Table of Contents

(With light: 1.2 W), 100 VAC: 1.4 W (1.45 W), 110 VAC: 1.45 W (1.5 W) Air Operated Valve Specifications Refer to page 13-4-11 for dimensions.

Proposals for Energy Saving

G46-10-01 2 pcs. G46-10-01 2 pcs. G27-10-R1-X209 2 pcs. G27-10-R1-X209 2 pcs.

Vacuum System Peripherals:

Manifold base ZZM Stations Exhaust port location R L B 01 1 Exhaust port size Right side Left side Both sides ... ... 04 06 Rc Rc 1 2 3 4 10 10 S With dedicated silencer w How to Order Ejector Fill in the blanks below with symbols of necessary specifications. w-1 Common specifications Common Specifications (Symbol , , , , ) Individual specifications Without light/surge voltage suppressor

HRX-OM-X071

HRR050-A-20/40.9-10 HRR Series HRX-OM-X071 Contents 9.3.2 HRR050-W-20/40. 9-10 9.4 Cooling capacity . 9-11 9.4.1 HRR050-A-20. 9-11 9.4.2 HRR050-W-20. 9-11 9.4.3 HRR050-A-40. 9-12 9.4.4 HRR050-W-40. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350-06 AMD450-06 15 2.0 HAA22-14 HAW22-14 AT22C-14 AFF11B-06 IDF15CAM450-06 AMD450-06 22 3.0 HAA37-14 HAW37-14 AT22C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 27 3.5 HAA37-14 HAW37-14 AT37C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 37 5.0 HAW55-20 AT37C-14 AFF37B-14 IDF37C1-3 AM650-14 AMD650

ALB900

Description Material Aluminum casted Aluminum casted Top cover Bottom cover q w VOA301-M V0307E-D-X56 3 port switching valve (for operation control) e 1 VR4152-00-0 GA46-10-01 12702A 12705A NLP-100A PNY-25 SW-100 x 6 x 2 JIS B 2401P3 r t y u i o !0 !

Large Flow Air Filter AF800/900 Series

Symbol Air filter Air filter with auto drain How to Order AW -A -B 2 1 2 1 AW 12 AF 00 8 AG L L Option Air filter Flow Rate Characteristics (Representative Values) Nil E None Body size D 5 Drain cock with barb fitting Drain guide 8 9 1 2 1 2 AV AF800 J 6 R Flow direction: Right to left AF AF Pressure drop (MPa) Pressure drop (MPa) Auto-drain specifications Option 00 10 11 None Float type

Vacuum Equipment

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

11.4 5.2 16.4 27 10 23 16 37.8 23 6 18 12 0.02 0.02 0.05 112211221122MHZ2-16D 5 15 67.3 8 11 38 16 6.5 23.6 30 13 30.6 24 42.5 24.5 7.5 22 15 0.02 0.02 0.05 MHZ2-20D 8 18 84.8 10 16.8 50 18.6 7.5 27.6 35 15 42 30 52.8 29 9.5 32 20 0.02 0.02 0.05 MHZ2-25D 102.7 63 33.6 52 63.6 11 25 10 12 22 36.5 36 30 40 22 21.8 10 20 0.02 0.02 0.05 U V W X Y Z AA AB AC AD AE AF AG AH AJ AK Model 1122+0.043

Gun Type Ionizer

and replacement of emitters 5 q Removal of nozzle w Removal of emitter q Turn counterclockwise. w Pull forward to remove. q Turn counterclockwise. w Pull forward to remove. 6 Bypass nozzle (Option) OSHA1910.242b compliant Even if the nozzle is obstructed, the main orifice pressure cannot exceed 30 psi (210 kPa). * Supply pressure: 0.5 MPa or less 180 Gun Type Ionizer IZG10 Series Application

Precision Regulator

0 Setting knob ARM q Diaphragm (A) q w !1 q !1 ARP Steel ball w !1 Bleed !2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !

ALF400 to 900, ALT-5/-9

T0604 How to Order Max. operating pressure Max. operating pressure T 0604 B 20 Length per roll Color Nylon tubing 20 20 m 100 m roll (Black, white only) Operating temperature (C) Symbol Color B W R BU Y G Black White Red Blue Yellow Green Maximum operating pressure is 1/3 max. of burst pressure at 60C, considering the safety ratio. Tube size 100 O.D. 6 I.D. 4 14-13-10

Profi-E

Ref er t o t he SM C w ebsi t e ( U RL ht t p: //w w w . sm cw orl d. com ) f or m ore i nf orm at i on about t roubl eshoot i ng. Thi s docum ent descri bes t he general purpose product . Som e part s m ay di f f er f or part i cul ar speci al product s. Thi s m anual i s subj ect t o change w i t hout pri or not i ce. ITV2OM00076A 10

AMR3000 to 6000

Model Model name IC AMR3000 AMR4000 AMR5000 AMR6000 Bracket 13576 13556 13587 13568 VBA G36-10-01 G46-10-02 Pressure gauge 1.0 MPa (5)(6) Accessory (Option)/Part No.

Ionizer

Note 2) Use standard power cables for 3 m and 10 m lengths.

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

Lube unit S1 Thread type 1a (without oil OFF) ALDU600 (with panel) S2 Rc NPT Nil Body size (Standard) N 6 9 1B 2B Accessory Port size Symbol Description Nil Bracket Panel Float Switch Specifications 4 3 06 10 12 14 20 1 1 1 Voltage Max. cut off capacity Max. cut off current Contact point construction Level indication 200 VAC, 200 VDC 12 VAC, 10 W DC 0.6 A AC, 0.5 A DC 1a, 1b Bottom limit

AMR3000 to 6000

Model Description AMR3000 AMR4000 AMR5000 AMR6000 Bracket 13576 13556 13587 13568 G36-10-l01 G46-10-l02 Gauge (5) 1.0MPa Accessories (Options)/Part No.

Direct Operated Precision Regulator Modular Style Series ARP3000 1

Description Material Note Platinum silver painted Body Aluminum die-casted q Black painted Bonnet Aluminum die-casted w Always bleeding Replacement Parts No. Description Material Part no.

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Series GS40 Digital Pressure Sensor 1

(Full span) or less Hysteresis Pressure switch with digital display and self-contained solid state sensor 3% F.S. (5 to 40C), 5% F.S. (5 to 60C) Accuracy AF 12 to 24 VDC (Ripple 10% or less) Voltage Minimum allowable pressure indicator on digital display AR Open collector 30 V, 80 mA or less Output Light turns ON when pressure drops below the set minimum.