VQ5000

VQ550 Indicator light Indicator light 214 121.8 195 (200.5) 91.5 59.5 105.8 (Port A) 17.5 13.5 (Port B ) 2 2 73 (78.5) 122 106 59.5 (Port A) 17.5 13.5 (Port B) 2 4 SMC SMC 2 4 A B 40 53 66 162 50 41 37 31.5 18 A B A B 53 66 40 B A 1 3 5 14 12 35 53 2-6.5 Mounting hole Manual override 5 1 3 12 14 Manual override 35 53 2-6.5 Mounting hole G1/2 Electrical entry 18 31.5 37 41 50 98 G1/2 Electrical

42

0 1 3-position double check: VQ5600 1 Indicator light Indicator light 2 194.8 (200.3) 2 213.5 73 (78.5) 121.8 91.7 59.5 105.8 121.8 105.8 59.5 13.5 2(B) port 4 (A) port 17.5 (A port)17.5 13.5 (B port) SMC 2 4 2 4 SMC A B A B 40 53 66 162 50 41 37 31.5 18 66 53 40 A B A B 1 3 5 14 12 14 5 1 3 12 35 53 2 x 6.5 Mounting hole 35 53 2 x 6.5 Mounting hole Manual override Manual override 31.5 37

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Inch Size Applicable tubing O.D. d Applicable tubing O.D. d T D1 D2 D3 L1 L2 L3 M1 L4 (3) A (2) D1 D2 L1 L2 L3 L4 (3) A (2) Weight (g) H (1) Weight (g) H (1) T M1 Model Model Min.

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

D2 L1 L2 L3 L4 A Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Max.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

D2 D3 L1 L2 L3 L4 M1 L5 Weight T D1 H(1) D2 D3 L1 L2 L3 L4 M1 L5 H(1) A(2) A(2) AQ Weight (g) (g) Model Min.

KS/KX

D2 L A M D1 Nylon Urethane M5 X 0.8 M6 X 1.0 38.5 KXH04-M5 KXH04-M6 KXH04-01S KXH06-M5 KXH06-M6 KXH06-01S KXH06-02S KXH08-01S KXH08-02S KXH08-03S KXH10-02S KXH10-03S KXH10-04S KXH12-03S KXH12-04S 11 13 39 35 8 16 10.4 2.5 4.0 4.0 4 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 12 1 8 M5 X 0.8 M6 X 1.0 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 17 15 12.8 38 39 42 43 44 1 8 1 4 1 8 20 26 28 34 42 68

Rotary One-touch Fittings Manifold Series KM

Applicable Applicable Port B min. port size Weight (g) size d D1 Part No. D2 L1 L2 L3 P Q1 Q2 A MB MA tube O.D.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

type: Stainless steel 615 Series AS20-T Dimensions L4 D3 H (Hexagon width across flats) T2 L3 A L2 D1 D2 T1 L1 Dimensions A AS120-U10/32-T 10-32 UNF 10-32 UNF AS120-M5-T M5 x 0.8 8 9 M5 x 0.8 Model T2 H D1 T1 D2 D3 L1 L2 L3 L4 Weight (g) 13 9 4.5 10 31 10.3 0.7 27.4 AS220-N01-ST NPT 1/8 12.7 NPT 1/8 AS220-F01-ST G 1/8 AS220-01-ST Rc 1/8 12 14.3 R 1/8 33 14.6 7 18 34.7 13.2 1.5 31.6 AS220

Table of Contents

A Auto switch 50 to 100 50 to 100 HS HS 12 12 SMC SMC 24.5 24.5 A 33 B A 33 Auto switch B D-C73C/C80C 20 to 40 D-H7C 20 to 40 HS HS Auto switch Auto switch B A B A 50 to 100 50 to 100 HS HS 8.5 8.5 SMC SMC 16 16 A 36.7 Auto switch A 38.2 B Auto switch D-A3/G39/K39 D-A44 Auto switch HS HS 36 36 Auto switch A 49 B A 49.5 B G 1/2 (Applicable cable O.D. 6.8 to 11.5) G 1/2 (Applicable

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Cushion valves are provided with a crimp (32) or a retaining ring (40 to 100) as a stopping mechanism, and the cushion valve should not be opened above that point.

7ND9071en

R K05 Omron D2VW-5, 3 A 250 V AC, 0.4 A 125 V DC, 5 A 30 V DC. Temperature range: -40 to +85 C / -40 to +185 F. Not applicable to 6. sign "X", "X7", "Z", "U" and "E4". Omron D2VW-01, gold plated contacts, 100 mA 30 V DC / 125 V AC. Temperature range: -40 to +85 C / -40 to +185 F. Not applicable to 6. sign "X", "X7", "Z", "U" and "E4".

Table of Contents

A 30 20 ZSE ISE 20 PSE 45 Z I SE3 55 4.5 11.5 40 15 PS 4.5 Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6.5 1.6 ZSP 20 41.5 ZS-24-A Bracket A View A ISA2 IS Bracket D ZSM A PF2 30 20 IF Data 20 45 55 4.2 4.5 40 11.5 15 7.2 7.5 1.6 41.5 35 22 ZS-24-D Bracket

C95

GKM (ISO 8140) Steel, zinc chromate plated Bore (mm) e b d f L1 c a M10 X 1.25 M12 X 1.25 M16 X 1.5 M20 X 1.5 10 12 16 20 40 48 64 80 10 12 16 20 52 62 83 105 20 24 32 40 20 24 32 40 32 40 50/63 80/100 Piston rod ball joint KJ (ISO 8139) Steel, zinc chromate plated Bore (mm) d3 d1 h d6 b3 b1 d7 L3 SW L M10 X 1.25 M12 X 1.25 M16 X 1.5 M20 X 1.5 10 12 16 20 43 50 64 77 28 32 42 50 10.5 12

LEC-OM07605CN

168 135 0.8 H LECSS2-T8 40 168 170 1.0 LECSS2-T9 60 168 185 1.4 W D 4.8.3 [mm] a1 c d1 a a1 B c d d1 e e LECSS2-T5LECSS2-T7 LECSS2-T8 6 6 1560.5 6 M5 b LECSS2-T9 c 12 12 1560.5 6 420.3 M5 d a 4.9 /LECS / 1./ YES [ ]NO [ ] 2.

CP95

, Supplied with Bolt and Safety Device Steel CS1 Bore size (mm) e Part no. b d f h11 l1 c a GKM10-20 10 +0.50 +0.15 32 40 10 20 20 M10 x 1.25 52 C76 +0.50 +0.15 GKM12-24 12 48 12 24 24 40 M12 x 1.25 62 +0.50 +0.15 GKM16-32 16 64 16 32 32 50, 63 M16 x 1.5 83 C85 +0.60 +0.15 M20 x 1.5 GKM20-40 20 80 20 80, 100 105 40 40 C95 CP95 NCM NCA D-X 20Piston Rod Ball Joint KJ (ISO 8139) Steel Data Bore

CP95

9 i *1 *1 C95K32 A A-A A !2 !

Compact and Lightweight

Set of long clamping screws ZH2-TB203-A 3 M4 x 70 2 pcs. ZH13DA ZH15DA ZH2-TB204-A 4 M4 x 90 2 pcs. ZH2-TB206-A 6 M4 x 130 2 pcs. Hexagon nut (M4) 2 pcs. ZH2-TB208-A 8 M4 x 170 2 pcs. (ZH2-TB201-A)3 1 M4 x 30 2 pcs. Flat washer (for M4) 2 pcs. ZH2-TB302-A 2 M4 x 55 2 pcs. ZH2-TB303-A 3 M4 x 80 2 pcs. ZH18DA ZH20DA ZH2-TB304-A 4 M4 x 100 2 pcs. ZH2-TB306-A 6 M4 x 145 2 pcs.

Speed Controller with

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

Speed Controller with Uni One-touch Fitting AS Series

L4 D1 L3 M D2 L1 Connecting thread T L2 H D1 D2 L1 L2 L3 L4 (1) A (2) Max.