Table of Contents

10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate

Air Cylinder NCA1 Series

A L R O D T H R E A D X A O P T I O N Thread Form Code M .

NCA1

A L R O D T H R E A D X A O P T I O N Thread Form Code M .

asilltr

Cnlact SMC if hysiersis is a ptluem. Contact Proteetion Bor F. '*d vtti-i --l Blb_r!s4n;i-i ;-. l q i +@i q. i +qei ")ftt--*9::l:1.i-: R"dffi.:i D-Az and D.A8 $vitches harc no buiftin conlacl prctection drcult.

Air Cylinder NCQ7 Series Compact Cylinder

Cnlact SMC if hysiersis is a ptluem. Contact Proteetion Bor F. '*d vtti-i --l Blb_r!s4n;i-i ;-. l q i +@i q. i +qei ")ftt--*9::l:1.i-: R"dffi.:i D-Az and D.A8 $vitches harc no buiftin conlacl prctection drcult.

ITV_D-E

ruct i ons are i nt ended t o prevent a hazardous si t uat i on and/or equi pm ent dam age.

7

Example) VXD2 Z Z 1A X332 3 2 A A Electrical option Seal material: EPDM/ With bracket/ Other option Special electrical entry direction 135 VXD Series Construction Normally Closed (N.C.) i i !2 !2 !0 !0 !1 t !1 t o y o y u IN(P1) u r IN(P1) r OUT(P2) B A OUT(P2) A B C IN(P1) IN(P1) e C e q w q w VXD23 VXD24 !2 i i !0 !2 A B !0 !1 !

Aluminum High Vacuum Angle Valve

Barrel Perfluoro is a registered trademark of Matsumura Oil Co., Ltd. Kalrez is a registered trademark of E. I. du Pont de Nemours and Company or its affiliates. Chemraz is a registered trademark of Greene, Tweed & Co.

IDX-OM-W011

i i-1 () 3 i 1 1 3 IDF Series i-1 i-1 IDX-OM-W011 i i-2 5 i 2 1 IDF Series i-2 i-2 IDX-OM-W011 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDF Series i-2 i-3 IDX-OM-W011 i i 2 6 WARNING !

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Wiring Example 2 Parallel I/O Connector: CN5 When you connect a PLC, etc., to the CN5 parallel I/O connector, please use the I/O cable (LEC-CN5-l). The wiring should be changed depending on the type of the parallel I/O (NPN or PNP). Please wire referring to the following diagram.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4

Made to Order

Applicable rod end nut A L1 H1 H A L1 H1 H2 H I type single knuckle I-12A I-14A I-16A Y type double knuckle Y-12A Y-14A Y-16A I type single knuckle I-12A I-14A I-16A Y type double knuckle Y-12A Y-14A Y-16A 125 140 160 125 140 160 NT-12 NT-12 NT-16 110 50 3.5 100 156.5 125 65 100 181 18 110 50 3.5 105 161.5 125 65 105 186 18 120 56 3.5 110 170.5 140 76 110 198 21 Symbol -XC87 Cylinder with

Air Cylinder

Applicable bore size (mm) A A1 E1 L1 MM R1 U1 NDH10 NX CM2 U1 L1 A A1 I-G02 20 34 8.5 16 25 M8 x 1.25 10.3 11.5 8 +0.058 0 8 0.2 0.4 I-G03 25, 32 41 10.5 20 30 M10 x 1.25 12.8 14 10 +0.058 0 10 0.2 0.4 I-G04 40 42 14 22 30 M14 x 1.5 12 14 10 +0.058 0 18 0.3 0.5 I-G05 50, 63 56 18 28 40 M18 x 1.5 16 20 14 +0.070 0 22 0.3 0.5 I-G08 80 71 21 38 50 M22 x 1.5 21 27 18 +0.070 0 28 0.3 0.5 I-G10

Table of Contents

Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

Serial Network

The serial units are each identified by a different address, so they know which scanner messages to ignore and which ones to obey. How do I address the solenoid valves? The outputs are addressed much the same way as with a parallel I/O card. It depends on configured I/O mapping. Is there a current limit on the outputs?

AC Servo Motor Driver (CC-Link Type)

CN1 CN1 24VDC Emergency stop (Note 6) EMG DOCOM (Note 4) Servo-on SON DICOM (Note 4) ALM Trouble RA DOCOM -12- 3.2 I/O signal connection 3.2.1 Connection example (Sink I/O interfaces) An example of a connection for the I/O signal connection is shown below. Connect wires as necessary.

AC Servo Motor Driver (CC-Link Type)

CN1 CN1 24VDC Emergency stop (Note 6) EMG DOCOM (Note 4) Servo-on SON DICOM (Note 4) ALM Trouble RA DOCOM -12- 3.2 I/O signal connection 3.2.1 Connection example (Sink I/O interfaces) An example of a connection for the I/O signal connection is shown below. Connect wires as necessary.

Electric Actuators

A A A A A Speed Home position A B C Speed no. Time Two pattern combination example (A five point movement of absolute move A and incremental move B) Acceleration no.

LEC-OM02704CN

BMJ-8() 3. 150()RDP(3)RDN(6) 7 4 7MR Configurator 7.3 a (1) (a) (PC20) (2) OK 7 5 7MR Configurator 7.4 g h i j k l c a b d e f (1) (a) (2) (b) (3) (c) 7 6 7MR Configurator (4) (d) (5) (e) (6) (g) (7) (h) , Enter (8) (i) , Enter (9) (j) LECSC, Enter (10)(k) , Enter (11)(l) (12) (13) (14) (15)( ) (1)(4) 7 7 7MR Configurator 7.5 ,PA05STM( )STM()PA05 g f e c a b d h (1) (a)

Multi-Axis Step Motor Controller

I/O cable. i I/O 2 Parallel I/O connector (40 pins) Connect to a PLC via the I/O cable. o ENC z Encoder connector (16 pins) Axis 1: Connect the actuator cable. !