%silltr

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

P R R P R R L (10) 8 End plate side End plate side (24) (35) 5.5 [Rail mounting pitch 12.5] 0 1 2 3 4 5 6 7 8 9 No. L dimension 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 Weight (g) 24.8 28 31.1 34.3 37.4 40.6 43.8 46.9 50.1 53.3 10 11 12 13 14 15 16 17 18 19 No.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

CQ2

l X 140 l M6 X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 120 l X 145 l M8 X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 90 l X 125 l X 150 l M10 X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 90 l X 95 l X 130 l X 155 l M10 X 65 l X 70 l X 75 l X 80 l X 85 l X 90 l X 95 l X 100 l X 105 l X 140 l X 165 l M3 X 25 l X 30 l X 35 l X 40 l X 45 l X 50 l M3

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Cable length (L) [m] 3 3 5 5 A 10 C 20 LE-CYM-llA-l: Motor cable L 50 7 U V W G M4 Crimped terminal LE-CYB-llA-l: Motor cable for lock option L 50 7 3-M4 Crimped terminal LE-CYE-llA: Encoder cable L (60) (100) 12 (7) (32) D 19 5 3 1 6 4 2 25 Battery case Depth dimension: 25 mm Product no.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

R.

AC

Y50 SAC4006, #12 14 AC4000-06 to AC4040-06 Y50 Y60 SAC5000, #12 AMR AC5000, AC5500, AC6000 15 Y60 AC5020, AC5520, AC6020 AWM L Bracket/ Interface with L Bracket AWD ITV VBA VE VY G AL Interface with L bracket L bracket L bracket Interface with L bracket A B C D E F G R L Applicable model L bracket, Interface with L bracket Model 20 12 4.5 B110L 3 Y10L 25 5 8 2.25 27 AC1000 to AC1020 Interface

Table of Contents

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

MY1

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

0.4

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM.

High Vacuum Angle Valve

M10, L = 20 Refer to part no.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Model CY1H15 CY1H20 CY1H25 CY1HT25 CY1HT32 CY1H10 Thread size M6 x 1.0 l-9 M4 x 0.7 l-7 M5 x 0.8 l-8 M8 x 1.25 l-12 Bolt dimensions l-8 Dimension t Nm 4.4 1.37 2.65 13.2 Tightening torque Square nut l t 4.

Smooth Cylinder/Low Speed Cylinder

Z + Stroke TZ Clevis style: CG1YD 20 to 63 TT CZ C 0.1 RR L 8 x J Clevis Style (mm) CD hole H10 Axis d9 Bore size (mm) V RR L CZ CX CD C 0.1 20 25 32 40 50 63 80 100 26 32 11 13 15 18 20 22 18 22 14 16 20 22 25 30 35 43 29 33 40 49 60 74 56 64 28 32 8 10 12 14 16 18 18 22 ZZ + Stroke Z + Stroke TZ (The above shows the case port location is changed by 90.)

Electric Actuator with Integrated Guide

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 Electric Actuator with Integrated Guide Series LTF Lead screw lead mm Mounting orientation Motor type Series Page Model Guide type Ground ball screw Rolled ball screw 6 10 20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8

15

t H R q Accuracy e Motor mounting position r Motor type t Lead [mm] y Stroke [mm] Nil Basic type H High precision type 50 50 to to 1200 1200 Symbol LEFS25 LEFS32 LEFS40 H 20 24 30 A 12 16 20 B 6 8 10 Nil In-line R Right side parallel L Left side parallel Symbol Type NZ Mounting type Z NY Mounting type Y NX Mounting type X NW Mounting type W NV Mounting type V NU Mounting type U NT Mounting

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

High Flow/ Power Saving Type Ep. 7 Ep. 9 Ep. 11 How to Order w y e r t u o i q JSX 2 1 A N 302 R 5 G B q Size w Valve type e Body material i Electrical entry Symbol Size 2 20 3 30 Symbol Valve type Symbol Body material A Aluminum Symbol Electrical entry Size CE/UKCAcompliant 20 30 2(OUT) G Grommet*1 V V 24 VDC 1 N.C. 1(IN) 12 VDC 100 VAC 24 VDC 12 VDC 48 VAC 24 VAC r Seal material t Orifice

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

R P R R P R 02 2 stations Nil : : Q CE-compliant P port M5 x 0.8 R port M5 x 0.8 20 20 stations Type 31 (4 port/Base mounted) How to Order ( ) Single solenoid pilot valve is on same side as the A, B port.

MGG

9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!