Electric Actuators

10 20 20 20 20 LG1H20 LG1H21 LG1H21 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

) 2 stations ... ... 20 1 2 3 Stations U side 20 stations SUP/EXH block assembly mounting position Symbol Applicable no. of stations Mounting position 2 to 10 stations D U D side U side Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors D side B 2 to 20 stations Both sides M Special specifications For special specifications, indicate

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u u Drain Drain Drain Component Parts Material No.

7

Grommet Port size P A B C E F I J K L D M T T T 55 (61) 126.5 (134.5) 74.5 (82.5) 82.5 (90.5) 69 (77) U 68.5 (74.5) U V U 107.5 (113.5) 29 60.5 (66.5) 5 C VXD2 3/4 27 64.5 52.5 30 30 71 20 4.5 17 51 32.5 38.5 35 6 D VXD2 1 29.5 67 55 32.5 33 35 95 22 4.5 20 59.5 45.5 49.5 42 Model Mounting bracket dimensions Port size P a b d e f 3/4 1 50.5 55.5 77.5 85.5 74 81 51 58 45.5 49.5 VXD2 VXD2

0.4

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM.

15

Lead 20: LEYG32A 30 30 20 20 0 0 0 200 600 1000 1400 1200 Speed [mm/s] 0 200 600 1000 1400 Speed [mm/s] 866 A Model Selection LEYG Series Motorless Type * These graphs show an example of when the standard motor is mounted.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

mounting direction 4(A), 2(B) port size B D U D side: 2 to 10 stations U side: 2 to 10 stations One-touch fitting for 4 One-touch fitting for 6 C4 Both sides: 11 to 20 stations Stations C6 SUP/EXH block mounting position 02 2 stations M Mixed DIN rail length specified In the case of mixed specifications (M), indicate separately on the manifold specification sheet. 20 20 stations Nil

High Vacuum Angle Valve

U type: DC only.

0.4

Note 2) The ejector unit is mounted next to the U-side end plate. Note 3) The U-side end plate is used exclusively for ejector units. (Without P and R port) Note 4) The dimension of manifold with an ejector unit is different from the standard dimension.

Made to Order

Note 4) 2 locations on the back side for the standard-type 20 with 15 strokes or less and 25 with 10 strokes, and for models with an auto switch and built-in magnet of 20 with 5 strokes.

Air Cylinder

Cushion Bore size * Only for C, T, U, E, V, UZ mounting types. * Pivot bracket is shipped together with the product, but not assembled. Nil Rubber bumper A Air cushion 20 20 mm 25 25 mm 32 32 mm 40 40 mm Made to Order Refer to page 219 for details.

A

Adjustable Air Cushion B O R E S I Z E 20 3/4 25 1 32 1 1/4 40 1 1/2 50 2 63 2 1/2 Stroke/inch S T R O K E Stroke/Hundredths of an inch S T R O K E STOCK STROKE LIST FOR ALL STYLES SERIES NCG S Y M B O L S R U B B E R C U S H I O N E D B O R E S I Z E S TA N D A R D S T O C K E D S T R O K E M A X I M U M S TA N D A R D S T R O K E 20 1, 2, 3, 4, 5, 6, 8 20 25 1, 2, 3, 4, 5, 6, 8, 10, 12

Modular F.R.L. Units

20 20 20 20 20 20 15 The combination of metal bowl: 2 and 8 is not available. 16 When choosing with W: Filter drain port, the drain cock of a lubricator will be with barb fittings. 17 For pipe thread type: NPT.

SX

. (20 stations maximum) When a longer DIN rail is desired than the specified stations, specify the station number to be required. (20 stations maximum) Terminal block mounting position Symbol Mounting position Symbol Mounting position U U side U U side A, B port size (Metric size) A, B port size (Metric size) D D side D D side Valve stations Valve stations Symbol Port size Applicable series

Rotary Actuator

Without air cushion With air cushion Air-hydro 50 P694020-20 P694020-21 P694020-23 63 P694030-20 P694030-21 P694030-23 80 P694040-20 P694040-21 P694040-23 100 P694050-20 P694050-21 P694050-23 Corresponding parts u, o, !0, !3 are included as a set. u, o, !0, !3, @3 are included as a set. u, o, !0, !3 are included as a set.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

H 39 45 55 60 UU 134 158 190 220 U 114 136 165 190 N 15 17 20 25 Model U 105 124 153 174 Model H 30 33 43 44 N 15 17 20 25 H 39 45 55 60 U 114 136 165 190 UU 150 177 215 250 Model UU 125 146 178 204 H 30 33 43 44 N 15 17 20 25 U 105 124 153 174 Model CDRA1FW50 CDRA1FW63 CDRA1FW80 CDRA1FW100 CDRA1FX50 CDRA1FX63 CDRA1FX80 CDRA1FX100 CDRA1FY50 CDRA1FY63 CDRA1FY80 CDRA1FY100 CDRA1FZ50 CDRA1FZ63

V

O X M O U N T I N G U U Side D D Side O P T I O N When a longer than Standard DIN Rail is required, enter the number of Manifold Station that corresponds with the length of DIN Rail needed (20 Stations Max) V A LV E S TAT I O N S 02-10 .Double Wiring Specifications 11-20 .Applicable up to 20 Solenoids.

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.

SZ3000

Specifications Standard/internal pilot specifications External pilot specifications 20 20 stations U side D side w How to Order Valves Enter the symbols for the required specifications in the blanks below.

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