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-X 175 CG1Y Series Mounting Bracket Axial foot: CG1YL B LH 15 LT ZZ + Stroke LS + Stroke Z X W 2 x LC (Knock pin position) Y X Y M W 4 x LD LZ LX (mm) Axial Foot Bore size (mm) B LC LD LH LS LT LX LZ M W X Y Z ZZ 20 34 4 6 20 53 3 32 44 3 10 15 7 47 118 25 38.5 4 6 22 53 3 36 49 3.5 10 15 7 52 123.5 32 45 4 7 25 53 3 44 58 3.5 10 16 8 53 125.5 40 54.5 4 7 30 60 3 54 71 4 10 16.5 8.5 63.5

ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

2/3 Port Valve

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 A J Q B T K R C U S D V E W F X H Y N.O.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet A J 3 30 17 M6 x 0.75 10 8 5 4 6 37 20 14 N S U F GN GS ZP3 Y 015 02 035 U B3 K 3 34 17 M8 x 0.75 11 10 7 6 6 40.5 20 14.5 13 B Dimensions Per Vacuum Inlet: One-touch Fitting 7 Model H J K Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

W K CY1RG50/63 HB HC N X MX H MTS CB HA 2-P (Piping port) 4-J x E (Depth) 4-Counterbore dia.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

st 53.5 32 40 50 20.5 20.5 26 M14 x 1.5 M14 x 1.5 M18 x 1.5 33.5 33.5 23.5 23.5 28.5 Basic Style O L 20 st A 20 st B Bore size (mm) C D E F H I J K M N P Q W Z 5 st 50 56.5 58.5 10 st 78.5 5 st 33 39.5 40.5 10 st 50.5 5 st 17 17 18 10 st 20 st 32 40 50 9 depth 7 9 depth 7 13 13 15 40 46.5 28 34.5 16 16 20 45 52 64 8.5 8.5 11 M8 x 1.25 M8 x 1.25 M10 x 1.5 60 69 86 10.5 10 13 14 14

NCA1

14 MS2 w/Side Lug 16 8 14 MS3 w/Center line Lug 16 8 14 MS4 w/Side Tapped 17 8 14 MS7 w/Front Lug Mount 17 8 14 MT1 w/Head Trunnion 17 8 14 MT2 w/Rear Trunnion 18 8 14 MT4 w/Center Trunnion 18 8 14 MX1/MX2/MX3 w/Extended Tie-Rods 19 1.5 6 NCA1-W Double Rod 19 8 14 NCA1-W Double Rod 19 Engineering Specifications Push Stroke 20 Pull Stroke 20 Oversize Piston Rods 20 Stroke Factors 21 Stop

Air Cylinder NCA1 Series

14 MS2 w/Side Lug 16 8 14 MS3 w/Center line Lug 16 8 14 MS4 w/Side Tapped 17 8 14 MS7 w/Front Lug Mount 17 8 14 MT1 w/Head Trunnion 17 8 14 MT2 w/Rear Trunnion 18 8 14 MT4 w/Center Trunnion 18 8 14 MX1/MX2/MX3 w/Extended Tie-Rods 19 1.5 6 NCA1-W Double Rod 19 8 14 NCA1-W Double Rod 19 Engineering Specifications Push Stroke 20 Pull Stroke 20 Oversize Piston Rods 20 Stroke Factors 21 Stop Tube

MY1

Weight m X-axis Y-axis Z-axis Z 20 W 20 mm 30 mm 50 mm 2 kg 50 Y 30 3.

MXS

MX With end lock(20) MXS20-llR With buffer(20) MXS20-llF MXU Operating port 2-Rc (PT)1/8 2-M6 X 1 thread 13 deep J 15.5 MXS MXQ 15 20 58 MXF 25 44.5 MXW 30.5 0.5 45.5 MXP * Dimensions not indicated are the same as the basic style.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(For F/P/J/G/T/S/M kit) VVQ2000-2A-1Option Enclosure Enclosure Electrical entry Nil W Dust-protected Dust-tight, Water-jet-proof (IP65) Nil W Dust-protected Dust-tight, Water-jet-proof (IP65) Common EXH External pilot Direct EXH outlet with built-in silencer Nil R F P J L G S For F kit For P kit For J kit For L kit For G kit For S kit Note) F/P/J/G kit are available with Nil only.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(For F/P/J/G/T/S/M kit) VVQ2000-2A-1Option Enclosure Enclosure Electrical entry Nil W Dust-protected Dust-tight, Water-jet-proof (IP65) Nil W Dust-protected Dust-tight, Water-jet-proof (IP65) Common EXH External pilot Direct EXH outlet with built-in silencer Nil R F P J L G S For F kit For P kit For J kit For L kit For G kit For S kit Note) F/P/J/G kit are available with Nil only.

Air Cylinder

port WA WB W WH GA GB P 20 12 10 (12) M5 x 0.8 16 15 (16) 25 1.5 25 12.5 10 (12.5) M5 x 0.8 16 14.5 (16) 25 1.5 32 12 10 (12) 1/8 16 14 (16) 25 1.5 40 13 10 (13) 1/8 17 15 (17) 20 1.5 50 14 12 (14) 1/4 18 16 (18) 20 3 63 14 12 (14) 1/4 18 17 (18) 20 3 80 20 16 (20) 3/8 24 20 (24) 20 4 100 20 16 (20) 1/2 24 20 (24) 20 4 (Reference) JW Bore size e f h IJ JH Bore size NA S W X Y Z ZZ (Reference

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination between -X and -X (S, W, X, Y, Z, T, J, K shaft) 20Shaft type Combination Applicable size Part no.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination between -X and -X (S, W, X, Y, Z, T, J, K shaft) 20Shaft type Combination Applicable size Part no.

CQ2

W/o auto switch W/ auto switch Bore size (mm) 5st 10 20 5st 10 20 A B L L1 43 48 53 58 7 28.5 32 40 50 49.5 54.5 59.5 64.5 7 28.5 57.5 67.5 67.5 77.5 8 33.5 Double clevis (mm) 5st 10 20 5st 10 20 5st 10 20 5st 10 20 5st 10 20 5st 10 20 A B CL Without auto switch A B CL With auto switch Bore (mm) 65 70 28 33 55 60 75 80 38 43 65 70 32 40 50 73.5 78.5 39.5 39.5 63.5 68.5 83.5 88.5 44.5 49.5

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F G J V , w K I KA l w LH LS 43 15 M14 x 1.5 15 17 15 27 I 19 85 188 15 I' 27 I Hi 100 188 17 I 34 I 19 106 206 43 15 M14 x 1.S ., 15' 1?

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K L F I J (D) Flat terminal C E U 11 T A OUT IN M B 2 x P Port size I F J L K (D) (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Port size P A B C E F I J K L D M T T V U U T 68.5 (74.5) 126.5 (134.5) 76.5 (84.5) 76.5 (84.5) 82.5 (90.5) U 62.5 (68.5) 107.5 (113.5) 29 62.5 (68.5) 5 C VXD2 30 3/4 99.5 68.5 47.5 23 71 20 4.5 17 51 32.5 38.5 35 6 D VXD2 33 35 1 102 71 50

Vacuum Unit

unit selection function is not available in Japan due to the New Measurement Law. 2 Fixed unit: kPa W Valve type K/R S Valve type J Nil 300 mm 6 600 mm 10 1000 mm 20 2000 mm 30 3000 mm Black Black Valve type K/R Valve type J Red White r Lead wire with connector Red Nil None When q is E or F For pressure switch for vacuum, Lead wire with connector (Length 2 m) Black Black G With lead wire

High Vacuum Angle Valve

M10, L = 20 Refer to part no.