HRX-OM-W069

Silent interval is indicated by T1-T2-T3-T4. Table 3.8-2 RTU mode message frame a)Start b)Slave Address c)Function d)Data e) Checksum (CRC) f)End T1-T2-T3-T4 XX XX XX XX XX XX T1-T2-T3-T4 a) Start In Modbus RTU mode, message frames are separated by a silent interval (non-communication time).

DOC1003626

This allows reading and monitoring the contact signal from an external switch. When inputting an external switch signal to the contact input, select External Switch (external switch signal) for the type of contact input signal. (Refer to 2.3.1 Setting of contact input signal type and form) If an input from an external switch is detected, it can be generated as an alarm.

HRX-OM-Z015

Silent interval is indicated by T1-T2-T3-T4. Table 3-6 RTU mode message frame a) Start b) Device Address c) Function d) Data e) Checksum (CRC) f) End T1-T2-T3-T4 XX XX XX XX XX XX T1-T2-T3-T4 a) Start In Modbus RTU mode, message frames are separated by a silent interval (non-communication time).

CLQ

Bore size (mm) T1 T2 M F E D B Part no.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121 144 H J XYD-25 XYD-40 XYD-50 XYD-63 XYD-80 100.2 130 178 209 268 16 20 20 20 20 7.5 15 17.5 19.5 26.5 10 Stainless

XM, XY

) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6 x 6.6 8 x 8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type XLA G Fd XL C XLQ (K flange) XM XY XM XY J K H B

RQ

Stroke 25 36.5 5 22.5 10 14 20 10 20 10 (All dimensions but A and CL are identical to those of the basic style.)

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

absolute, T1 = 297 5K, 0.07 bar DP 0.14 bar.

Series SV

SV4000 20 20 stations Rc 3/8 Note 1) Double wiring specification: Single, double and 3 position solenoid valves can be used on all manifold stations. Use of a single solenoid will result in an unused control signal. If this is not desired, order with a specified layout.

Compact Cylinder with Air Cushion and Lock Series RLQ

20 20 20 20 20 20 20 9.5 9.5 9.5 11.5 D-F7, F7V D-J79, J79C D-F7W, F7WV D-J79W D-F7BAL, F7BAVL D-F7NTL, F79F D-F7W D-J79W D-F7BAL D-F79F D-F9BAL 6 6 6 6.5 Number of auto switch D-F7LF D-A9 D-F9 D-A79W 7.5 7.5 8 D-F7LF 7.5 D-F9, F9V D-F9W, F9WV D-F9BAL 1 pc. 2 pcs. 20 20 20 20 25 25 20 20 5.5 5.5 5.5 6.5 The operating ranges are provided as guidelines including hystereses and are not guaranteed

ZSE40/ISE40

(Refer to Precautions on page 16-2-24 for details.) 1.5 01: R 1/8 T1: NPT 1/8 Data ZSE40(F)/ISE40-W1 2-M4 x 0.7 thread depth 4 20 30 Rc 1/8 MPa 7 19 20 30 OUT2 OUT1 SET 6.5 R 6.4 18.35 Atmospheric release port Lead wire length 600 (3000) 3.5 12.4 7.8 7 2.5 2.6 30 15.2 42 10.7 4 6 For splash proof use (IP65), insert an air tube into the atmospheric release port.

7

, T1 = 297 5K, 0.07 bar P 0.14 bar.

Series VQ Base Mounted Metal Seal/Rubber Seal

An EXH block base ass'y is used in the blocking position when ordering an EXH spacer incorporated with a manifold No. However, do not order an EXH block base ass'y because it is attached to the spacer. When separately ordering an individual EXH spacer, separately order an EXH block base ass'y because it is not attached to the spacer.

Series VQ Metal Seal/Rubber Seal Body Ported

Place an order for the cable assembly separately. Kit (D-sub connector) 15 pin F Kit (Flat cable connector) 10 pin, 16 pin, 20 pin P How to Order Manifold How to Order Manifold 06 FSA D VV5Q14 06 P SC VV5Q14 D Ex.) Ex.)

New

, T1 = 297 p5 K, 0.07 bar b $P b 0.14 bar.

LC6D/LC6C

19 1 Communication connector 2 c Cable length: 0.2m 20 View c 315

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

It turns OFF when an alarm occurs or when JOG movement takes place.

Thermo Chiller. O72. 40.00000 lb. CHILLER, RACK MOUNT, REFRIGERATION TYPE.

Cooling Capacity: 012 [1000/1200, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: Rc, Option: T1 (Inverter Pump Mounted)

3

Low temperature operation 1) The valve can be used in an ambient temperature of between 20 to 10C.