High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

OMR0031

NPN type -PNP type Input signal power Input signal power CN5 CN5 supply supply 24 VDC 24 VDC A1 COM A1 COM A2 IN0 A2 IN0 A3 IN1 A3 IN1 A4 IN2 A4 IN2 The power supply can be either polarity. The power supply can be either polarity.

OMR0032

Wire the product while referring to the wiring diagram below. (1) NPN type (2)PNP type Input signal power Input signal power CN5 CN5 supply supply 24 VDC 24 VDC A1 COM A1 COM A2 IN0 A2 IN0 A3 IN1 A3 IN1 A4 IN2 A4 IN2 The power supply can be either polarity. The power supply can be either polarity.

MXQ

Find the load factor 2 of the static moment. 3-3 Load Factor of Dynamic Moment Pitching Examine Mep. (30 + 10.5) Mep = 1/3 x 16.8 x 9.8 x = 2.2 1000 We = 4/100 x 10 x 420 = 16.8 A2 = 10.5 Meap = 1 x 0.7 x 18 = 12.6 K = 1 = 0.7 Mpmax = 18 3 = 2.2/12.6 = 0.17 (Ln + An) Me = 1/3 We x 9.8 1000 Collision equivalent to impact We = W V : Bumper coefficient Rubber stopper without adjuster =

F/ISE

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

L6 ASV AK VCHC T ASR ASQ Metric Size d Model H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 A1 A2 M1 T Weight (g) 17 ASD230F-M5-04D ASD230F-M5-06D ASD330F-01-06SD ASD330F-01-08SD ASD430F-02-06SD ASD430F-02-08SD ASD430F-02-10SD ASD530F-02-06SD ASD530F-02-08SD ASD530F-02-10SD ASD530F-02-12SD ASD530F-03-06SD ASD530F-03-08SD ASD530F-03-10SD ASD530F-03-12SD ASD630F-04-10SD ASD630F-04-12SD 4 9.3 29.4 17.5

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

95.5 24.5 115.5 44.5 115.5 MX D-M9, D-M9V (mm) Mounting pattern q Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 MTS Operating range B1 A1 B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 MY 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 CY Mounting pattern w B2 A2 D-F9W, D-F9WV MG (mm) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3

ZSE30A(F)/ISE30A

A2 Bracket B (Option unit part no.: ZS-38-A2) 42.5 (A) A3 Bracket C (Option unit part no.: ZS-38-A3) Bracket configuration allows mounting in four orientations. 30 1.6 25 20 20 45 30 5.2 5.5 5.2 9.1 13.6 A B 41.4 16.4 Bracket B B 7.5 7.2 53 28 Bracket C 20 When using the bracket B or C, install it by taking the dimensions of the piping part into consideration. 38 2-Color Display High-Precision

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

= m 12 a2 = m1 +m2 3 a12 3 a22 12 4a12 + b2 = m1 CRBU2 12 4a22 + b2 + m2 CRB1 7.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

95.5 24.5 115.5 44.5 115.5 MX D-M9, D-M9V (mm) Mounting pattern q Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 MTS Operating range B1 A1 B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 MY 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 CY Mounting pattern w B2 A2 D-F9W, D-F9WV MG (mm) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

MXF

Find the allowable static moment Ma (Nm). 2 = 0.23/9.14 = 0.025 Find the load factor 2 of the static moment. 2 = M/Ma 3-3 Load factor of dynamic moment Pitching Examine Mep. (30 + 17) Mep = 1/3 x 8.4 x 9.8 x = 1.3 1000 We = 4/100 x 0.5 x 420 = 8.4 A2 = 17 Meap = 1 x 0.7 x 9.14 = 6.40 K = 1 = 0.7 Mpmax = 9.14 3 = 1.3/6.40 = 0.20 (Ln + An) Me = 1/3 We x 9.8 1000 Find the dynamic moment Me

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

Compact

T1 = V/a1 = 1000/2500 = 0.4 [s], T1 T2 T3 T4 11LEJS T3 = V/a2 = 1000/2500 = 0.4 [s] L: Stroke [mm](Operating condition) V: Speed [mm/s](Operating condition) a1: Acceleration [mm/s2](Operating condition) a2: Deceleration [mm/s2](Operating condition) T = T1 + T2 + T3 + T4 [s] L 0.5V(T1 + T3) V 25AT2 = T1: Acceleration time and T3: Deceleration time can be obtained by the following equation

PSxx-OMG0005CN

[V] A B C 0-101 kPa 0 -101 kPa 10.1 kPa -100100 kPa -100 kPa 100 kPa 01 MPa 0 1 MPa -0.1 MPa 0500 kPa 0 500 kPa -50 kPa -13No.PS-OMG0005CN-E PSE5601 PSE56N01 02 N02 PSE56-C01 A B PSE56-01 8.2 R1/8 PSE56-02 12 R1/4 PSE56-N01 9.2 NPT1/8 PSE56-N02 12.2 NPT1/4 PSE56-A2 PSE56-C01 Rc1/8 PSE56-A2 15.5 URJ1/4 PSE56-B2 9.5 TSJ1/4 PSE56-B2 ZS-31-X D E F G H I ZS-31-X188 20 9 R1/8 R1/8 14 1.5

LEF-OM007xx

A1,A2 32 200 S3 32 200 S3 200 to 230VAC LECSA2 A2 200 to 230VAC LECSA2 A2 Both side D Both side D 40 400 S4 40 400 S4 100 to 120VAC 100 to 120VAC LECSB1 LECSB1 B1 B1 25 100 S6 25 100 S6 Motor option 32 200 S7 AC servo motor (Absolute encoder 32 200 S7 AC servo motor (Absolute encoder LECSB2 LECSB2 200 to 230VAC B2 200 to 230VAC B2 B1,B2 B1,B2 Without lock Nil Without lock Nil 400 400 40

LECA6_C

B13 A13 B13 CN5 -A1 COM DC24V 24V A2 COM DC24V 0V A3 INO Bit No.

LECP6_C

6.1 / . . 1 1 2 11 2 13 3 DC24V10 3 DC30V 4 ON 3.5mA20(DC24V ) 4 10mA 5 OFF 1.5mA 11V 5 2.0V() 6.2 /(NPNPNP ) /NPN LECP6NPNP LECP6P (1) I/O (NPNPNP ) NPN (a) COM+ A1 (b) IN0A3SVONA13 (a) PNP (b) (a) COMA2 (b) IN0A3SVONA13 (2) I/O NPN OUT0B1 ALARMB13 COMA2 PNP COM+ A1 OUT0B1 ALARMB13 23 - 63 / I/O A1 B1 A1 A13 B1 B13 A13 B13 CN5 PLC -A1 COM DC24V /24V A2

Step Motor Controller With Step data Teaching Function (Servo / 24VDC)

NPN Type PNP Type I/O signal power I/O signal power CN5 CN5 24VDC 24VDC A1 COM A1 COM A2 COM A2 COM A3 IN0 A3 IN0 A4 IN1 A4 IN1 A5 IN2 A5 IN2 A6 IN3 A6 IN3 A7 IN4 A7 IN4 A8 MODE A8 MODE A9 SETUP A9 SETUP A10 HOLD A10 HOLD A11 DRIVE A11 DRIVE A12 RESET A12 RESET A13 SVON A13 SVON B1 OUT0 Load B1 OUT0 Load B2 OUT1 B2 OUT1 Load Load B3 OUT2 B3 OUT2 Load Load B4 OUT3 B4 OUT3 Load Load B5 OUT4

3

Load at the end of lever arm = m a2 = m1 + m2a22 + k a12 12 3 Dk = m2 2r2 5 -X 387 MK Series Design/Selection Caution 1.

CY1F

115.5 D-F9, D-F9V (mm) Mounting patternq Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 B1 A1 Operating range B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 Mounting patternw B2 A2 D-F9W, D-F9WV (mm) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 Operating range B1 B2 B3 (mm) 10 15 25