Vacuum System Peripherals:

46 e Valve Model Fill in the blanks below with symbols of necessary specifications.

A

46 119.2 58 136 173 MORE DIMENSIONS S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

HRX-OM-X084

For HRR010-AF-10/20G thread adapter set 1 set (5) For HRR010-AN-10/20NPT thread adapter set 1 set 1 In the case of option Z, not included.

Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

High Flow/ Power Saving Type Refer to page 46 for details.

Vacuum Unit

Release at least one side.) 2 For port exhaust type, air is exhausted from the One-touch fitting. 4 Nozzle size 12 and 15 have exhaust port. 5 Refer to page 46 for the part number and maintenance of the high-noise reduction silencer case assembly.

LEC-OM02704CN

22 2.2 24 2.3 25 2.4 25 2.5 26 3 CC-Link 313-61 3.1 32 3.2 33 3.2.1 33 3.2.2 34 3.2.3 37 3.2.4 38 3.2.5 38 3.3 39 3.3.1 39 3.3.2 39 3.4 3-10 3.5 CPU( 3-10 3.5.1 3-10 3.5.2 3-14 3.5.3 3-23 3.5.4 (RWwn2RWwn3) 3-24 3.5.5 (RWrn2) 3-32 3.5.6 CN6 3-33 3.6 3-35 3.6.1 3-35 3.6.2 3-37 3.6.3 3-39 1 - 3.7 3-42 3.7.1 3-42 3.7.2 3-45 3.7.3 3-46

AR Series Modular Type Regulator

Assembly of a piston and a seal (KSYP-13). 454 Regulator AR10-A to AR40-A Series Dimensions AR10-A to AR40-06-A 2 x P1 (Port size) J A AC-A AF-A B C AF-A OUT IN H AR-A AR-A V AL-A Q AW-A (Pressure gauge port size) Pressure gauge (Option) 2 x P2 AC-B R S AF-A F AF-A U D Bracket (Option) AR -A -B N J M T AL-A AW -A -B Panel fitting dimensions AW Y AG W E AV IN OUT AF Z Plate thickness AR10-

AR20-B to AR60-B

+AR+AL AW+AL AF+AR AF+AFM+AR AW+AFM AF Attachment AFM / AFD AR AL AW t e q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

AR20-B to AR60-B

+AR+AL AW+AL AF+AR AF+AFM+AR AW+AFM AF Attachment AFM / AFD AR AL AW t e q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

HRX-OM-X071

For HRR050-AF-20/40G thread adapter set 1 set For HRR050-AN-20/40NPT thread adapter set 1 set 1 In the case of option Z, not included.

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Nozzle Type Ionizer

Nozzle Type Ionizer Lightweight 16 mm x 100 mm x 46 mm RoHS Thickness Width Height Slim 33% reduction 120 g a 80 g 16 mm Offset voltage: 10 V (For energy saving static neutralization nozzle) 46 mm 100 mm Female threads for piping High flow rate nozzle Energy saving static neutralization nozzle Nozzle Variations Made to order Application Examples With right angles -X367 Dust removal and static

smcmaintenancepartslist

Contents Bore size (mm) 40 50 63 80 100 MB40-PS MB50-PS MB63-PS MB80-PS MB100-PS #9 $0 41 Piston seal NBR Rod seal A NBR Set of left nos. #9, $0, $3, $5 Rod seal B NBR 42 $3 44 $5 46 Release piston seal NBR 41, 42, 44 and 46 to 49 are non-replaceable parts, so they are not included in the seal kit.

Lubrication Equipment

AF AR IR VEX ALD900 Mounting/Adjustment AW Caution qProvide about 30cm of space above and below the D.P. Lube or the D.P.

ZQ-OM01401

(41) 36 (33) 66 0.5 59 (54) 52 (49) 41 (39) 79 0.1 0.2 4 0.3 40 (30) 37 (29) 31 (23) 54 2) 46 (37) 49 (44) 41 (36) 68 0.5 63 (57) 57 (51) 46 (43) 82 0.1 0.2 6 0.3 43 (34) 39 (30) 35 (28) 54 2) 49 (41) 53 (50) 47 (43) 68 0.5 67 (64) 61 (59) 54 (51) 81 1) ( ) 2) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 3) (PD) V PD [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.05 11 10 8 16 0.15 22 20 17 32 3.2

Large Flow Air Filter AF800/900 Series

7.30 3.15 Accessory (Standard) Bowl guard AF-A Accessory (Option)/Part No.

MGC

Refer to p.0-44 to 0-46 for common precautions of auto switch.

Modular Type Filter Regulator Series AW

Install an air filter (Series AF) as a preliminary filter on the inlet side of the mist separator regulator to prevent premature clogging. Orange mark Caution 1. Be sure to unlock the knob before adjusting the pressure and lock it after setting the pressure. Failure to follow this procedure can cause damage to the knob and the outlet pressure may fluctuate. Maintenance Warning 1.