CQ2

U 26 29 31 34 38 41.5 47.5 54 U 22 25 27 30 34 37.5 43.5 50 U 27 30.5 36.5 40 U 29 32.5 38.5 42 U 26.5 30 36 39.5 2.3-62 Series CQ2K 12 to 25 Without Auto Switch 12, 16 Standard (Through-hole)/CQ2KB 20, 25 Rear boss mount (mm) Rear boss mount Bore (mm) 12 16 20 25 G Th9 0 0.043 0 0.052 0 0.043 0 0.043 15 20 13 15 1.5 1.5 2 2 Rod end male thread (mm) Rod end male thread Bore (mm) C1 X H1

Table of Contents

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Air Slide Table

Double-ported type Model Stroke 10 20 30 40 50 75 100 125 150 MXQ6A-Zmm(6, 7, 8, 9) u u v v v MXQ8A-Zmm(6, 7, 8, 9) u u v v v v MXQ12A-Zmm(6, 7, 8, 9) u u v v v v v MXQ16A-Zmm(6, 7, 8, 9) u v v v v v v v MXQ20A-Zmm(6, 7, 8, 9) u v v v v v v v v MXQ25A-Zmm(6, 7, 8, 9) v v v v v v v v v Adhesive application points Height interchangeable type Auto Switch Mounting Made to Order Model Selection

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

0 B A u !7 !6 y q w t !5 r e i u !2 !3 In-line motor type: LEY D 25 32 63 !2 #0 @9 When rod end male thread selected u u !0 @6 @7 @8 @7 @5 Component Parts No. Description Material Note No.

smcmaintenancepartslist

For 20 to 63, remove the lock piston seal. d. For 80 and 100, remove the seal retainer and lock piston seal. q i u r y w y L o t e !

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

D3 For 3 stations 10 SS5V U 1 05 16 1 D P D20 For 20 stations Note) For D0, only DIN rail mounting bracket is attached.

Smooth Cylinder/Low Speed Cylinder

Standard stroke (mm) Bore size 12, 16 20, 25 Standard stroke 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Double acting Action D Built-in Magnet Cylinder Model If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Size Port size A B C D E F I J K L M Grommet Grommet with PCB T U T U 50 3/4 110.6 29 36 71 18 4.5 17 51 32.5 38.5 35 51.9 28.5 57.6 38 60 1 131 33 42 95 21 4.5 20 59.5 45.5 49.5 42 60.4 31.1 66 41 Specific Product Precautions Size Port size Conduit DIN terminal DIN terminal without connector M12 connector Bracket mount dimensions T U T U V T U T U a b d e f 50 3/4 59.2 48.9 60.7 55.3 67

Vacuum Pad

( ( Thin flat with rib CT C C Note) Note) ( C C C ( C B Note) Note) J ( ( ( ( ( Bellows Note) Note) Note) Note) Note) MB ( ( ( ( ( ZJ ( ( ( ( Deep D C Nozzle pad AN ( ( Note) Note) Flat pad MT ( ( 4 x 10 4 x 20 4 x 30 ( 5 x 10 5 x 20 5 x 30 ( 6 x 10 6 x 20 6 x 30 ( 8 x 20 8 x 30 ( 3.5 x 7 ( W Oval 2 x4 C 3.5 x 7 C 4 x 10 C U H Flat HT Heavy-duty pad HB Bellows HW Oval U ( ( ( ( Mark-free

Modular Design with Uniform Body Style

Rubber accelerator u u Others Thread-lock fluid Seawater Leak tester u : Essentially safe : Some effects may occur. u: Effects will occur.

REA/REB

25 REAH15, 20, 25 REAH15, 20, 25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25 High Precision Guide Type REAH 0.08 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.03 REAH25 0.02 0.06 0.02 0.04 0.01 0.01 0.02 Max.

REA/REB

Note 2) 15 has internal magnets in the body. 10-2-20 20 Sine Rodless Cylinder Basic Type Series REAR Construction: 20 to 40 @3 q @1 y u e t r @2 !1 !2 i o !3 @0 !8 !4 @5 RE A B REC CX CY MQQ M !5 @8 @9 !9 #0 @6 !0 @4 w @7 !7 !6 RHC MK(2) Component Parts Material No. Description No.

Hydraulic

Auto Switches: Proper Mounting Positions and Mounting Heights for Stroke End Detection 20 32 to 100 D-A7 D-A80 Approx. U B A Approx. U A B D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NTL D-F7BAL SMC SMC Approx. U Approx. U Approx. U SMC SMC Approx. U A B B A Approx. U D-A73C D-A80C D-J79C B A A B Approx.

Battery-less

4 u u !2 !3 i e !5 r t w q y !6 !

SMC Basic Pneumatics

U I A N U A L O P E B A T I O N Manual operation is generally l-r-\ TfI obtained by attaching an operator lry E] ,ffi' head, suitable tor manual control, Flush ' Baised Mushroom onto a mechanically operated valve.

REA/REB

/25 REAH15/20/25 REAH15/20/25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25 0.08 0.03 REAH25 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 25 25 25 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) Moment (Nm) REAHT25/32 REAHT25/32 REAHT25/32 0.05 REAHT25 REAHT25 REAHT32 REAHT32 REAHT25 0.03 Deflection (mm) Deflection (mm)

%silltr

U I A N U A L O P E B A T I O N Manual operation is generally l-r-\ TfI obtained by attaching an operator lry E] ,ffi' head, suitable tor manual control, Flush ' Baised Mushroom onto a mechanically operated valve.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

42 U 26.5 30 36 39.5 U 44 50 56.5 U 26.5 29.5 31.5 34.5 38.5 42 48 54.5 U 20.5 23.5 25.5 28.5 32.5 36 42 48.5 U 19.5 22.5 24.5 27.5 31.5 35 41 47.5 U 23 26 28 31 35 38.5 44.5 51 U 26 29 31 34 38 41.5 47.5 54 U 22 25 27 30 34 37.5 43.5 50 12 16 20 25 32 40 50 63 7-6-83 84 Series CQ2KW Dimensions: 12 to 32/Without Auto Switch Basic style (Through-hole): CQ2KWB 12, 16 20, 25 12 to 25 2-H thread

Stability of suction position,

Displacement NBR (N): Silicone rubber (S): Urethane rubber (U): FKM (F): Mark-free NBR (CL): ZP3E-32BM ZP3E-80BM 6 20 N, S, F S Displacement [mm] Displacement [mm] 16 4 12 N, U, F U 8 2 CL CL 4 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-100BM ZP3E-40BM 8 25 S N, S, F Displacement [mm] Displacement [mm] 20 6 U 15 N, U, F 4 10 CL

VFS

3 End plate (U side) assembly !1 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !