Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

36 (45) (37) (4.9) (For mounting) 2 x 3.2 (Light/surge voltage suppressor) (36.7) (40.2) 12.7 20.5 40.4 15 0.8 (20) 28.1 [35.1] + 1.6 (For manifold gasket positioning) 2 x 2.2 die-cast hole (P, EA, EB port) 1/8 27.2 L plug connector (L): M plug connector (M): DIN terminal (D, Y): M8 connector (WO): 10-SY5 20-L(-F2) 3 4 5 10-SY5 20-M(-F2) 3 4 5 10-SY5 20(-F2) 3 4 5 10-SY5 20-WO(-F2) 3 4 5

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Size Foot bracket Mounting screws included in foot bracket 30 CRA1L30-Y-1 M5 x 0.8 x 25 50 CRA1L50-Y-1 M8 x 1.25 x 35 63 M10 x 1.5 x 40 CRA1L63-Y-1 80 CRA1L80-Y-1 M12 x 1.75 x 50 100 CRA1L100-Y-1 M12 x 1.75 x 50 Note 1) The part numbers shown above include mounting screw.

Compact 5-Port Solenoid Valve

Note 02 2 stations Double wiring*1 Symbol Stations Note 02 2 stations Double wiring*1 16 16 stations 02 2 stations Specified layout*2 (Up to 32 solenoids available) 10 10 stations 02 2 stations Specified layout*2 (Up to 20 solenoids available) y SUP/EXH block assembly 24 24 stations 20 20 stations *1 Double wiring: 2-position single, double, 3-position, and 4-position valves can be used

Table of Contents

y y e e r r r u u u Drain Drain Drain Component Parts Material No.

VFS

YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

AC

If it is equipped with an auto drain, check its operation once a day. yWhen the hydraulic pressure of an air-hydro unit must be raised. uWhen the pressure must be raised in an explosion-proof environment. iTo boost the pressure by remote operation, using an air operated type. rExhaust air After operating this product for an extended time in the set state, if the booster valve is switched,

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VV5Z5-21 VV5Z5-21P (EXH port) 2-Rc 1/8 Gasket Gasket Round head combination screw Applicable base VV5Z5-20 VV5Z5-21 ( ) M3 x 10 With spring washer Adapter plate Note) Please contact SMC when using an individual EXH spacer assembly, an individual or an adapter plate assembly on VV5Z5-21P .

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Series CY1L Size: 6, 10, 15, 20, 25, 32, 40 To ensure a permanent path Stable operation is possible, even with an eccentric load, by using ball bushings. When smoother operation is required, even with an eccentric load. Series CY1H Size: 10, 15, 20, 25, 32 The use of a linear guide facilitates a large load, large moment and high precision.

Stability of suction position,

Stroke 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EU-(T/Y)F1JB10 10 V V V V ZP3EU-(T/Y)F1JB30 30 ZP3EU-(T/Y)F1JB50 50 ZP3EU-(T/Y)F2JB10 10 V V ZP3EU-(T/Y)F2JB30 30 ZP3EU-(T/Y)F2JB50 50 ZP3EU-(T/Y)F3JB10 10 V V V ZP3EU-(T/Y)F3JB30 30 ZP3EU-(T/Y)F3JB50 50 ZP3EU-(T/Y)F4JB10 10 V V ZP3EU-(T/Y)F4JB30 30 ZP3EU-(T/Y)F4JB50 50 ZP3EU-(T/Y)F5JB10 10 V V ZP3EU-(T/Y)F5JB30 30 ZP3EU-(T/Y)F5JB50

High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

22 25 30 UU 118 139 167 202 D (g6) 15 17 20 25 D (g6) 15 17 20 25 H 36 41 50 60 H 36 41 50 60 H 36 41 50 60 UU 134 158 192 232 N 15 17 20 25 D (g6) 15 17 20 25 Size 50 63 80 100 Refer to pages 11-7-11 to 11-7-12 for other specifications. 11-7-5 6 Series CRA1 Shaft Variations (Size 30) Shaft Type: S, X, Y, Z Mounting Shaft type 30 Rotating angle C RA1 Refer to How to Order on pages 11-7-

A

D I M E N S I O N S A I R C U S H I O N T Y P E L O N G S T R O K E CG1BA A I R C U S H I O N T Y P E Bore P WA WH Wu (mm) 20 M5x0.8 14 23 30 25 M5x0.8 14 25 30 32 18 14 28.5 25 40 18 15 33 20 50 14 16 40.5 20 63 14 16 47.5 20 80 38 22 60.5 20 100 12 22 71 20 For those dimensions not shown please refer to Rubber Cushion Type.

Series VQ Base Mounted Metal Seal/Rubber Seal

An EXH block base ass'y is used in the blocking position when ordering an EXH spacer incorporated with a manifold No. However, do not order an EXH block base ass'y because it is attached to the spacer. When separately ordering an individual EXH spacer, separately order an EXH block base ass'y because it is not attached to the spacer.

Vacuum Pad

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08

Hydraulic

Cotter pin size C type, 9 for shaft C type, 9 for shaft 3 x 18l 3 x 18l Size Tolerance AD-EI-20 AD-EI-25 AD-EI-32 AD-EI-40 -0.013 -0.035 -0.013 -0.035 -0.016 -0.043 -0.016 -0.043 20 25 32 40 45.5 45.5 52 60 35.5 35.5 42 50 3.2 3.2 4 4 10 10 12 12 +0.058 0 +0.2 +0.1 Y-02 3.2 x 16l 14 5 20 18 M8 x 1.25 36 16 9 20 CDP-1 9 +0.058 0 Y-03 +0.2 +0.1 14 5 20 18 M10 x 1.25 38 18 9 25 CDP-1 9 4 x 20l

Air Cylinder

Applicable bore size A A1 E1 LA LB MM ND NX NZ R1 U1 Included pin part number Retaining ring size Split pin Y-020B 20 46 16 20 25 36 M8 x 1.25 9 9 +0.2 +0.1 18 5 14 CDP-1 Type C 9 for axis Y-032B 25, 32 48 18 20 25 38 M10 x 1.25 9 9 +0.2 +0.1 18 5 14 CDP-1 Type C 9 for axis Y-040B 40 68 22 24 49.7 55 M14 x 1.5 12 16 +0.3 +0.1 38 13 25 CDP-3 3 x 18 L A knuckle pin and retaining rings (split

15

Selection Graph [Graph 2] Allowable load mass by stroke 10 [Graph 1] Allowable load mass by stroke 6 10 10 Load mass [kg] Load mass [kg] y, z + A 200 y, z + A 300 y, z + A 100 1 1 0 100 200 300 400 500 600 0 100 200 300 400 Stroke [mm] Stroke [mm] [Graph 4] Allowable load mass by stroke 20 [Graph 3] Allowable load mass by stroke 15 100 10 y, z + A = 0 Load mass [kg] Load mass [kg] y, z

V

(N)VV4Z1 20 S TAT I O N S 1 T H R E A D T Y P E 02 2 Stations to 20 20 Stations PT 00T NPTF D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D M P L U G T Y P E F Bracket O P T I O N D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D G R O M M E T T Y P E Lead Wire Length ACCESSORIES M A N I F O L D T Y P E 20 T O P P O R T E D DXT170-25-1A Blanking Plate Assembly