in Reed Auto Switch Precautions on page 12.

Series VQ Base Mounted Metal Seal/Rubber Seal

Name Material Number VVQ2000-80A-1 VVQ2000-80A-2 VVQ2000-80A-3 VVQ2000-80A-4 Gasket Packing Clamp screw Clip 12 12 12 12 Note) A set of parts containing 12 pcs.each are enclosed. NBR NBR Carbon steel Stainless steel !0 !1 !2 !3 !4Fitting Assembly No. (For cylinder port) VVQ100051A !5Fitting Ass'y No.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Back port (Refer to P . 8-12-3.)

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

PLC Fieldbus network Gateway (GW) unit Serial communication RS485 Up to 12 controllers are connectable.

Vacuum System Peripherals:

) Diaphragm reed switch (100 VAC) 1 point setting M21 Note) Low wattage type is,12, 24 VDC.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Back port (Refer to P . 8-12-3.)

New

240 VAC Conduit Example) VXN Z Z 1A 1 2 A (With surge voltage suppressor) 24 VAC 12 VDC 12 VDC 24 VDC Electrical option Other option Faston terminal 100 VAC 110 VAC 200 VAC 230 VAC DIN terminal (With surge voltage suppressor) 48 VAC 2G 2H 2V 2J 220 VAC 240 VAC 24 VAC 12 VDC 24 VDC 2K 2L 100 VAC 110 VAC 200 VAC 230 VAC 2M 2N 2P 2Q 2R 2S Conduit terminal (With surge voltage suppressor) 48