AC

Example) With L type bracket: E 0LWith T type bracket: E 0TOne with AC installed is special product. T Type Interface: (T) 1/8, 1/4, 3/8 T type interface makes it easier to diverge air output.

NARM Series

-P10-N01 Blanking plate kit 136114A 136214A (plate, screws, and o-ring) Manifold base, 13612-*-N 13622-*-N Common IN (A1, A2) Manifold base, 13613-*-N 13623-*-N Individual IN (B1, B2) * Denotes number of stations: 2~10 available. 10 10 station NARM2000-4B2 Note1) In case of A1 and B1, a pressure gauge or a plug is mounted at the body side, while in case of A2 and B2, at the manifold side.

Proposals for Energy Saving

(P .E.)

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

F/ISE

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

o

Manilold Sa$e as NVJ3OO Series manitold base Type 20,41, S41,42,S42.

o

Manilold Sa$e as NVJ3OO Series manitold base Type 20,41, S41,42,S42.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

Manilold Sa$e as NVJ3OO Series manitold base Type 20,41, S41,42,S42.

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

MB

6. 6-6-19 19 Series MBW With Mounting Bracket Basic: (B) 2-P G MM MM G VW Cushion valve Port E D D e A K F N MA MB Effective thread Effective thread 2 x 4-J C 13 B N F A K f 9 l S + Stroke H H + Stroke h ZZ + 2 Stroke 2-RcP G G MM MM With rod boot D e e Effective thread Effective thread Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

MXW

7 y r e t w q @1 !0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !6 !4 !1 !3 !2 @0 !9 o u i Component Parts No.

MXW Series Long Stroke Slide Table

-M4 x 0.7 thread depth 6 (Helisert) 5H9 +0.03 depth 4.5 0 6 38 5 22 12 Y Y 25 40 84 L 10 13 13 K A 30 24 15.8 A Z NN-M4 x 0.7 thread depth 8 Bottom through hole 3.3 (N-1) x H G N-M4 x 0.7 thread depth GG HH H 6 depth 4.5 5H9 +0.03 Bottom through hole 3.3 0 5H9 +0.03depth 4.5 0 F E G F E Model HH H GG J Z N L K NN 64 106 71 MXW875 30 19 92 228 5 45 31 1 98 112 106 MXW8100 32 34 115 278 5

CNS

2 %5r CNA CNS Description Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-J CX E DB A C D -X (mm) 20B A 53 77 112 160 C 15 35 45 55 D 26 50 64 80 E 4.9 8 11.7 14.8 F 3 5 6 8.5 G 6.5 9.5 11 14 H 3.4 5.5 6.6 9 J M4 x 0.7 M6 x 1 M8 x 1.25 M10 x 1.5 Model Applicable cylinder MY3A16, MY3B16

Cylinder with Lock Series CNS

8 NDH10 Material: Cast iron (mm) Applicable bore size (mm) A2 E1 MM NX RR1 U1 L1 NDH10 Part No.

ARM10/11

Material Description Description q w e r t y u i o !0 !

ARM10/11

Material Description Description q w e r t y u i o !0 !

SFOD-OMT0005CN

<> <> <> ON(SVONON) (01-193) E <>ON(SVON ON) <> Output current limit is exceeded set value (01-194) Over current E <> -66- <> <> I sent ALM (1-195) E <> (01-196) E <> <>EEPROM (01-197) E <> (EEPROM 10 ) <>CPU (CPU ) CPU (01-198) CPU E <> *1 (code)-3 Byte16-19 10 -67- 16/ A () (50mm ) () ( ) 5m 5m 10%(15m 20%) -68- 17/ 17.1.

PSxx-OML0002CN

B NH7 1/4 inch N7H A3 C C4L 4mm5/32 inch C6L 6mm B N7L 1/4 inch D + N NPN1 P PNP1 A NPN2 B PNP2 C NPN1+ D NPN1+ E PNP1+ F PNP1+ 1 L (2 m) 1 (2 m 1 G 1 M SI2 P (psi)1 1NP3 4 1 2kPaMPa -8No.PS-OML0002CN-G / A ZS-38-A1 (M35 L 2 ) B ZS-38-A2 (M35 L 2 ) C ZS-38-A3 (M35 L 2 ) ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-38-3L 3 1 2m ZS-38-4L 4 2 2m ZS-38-3G 3 1 2m ZS-38-4G 4 2

Step Motor Controller With Step data Teaching Function (Servo / 24VDC)

NPN Type PNP Type I/O signal power I/O signal power CN5 CN5 24VDC 24VDC A1 COM A1 COM A2 COM A2 COM A3 IN0 A3 IN0 A4 IN1 A4 IN1 A5 IN2 A5 IN2 A6 IN3 A6 IN3 A7 IN4 A7 IN4 A8 MODE A8 MODE A9 SETUP A9 SETUP A10 HOLD A10 HOLD A11 DRIVE A11 DRIVE A12 RESET A12 RESET A13 SVON A13 SVON B1 OUT0 Load B1 OUT0 Load B2 OUT1 B2 OUT1 Load Load B3 OUT2 B3 OUT2 Load Load B4 OUT3 B4 OUT3 Load Load B5 OUT4