52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 301 to 800 to 300 301 to 800 (mm) Without rod boot With rod boot Bore size (mm) 20 25 32 40 I J K KA MM NA P PG PH PL S FD FT FX FY FZ XA XB l H 0.25 ZZ e f h ZZ 198 (206) 26 141 (149) 35 178 (186) 30 22 55 5 6 M8 x 1.25 24 1/8 21.5 2 65 5.5 6 52 25 65 3 12 M4 x 0.7 Stroke x 215 (223) 31 151 (159) 40 193 (201) 30 24 62 5.5 8 M10 x 1.25
/6, 48/12, 100/24 VDC Yes 24 VDC, 100/200 VAC 10 G, C, D, T type AWG20, O.D.: 2.63 mm G type only VCTF2 x 0.75, O.D.: 2.3 mm, Sheath O.D.: 6.6 mm Class B 0.17 0.4 0.7 0.7 1.0 Note 1) Conductance is the value for an elbow with the same dimensions.
) 63 40 20 78 72 24 10.5 170 (182) 80 52 10 80 59 191 (205) 100 62 7 80 71 191 (205) 1/4 stroke * The minimum stroke with rod boot is 20 mm.
) Rc 1/2 34 3(R) 3(R) PA NO NC 112 (Mounting hole) 2-8.5 40 PA 52 119.5 112.5 86 1(P) 119.5 24 52 PA (P port) Rc 1/2 (Pitch) 41 37 (PA port) Rc 1/8 112.8 8 L2 L1 (PA port) Rc 1/8 PA 86.3 78.3 2(A) 2(A) 63 19 Rc 1/2 n: Station n L L1 L2 Formula L1 = 41 x n + 33 L2 = 41 x n + 17 9 402 386 10 443 427 2 115 99 3 156 140 4 197 181 5 238 222 6 279 263 7 320 304 8 361 345 5-5-24 1 3 Port Air Operated
ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM
35 12 21 21 41.5/29.5 10 38 KQE10-03 M20x1 24 24 34.5 15 21 21 41.5/29.5 12 38 KQE12-03 M22x1 24 27 37 15 23 22 58.3/46.1 12 12 KQE12-04 M22x1 24 27 41 18 23 22 58.3/46.1 16 38 KQE16-03 M26x1.5 30 30 39 14 27 24 96(96) 16 12 KQE16-04 M26x1.5 30 30 41 18 27 24 113(96) P R O D U C T S E L E C T O R S T R A I G H T U N I O N : KQH (KQ2H) Use to connect tubes in the same direction.
5 With function plate M3 x 0.35 x 24 6 Components Vacuum switch/Filter unit Misc. 13-3-49
81 85 85 90 101 to 150 93 97 97 102 151 to 200 106 110 110 115 201 to 300 131 135 135 140 301 to 400 156 160 160 165 401 to 500 185 185 190 20 25 32 40 24 24 24 25 36 36 36 46 With rod boot (mm) ZZ Symbol Z 1 to 50 143 147 149 181 l 1 to 50 63 67 67 71.5 Stroke 1 to 50 12.5 12.5 12.5 12.5 Bore 51 to 100 25 25 25 25 101 to 150 37.5 37.5 37.5 37.5 151 to 200 50 50 50 50 201 to 300 75 75 75
Note 2) VS 8-2 Size 18 mm ( ) 1/8" (Side, Bottom) VV802 170 985 1/8" 3-position exhaust center 24 16 24 24 20 24 24 (A) 4 (B) 2 1/2" Built-in silencer (Option) S R VS 8-4 Size 26 mm ( ) 3/8" (Side) 1/4" (Side, Bottom) VV801 1240 1/8" 330 1 (P) 5 (R1) 3 (R2) 3-position pressure center Note 1) Mass for each wiring part is not included.
(inch) Connection thread UNF NPT Min. port size D Note) Weight (g) Model L1 L2 M KQ2F01-34 KQ2F01-35 KQ2F03-34 KQ2F03-35 KQ2F07-34 KQ2F07-35 KQ2F07-36 KQ2F09-34 KQ2F09-35 KQ2F09-36 KQ2F11-35 KQ2F11-36 KQ2F11-37 KQ2F13-36 KQ2F13-37 1 8 1 8 26.5 30.5 27 31 27.5 31 33.5 29 32.5 34.5 34.5 36.5 40.5 36.5 41 11.5 14.5 11 13.5 10.5 13.5 15.5 10.5 13.5 13 16 26 15 24 17 25 44 18 26 38 30 48 52 48
52 VQ4000 3/8 Exhaust center Metal seal VQ440 5 0 6.2 0.18 1.5 6.9 0.17 1.7 45 47 47 0.28 (0.34) Rubber seal VQ440 5 1 7.0 0.38 1.9 7.3 0.38 2.0 50 52 52 3-position Pressure center Metal seal VQ450 5 0 6.2 0.18 1.6 6.4 0.18 1.6 45 47 47 0.28 (0.34) Rubber seal VQ450 5 1 7.0 0.38 1.9 7.1 0.38 2.0 50 52 52 Double check Metal seal VQ460 5 0 2.7 3.7 55 57 57 0.50 (0.56) Rubber seal VQ460
Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39 48 58 45 52 88 88 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48 58 68 93 118 143 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 M 78 78 88 98 114 146 189 214 Z 77 77 87 97 113 145 188 213 ZZ 89 89 99 109 125 157 200 225 MXQ16-
than listed, refer to page 10-2-52 for details.
Leakage current 100 A or less at 24 VDC 0.8 mA or less at 24 VDC MK(2) Indicator light Red LED lights when ON.
current 100 A or less at 24 VDC 0.8 mA or less at 24 VDC CNS Indicator light Red LED lights when ON.
24 C7 C7 30 +0.5 +0.2 12 0.1 0.3 12 41.2 26 24 18 36 36 D48 48 Please contact SMC for details of the CKGA32 series.
All Models Model 22, 32, 72 STRAIN RELIEF CONNECTOR .30 (7.6) .30 (7.6) .20 (5.1) SPADE TERMINAL COIL MOLDED MANIFOLD MOUNT All Models Models 22, 32, 52 Model 22**, 32, 52, 72 * SINGLE AUTOMOTIVE ADD .232 (5.9) FOR SPADE TERMINAL COIL OPTION HIGH TEMPERATURE MOLDED COIL FLANGE MOUNT All Models except 52 All Models Models 22**, 72 DOUBLE AUTOMOTIVE PORT 90 RIGHT All Models except 52 EUROPEAN
E0 E0.1 (1) 85% LECSS2-T 85% 8 52 8.