Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: Rc, Option: T (High-pressure Pump Mounted)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: Rc, Option: MTU (M+T+U)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: Rc, Option: U (Conforming to UL Standards)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: Rc, Option: DMT (DM+T)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: Rc, Option: TUY (T+U+Y)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: Rc, Option: Z (No Flow Sensor, Water Leakage Sensor, Particle Filter, Bypass Valve or Retaining Clip)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: Rc, Option: T1U (T1+U))

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: Rc, Option: TU (T+U)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: Rc, Option: High-pressure Pump Mounted

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: Rc, Option: M+T+U

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: Rc, Option: Conforming to UL Standards

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: Rc, Option: DM+T

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: Rc, Option: T+U+Y

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: Rc, Option: No Flow Sensor, Water Leakage Sensor, Particle Filter, Bypass Valve or Retaining Clip

High Vacuum L Type Valve

nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76

ITV_D-E

O R LESS PREPEATABI LI TY 0. 5% F. S. O R LESS SEN SI TI VI TY 0. 2% F. S.

CG1-SMV13_en

Nov Y TY UY VY DY EY FY If a lubricant is used in the system, use turbine oil Class 1 (no Dec Z TZ UZ VZ DZ EZ FZ additive), ISO VG32.

CJ2

Applicable bore (mm) Round type A D L N R W MM Flat type Applicable bore (mm) TDH10 TC TH TK TN TT TU TV TW TX TY TZ Part no. CJ-CF006 CJ-CR006 6 6 8 11 5 8 6 M3 x 0.5 10 CJ-T010B CJ-CF010 CJ-CR010 3.3 10 8 10 13 6 10 8 M4 x 0.7 29 18 2 9 40 22 32 12 8 4.5 3.1 +0.048 0 16 CJ-T016B CJ-CF016 CJ-CR016 5 16 10 12 15 7 12 10 M5 x 0.8 35 20 14 48 28 38 16 10 5.5 6.4 2.3 +0.048 0 6-3-11

Cooling Capacity: 012 [1000/1200, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: TY (T+Y)

Cooling Capacity: 012 [1000/1200, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: T+Y