SMC Corporation of America
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The Volume Flow of 9.44 l/min applies to an element (Valve, fining, tub etc.) with an equivalent orifice "S" of 1 mm'. lf an lement has for example an "S' ot 4,5 mm', the flow would be 4.5 times higher, in this case 4.5 . 54.44 limin = 245 Umln Example 2: Given an element wilh an 'S'ol 12 mm", a working pressure of 7 bar and an air consumption ot 600 ymin.

The Volume Flow of 9.44 l/min applies to an element (Valve, fining, tub etc.) with an equivalent orifice "S" of 1 mm'. lf an lement has for example an "S' ot 4,5 mm', the flow would be 4.5 times higher, in this case 4.5 . 54.44 limin = 245 Umln Example 2: Given an element wilh an 'S'ol 12 mm", a working pressure of 7 bar and an air consumption ot 600 ymin.

L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20

(mm) Bore size (mm) Stroke range (mm) O N M L K J I B AP AO AN AM AH AG AB AA AL AK AJ AI A 20 25 32 40 50 75, 100, 125, 150, 200 M6 x 1 depth 9 45 25 80 60 55 30 108 25 M6 115 65 125 112 11 12 9 6.6 95 82 99 M6 x 1 depth 13 54 35 100 70 65 35 130 30 M8 135 75 150 134 13 16 9 9 108 92 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 13 60 35 106 80 73 40 135 35 M8 140 85 150 134 16 16 9 9

I J 20 Up to 350 18 15.5 13 14 8 12.5 12 2 12 12 35 5 25.3 37 26 M4 x 0.7 depth 7 25 Up to 400 22 19.5 17 16.5 10 12.5 14 2 12 12 40 6 28.3 40 31 M5 x 0.8 depth 7.5 32 Up to 450 22 19.5 17 20 12 12 18 2 12 12 40 6 31.3 43 38 M5 x 0.8 depth 8 40 Up to 800 30 27 19 26 16 15 25 2 13 13 50 8 38.3 52.5 47 M6 x 1 depth 12 50 Up to 1200 35 32 27 32 20 16.5 30 2 14 14 58 11 44.5 58.5 58 M8 x 1.25

25C 113 40 38 30 17.1 35 25.5 23 96 129 128.5 121.5 138.5 50 48 40 26.2 28 25.5 40 XLS-25D XLS-25T 120.5 121.5 154.5 63 97 51 66 30 High Vacuum Angle Valve Series XLS Dimensions (mm) 1in=25.4mm XLS/With control power supply Grommet (G) H G 41 D 72 530 10 E J B C F A A (mm) E A 40 50 B 113 138.5 C 121 147 D 38 48 30 40 F 17.1 26.2 G 87 89.5 H 110 115 J 66.5 Model XLS-16-P G XLS-25-P G 69

Heater: 422 A XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.

100 125, 140, 160 P.343 Construction 40 to 100 @5 C A D B 125 to 160 @7 L F E E K H J J M G The numbers are the same as the "Construction" of the Best Pneumatics No.3 Series CL1.

Keyway dimensions l b Model Port size Rc A B C F H J K S U W BA BB CA CB SA SB SC SD SE DD (h9) D (g6) CDRA1BS50 CDRA1BS63 CDRA1BS80 CDRA1BS100 5 5 5 5 36 41 50 60 2.5 2.5 3 4 25 30 35 40 8.5 10 12 12.5 25 30 40 45 15 17 20 25 8.5 10 12 12.5 34 34 34 34 46 57 70 85 17 20 23.5 25 33 33 33 33 14 21 29 39 62 76 92 112 48 60 72 85 M8 x 1.25 depth 8 M10 x 1.5 depth 12 M12 x 1.75 depth 13 M12 x

D MP2 Double Detachable Rear Clevis T MT4 Center Trunnion C MP4 Single Detachable Rear Clevis Rod Boot Without Boot J Nylon Boot K Neoprene Boot X MP1 Double Rear Clevis S MS2 Side Lug U MT1 Rod Trunnion J MT2 Head Trunnion Standard Stroke Inches Air Cushion Both Ends N None H Head End R Rod End Stroke Hundredths Of An Inch Mounting Bracket Part Numbers Part Number Mounting Bracket

S 1 pc. n n pcs. 40 40 mm 50 50 mm 63 63 mm 80 80 mm 100 100 mm * Not available with auto switch. With rod boot/cushion Built-in Magnet Cylinder Model Rod boot Nil Without rod boot J Nylon tarpaulin K Heat resistant tarpaulin If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch.

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

25C 113 40 38 30 17.1 35 25.5 23 96 129 128.5 121.5 138.5 50 48 40 26.2 28 25.5 40 XLS-25D XLS-25T 120.5 121.5 154.5 63 97 51 66 30 High Vacuum Angle Valve Series XLS Dimensions (mm) 1in=25.4mm XLS/With control power supply Grommet (G) H G 41 D 72 530 10 E J B C F A A (mm) E A 40 50 B 113 138.5 C 121 147 D 38 48 30 40 F 17.1 26.2 G 87 89.5 H 110 115 J 66.5 Model XLS-16-P G XLS-25-P G 69

Values) Horizontal load Note: 1N = 0.2248 lbf 1in = 25.4mm Displacement MGPA32, 40 MGPA12 0.4 0.8 MGPA -400 32 40 32 40 MGPA12-250 MGPA12-250 MGPA -400 0.35 0.7 Plate displacement mm Plate displacement mm 0.3 0.6 MGPA -300 32 40 MGPA -300 32 40 0.25 0.5 MGPA12-150 MGPA12-150 MGPA12-100 MGPA -200 32 40 MGPA12-100 MGPA -200 32 40 0.2 0.4 MGPA12-75 MGPA12-75 MGPA -150 32 40 MGPA -100 32 40

75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G 16 16 16 16 21 26 39 19 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 NA 2 2 2 2 2 4 4 4 GA 16 16 16 16 51 61 109 159 KA 125 173 223 13-/22-MXS16L-10 13-/22-MXS16L-20 13-/22-MXS16L-30 13-/22-MXS16L-40 13-/22-MXS16L-50 13-/22-MXS16L-75 13

B Basic type F* Flange type * A key is used for size 40. ** J, K, T and Y are made to order. *** When an auto switch is mounted to the rotary actuator, only shaft types W and J are available. t Rotating angle * F: Except size 40 y Vane type i Auto switch !

10 0.035 J Allowable kinetic energy MB 0.090 J 16 No freezing MB1 Standard Stroke (N) Spring Force CA2 Made to Order Specifications (For details, refer to page 6-17-1.)

ZZ 87 87 87 97 112 162 210 260 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 KA NA 2 2 2 2 2 4 4 4 G 16 16 16 16 21 26 39 19 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 GA 16 16 16 16 51 61 109 159 MXS16-10 MXS16-20 MXS16-30 MXS16-40 MXS16-50 MXS16

16 6 40 46 25 9.5 48 57.5 32 16 63 79 40 0 68 68 Step motor, Stroke: 300 mm Step motor Top surface of table and motor are level.