CLS

K F N N M TT S + Stroke H BY TX TZ ZZ + Stroke BW With rod boot 180, 200, 250 Z1+ l + 1/2 stroke BV BZ BG BE e 4-MA Effective thread depth MB (To attach eyebolt) f l 15 h + l ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) J M AL B C E F FA GA K KA N A BA BB BC BD BG BE BZ BV BW BP D EA GB GC H MM P BY MB MA 125 140 160 180 200 250 14 14 14 17 17 20 15 15 17 20 20 25 31 31 36 41 46 56 19

High Purity Fluoropolymer

A B C A B A B A B A B 15A 20A 25A Note 1) For each piping diameter for each body size, the second and later numbers or symbols indicate reducing.

MNB

B2 H + Stroke A K AL A S + Stroke H Width across flats B1 ?? ??

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

A AL H1 l 10.2 AL A K H + Stroke ZZ + 2 stroke TT N BN C B h + l With rod boot on both sides ZZ + l + 2 stroke TZ TX S + Stroke H ZZ + 2 l + 2 stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C D E F GA GB GC GD GL GR H1 J K KA LZ Without rod boot With rod boot 40 25 to 500 25 to 500 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 8 M8 x 1.25 6 14 71 50 25 to 600 25 to

MNB

GE B B2 H A S + Stroke H + Stroke A K AL C 4-FD K F GF BN Width across flats B1 4-J Cushion valve GB Effective thread length MM H1 V Q Fd E D D FY B MM Width across flats F FT FE T ZZ + 2 strokes VA N FX FZ Ee11 30 35 40 45 45 55 Effective thread length (mm) Width across flats A 22 30 35 35 40 40 B1 17 22 27 27 32 41 H1 6 8 11 11 13 16 B2 46 52 65 75 95 114 BN BP 1/8 1/8 1/4 1/4 1/4 1/4

MNB

GE B B2 H A S + Stroke H + Stroke A K AL C 4-FD K F GF BN Width across flats B1 4-J Cushion valve GB Effective thread length MM H1 V Q Fd E D D FY B MM Width across flats F FT FE T ZZ + 2 strokes VA N FX FZ Ee11 30 35 40 45 45 55 Effective thread length (mm) Width across flats A 22 30 35 35 40 40 B1 17 22 27 27 32 41 H1 6 8 11 11 13 16 B2 46 52 65 75 95 114 BN BP 1/8 1/8 1/4 1/4 1/4 1/4

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Use a single knuckle joint or a double knuckle joint individually.

AC

For combinations without AW, indication should be "-R" of option. (3) Standard bracket: T bracket for a set of 2 pieces, and L bracket for a set of 3 pieces. But when a check valve (symbol "K") or a residual pressure release 3 port valve ("V") is attached, L bracket is attached for a set of 2 pieces.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

For the angle adjusting type, angle adjusting screws are mounted to the left cover. k e of y e gr g Angle adjusting screw o n o Angle adjusting screw ra v e n io 1 8 at 0 ot R n io ct re di g n ti us n A dj io n a gl ct e re e gl a di dj n g u in A st st in u g dj 0 di 0 a re 8 8 e ct gl 1 1 io n R n A e R e o v v o t o o a t o a o ti o r ti r g g n o n y y r a e e r n k a k g f o e n f

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

For the angle adjusting type, angle adjusting screws are mounted to the left cover. k e of y e gr g Angle adjusting screw o n o Angle adjusting screw ra v e n io 1 8 at 0 ot R n io ct re di g n ti us n A dj io n a gl ct e re e gl a di dj n g u in A st st in u g dj 0 di 0 a re 8 8 e ct gl 1 1 io n R n A e R e o v v o t o o a t o a o ti o r ti r g g n o n y y r a e e r n k a k g f o e n f

LJ1H

X70 Stroke 2 F P K A 1 2 LJ1H20 Vertical Mount Specification Dust seal specification Motor specification Refer to Table below.

Vacuum Pad

x 0.8 6 18 A B 6 18 A B 4 4 11 11 1.8 6 4.5 4 1.8 1.2 0.8 6.5 Dimensions (per stroke) Dimensions (per stroke) Weight (g) Weight (g) Non-rotating (J) Rotating (K) A B D A B D Model Model Rotating (K) Non-rotating (J) ZP3-Y04UM:3-B5 ZP3-Y04UM:6-B5 ZP3-Y04UM:10-B5 ZP3-Y06UM:3-B5 ZP3-Y06UM:6-B5 ZP3-Y06UM:10-B5 12.2 13.4 15.4 12.2 13.4 15.4 22.5 25 29 40 46 56 11 14.5 20.5 12.8 14.2 16.6 22.5

Table of Contents

Load Load Load Load Load 1.2 k N.C. 7.3 k Auto shift input (Yellow) DC (+) Sensor input: +1 to 5 VDC DC () CH1_OUT1 (Black) Pressure is applied to a pressure sensor during the reset operation (a zero point adjustment) as follows: When compound pressure is used: 2.5% F.S. or more. When pressure other than compound pressure is used: 5% F.S. or more.

Cylinder with Lock

C DA 30 30 30 H A A H H A H W1 T C Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM AL DA MM 30 30 30 30 MM MM H A H A H A C H A 36 MWB Series Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 RD 30 30 MM 30 DA MM 30 DA MM L DB DB C H A T H A T H A B W H A L K Symbol: A24 Symbol: A25 Symbol: A26 Symbol: A27 DA MM DA MM MM MM 30 30 H AL A H L A H AL H AL L K LB K Symbol: A28 Symbol: A29

MXS

15 54.5 CL 24.5 80 24.5 MLGC (mm) CNA Stroke adjustable range Retracting 5 15 25 35 30 15 35 35 35 A dimension (Retracted side mounting) Extending Model 26 36 46 46 43 27 48 46 46 MXS25-10 MXS25-20 MXS25-30 MXS25-40 MXS25-50 MXS25-75 MXS25-100 MXS25-125 MXS25-150 Stock absorber at retraction end CB Stroke 100 to 150 A Shock absorber at extension end CV/MVG Max. 35 CXW Shock absorber at retraction

MGG

Hs Hs Hs Hs A A A A A A B B B B B B B 20 30.5 27.5 27.5 27 24.5 41.5 25.5 45 27 43.5 28.5 42 27 40 24 44.5 45.5 29.5 25 30.5 30 30 29.5 27 41.5 25.5 45 27 43.5 28.5 42 27 40 24 44.5 29.5 45.5 32 31.5 33.5 33.5 33 30.5 41.5 26.5 46 28 44.5 29.5 43 28 40 25 45.5 30.5 46.5 40 36.5 38 38 37.5 35 50.5 31.5 55.5 33 53.5 34.5 52 33 49 30 54.5 55.5 35.5 50 43.5 43.5 43.5 43 40.5 60.5 38.5 65 40 63.5

CM2

B 5(3) 5(3) 6(4) 11 A 6(4) 6(4) 7(5) 12 B 0(0) 0(0) 0.5(0) 5.5 A 0.5(0) 0.5(0) 1.5(0) 6.5 B 3(1) 3(1) 4(2) 9 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 B 0(0) 0(0) 1(0) 6 Hs 22.5 25 28.5 32.5 A 1(0) 1(0) 2(0) 7 B A B 1.5(0) 1.5(0) 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) 5.5(3.5) 10.5 4.5(2.5) 9.5 3.5(1.5

Vacuum Unit

2 p. 31 ZK2 VA A A A K 5 L ZK2 FC A Port for the pressure switch or sensor q w e r t Symbol Port for the pressure switch or sensor Filter case color P With port (type with pressure switch or sensor) Smoke T Without port (type without pressure switch or sensor) Clear q Applicable system w Valve type e Rated voltage A Ejector system K Supply valve: N.C., Release valve: N.C. 5 24 VDC 6 12 VDC

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A B C A B A B A B A B Application Same tubing size 1 2 1 2 1 2 3 1 2 1 2 1 2 Refer to the applicable tubing table.