High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Smooth Cylinder/Low Speed Cylinder

flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8

Hydraulic

25 to 1000 75 3 212 156 40 53 145 40 (mm) Rod series B-series rod C-series rod Bore size (mm) MM A MA D E MM K G H ZZ A MA D E K G H ZZ 32 34 M16 x 1.5 25 22 18 7 14 55 268 -0.025 -0.064 36 40 40 M16 x 1.5 25 22 18 7 14 55 268 M20 x 1.5 30 27 22.4 9 19 60 278 -0.025 40 50 46 M20 x 1.5 30 27 22.4 9 19 60 296 M24 x 1.5 35 32 28 11 24 65 306 -0.064 46 63 55 M24 x 1.5 35 32 28 11 24

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After tightening by hand, the barb fitting type should be tightened by an additional 1/4 rotation using an appropriate wrench. 2. After tightening by hand, the barb elbow type should be tightened by an additional 1/2 rotation using an appropriate wrench. 2) M5 1. After tightening by hand, the barb fitting type should be tightened by an additional 1/6 rotation using a suitable tool. 2.

Modular Design with Uniform Body Style

Series Body size Details 20 30 40 50 60 AF p. 61 AFM AFD p. 71 AR(K) p. 79 AW(K) p. 98 AL p. 89 2 A Modular F.R.L.

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K-F-X60 LJ1H202NAStroke K-F-X60 Without motor Specifications Combinations other than the above cannot be manufactured.

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Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Made to Order

FL1 (A) F1 K (mm) (H) A F1 H FL1 16.5 K 3 Bore size Stroke range 24 32 40 51 21 Up to 1000 22 18 54.5 3 22.5 Up to 1000 : Same as the standard model. 1896

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Note 2) Drain guide is G 1/4 (applicable to AW30 to 40). 1 (4) AW20(K) to 40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K)/40(K) AW20(K) AW30(K)/40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K)/40(K) PPA 2 6 8 C J (5) AL N R W Port size Z (6) AW20(K) to 40(K) Body size Symbol Port size When more than one specification is required, indicate in ascending alphanumeric order.

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40 50 50 55 55 65 85 , Misc.

5

WA B C B1 REC A K N Smooth Smooth ZZ + Stroke S + Stroke N F M H Low Speed (mm) MQ Bore size (mm) A AL B B1 C D E F G H H1 J K KA RHC 40 30 27 60 22 44 16 32 10 15 51 8 M8 x 1.25 6 14 50 35 32 70 27 52 20 40 10 17 58 11 M8 x 1.25 7 18 63 35 32 85 27 64 20 40 10 17 58 11 M10 x 1.25 7 18 80 40 37 102 32 78 25 52 14 21 71 13 M12 x 1.75 10 22 100 40 37 116 41 92 30 52 14 21 72 16 M12 x 1.75

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

an option.

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or less 30 or less 30 or less 30 or less 30 or less 50 or less 65 or less 30 or less 30 or less 30 or less 30 or less 40 or less 55 or less 40 or less 45 or less 40 or less 40 or less 40 or less ON OFF ON OFF AC Response time (ms) (at the pressure of 0.5 MPa) DC 55 or less 40 or less 45 or less 30 or less 30 or less Note) Based on dynamic performance test, JIS B 8375-1981.

Air Slide Table

40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

NPT1/2 C J E IN A 2 x Port size 1(IN), 2(OUT) port B [mm] Size Port size A B C D E F 20 1/4 28.1 40 69 36 12.5 18 3/8 48 G3/8 72 14 30 1/4 28.1 40 78 42 12.5 21 3/8 48 G3/8 81 14 Size Port size Grommet Grommet with PCB Conduit J K J K J K 20 1/4 39 28.5 44.8 38 46.4 48.9 3/8 G3/8 42 47.8 49.4 30 1/4 40 31.1 45.8 41 47.4 51.9 3/8 G3/8 43 48.8 50.4 17 Direct Operated 2-Port Solenoid Valve

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

bearing CY1S6 to 40 !

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(G or L) LW53KK8XGB (G or L) 215 215 135 70 55 120 120 10 55 85 70 55 50 50 35 135 120 50 35 30 70 50 35 30 40 35 30 30 30 20 215 120 40 30 25 120 40 30 25 40 30 25 30 25 25 135 65 30 20 15 65 30 20 15 30 20 15 20 15 15 G 132 G 132 DE-ENERGIZED ENERGIZED G 132 H 364 G 132 J 116 G 132 V 564 G 132 K 332 H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564

Modular F.R.L. Units

mount M N Q R S T U V W Y Z AR10-A 25 28 30 4.5 6.5 40 2 18 18.5 AR20(K)-B 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AR25(K)-B 30 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 AR30(K)-B 41 40 45.8 6.5 8 53 2.3 31.1 38.5 19 7 AR40(K)-B 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 AR40(K)-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50(K)-B 70 66 65.8 11 13 90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2

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(mm) Size Q1 = M Size Q1 = M 15 20 30 40 15 20 30 40 Thread Shaft type K T K T K T K T Thread M3 x 0.5 2.5 2.5 2.5 2.5 L1 = L1 = M3 x 0.5 2.5 2.5 2.5 2.5 M4 x 0.7 3.3 3.3 3.3 L1 L1 M4 x 0.7 3.3 3.3 3.3 M5 x 0.8 4.2 4.2 Q1 M5 x 0.8 Q1 4.2 4.2 11-3-29 64 Series CRBU2 (Size: 10, 15, 20, 30, 40) Made to Order Specifications: -XC1, 2, 3, 4, 5, 6, 7, 30 Shaft type W Standard J K Refer to

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

K Single shaft S Single shaft T Double shaft Y J Y T S K A parallel key is used instead of single flat for size 40.