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VK Rc 1/8 Applicable solenoid valve How to Order Type 41 VZ VV5Z5 05 41 1 01 G L M D VZ54VF 4(A), 2(B) Port size P, R port thread type Applicable blanking plate assembly DXT199-22-1A Applicable individual EXH spacer assembly DXT199-29-2A Applicable individual SUP spacer assembly DXT199-35-1A Applicable interface regulator ARBZ5000-00-P Stations VFR 1(P) port Rc 1/4 02 2 stations 01 Rc1 8

P R 42.1 16.9 39[41.2] G: Approx. 300 H: Approx. 600 (Lead wire length) 103.2[107.6] (Light/surge voltage suppressor) 50.1[57.1] + 45 34.7 21.5 6 6 17 17 15 8.5 1/8 (P, R port) 32 24 45.5 L plug connector (L): 10-SYJ5 43-L-01 3 4 5 M plug connector (M): 10-SYJ5 43-M-01 3 4 5 DIN Terminal (D): 10-SYJ5 43-D-01 3 4 5 M8 connector (WO): 10-SYJ5 43-WO-01 3 4 5 Applicable cable O.D. 3.5 to 7 Approx

/8 (A, B port) 35 One-touch fitting (A, B port) Applicable tubing O.D. : 6, 1/4" : 8, 5/16" (4.9) 2 x 3.2 (For mounting) (Light/surge voltage suppressor) 35 + 36 28 25 16.1 21 31.5 [38.5] 1.6 P R2 R1 18 1/8 (P, R1, R2 port) 27.2 L plug connector (L): 10-SYJ7223-L-01 M plug connector (M): 10-SYJ7223-M-01 DIN terminal (D, Y): 10-SYJ7223-D Y-01 M8 connector (WO): 10-SYJ7223-WO-01 Approx. 300

) P port A port (P port control type A port regulated) B port (P port control type B port regulated) P A1 B1 P A1 B1 Pressure gauge connection port Pressure gauge connection port Pressure gauge (G15-10-01) [for odd number stations] Pressure gauge (G15-10-01) [for even number stations] Plug (M-5P) Pressure gauge (G15-10-01) Plug (M-5P) 00 M1 05 06 M1 Note) Note that for series ARBY3000 with

Manifold Option Parts Interface regulator: ARBF2000-00-P-1 (Plug-in type) ARBF2000-00-P-2 (Non plug-in type) Individual SUP spacer: VVFS2000-P-01 02-1 (Plug-in type) VVFS2000-P-01 02-2 (Non plug-in type) Individual SUP spacer Interface regulator SUP port Individual EXH spacer: VVFS2000-R-01 02-1 (Plug-in type) VVFS2000-R-01 02-2 (Non plug-in type) Air shutoff valve spacer: VVFS2000-21A-1

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

P C C U U O O S S L L H H 8 11.5 L2 dimension Stations 1 2 3 4 5 6 7 8 9 M DIN rail part no.

[109.7] (Light/Surge voltage suppressor) 54.2 69.6 [76.6] 50.1 [57.1] + 45 34.7 8.5 31.5 21.5 6 6 17 17 43.9 15 1/8 (P, R port) 45.5 32 24 L plug connector (L): SYJ5140-L-01 M plug connector (M): SYJ5140-M-01 DIN terminal (D): SYJ5140-D-01 M8 connector (WO): SYJ5140-WO-01 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 82.6 Max. 10 75.4 50.1 [57.1] 64.1 34.7 54.6 M8 x

"P" ON ON "P" OFF OFF n-3 OUT1 Output mode Accumulated flow 50msec OUT1 Output mode ON "n" OFF Note 1) Table 2 Flow rate value per pulse ON Note 1) For the type with unit switching function [The type without the unit switching function will have a fixed SI unit (l/min, or l, m or m x 10).]

(N)VV4Z1 20 S TAT I O N S 1 T H R E A D T Y P E 02 2 Stations to 20 20 Stations PT 00T NPTF D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D M P L U G T Y P E F Bracket O P T I O N D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D G R O M M E T T Y P E Lead Wire Length ACCESSORIES M A N I F O L D T Y P E 20 T O P P O R T E D DXT170-25-1A Blanking Plate Assembly

x 1 m A Series VFR2000 Rc1 8 Thread type T0604 x 1 m B Plug-in VFR2000 LP 02 Nil F G Rc Non plug-in VFS2000 LS 02 T0806 x 1 m C N NPT T NPTF T1075 x 1 m D Series VFR2000 Rc1 4 Plug-in VFR2000 LP B 02 T1209 x 1 m E Non plug-in VFS2000 LS B 02 Piping port (P, A, B port) Note) Mounting bolts and gaskets are not attached. 01 02 1 8 1 4 1 8 EA, EB port: Rc 3-5-11

ZS-10-A With lead wire ZS-10-5ANote) When ordering switch with 5 m long lead wire, indicate both part numbers. Lead wire length Caution 0.6 m Nil Ex.) ZSE2-01-15CN1 pc. ZS-10-5 A-501 pc.

0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%F.S. 0.5%F.S. 16 0.9 25 1.4

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Attachment Specifications P. 14-2-24 IR Accessory P. 14-2-29 VEX Made to Order Specifications P. 14-2-31 AMR ITV IC VBA VE VY1 G PPA AL Soft Start-up Valve: AV2000/3000/4000/5000 P. 14-3-1 Lube Unit: AU P. 14-3-11 Large Flow Air Filter: AF800/900 P. 14-3-13 14-2-1 2 F.R.L.

90 elbow M5 female x M5 female Material: Nylon66 GF30% M-5L M-5GH 6/4 x R M-01H-6 P. 56 1 8 P. 59 P. 58 Gaskets are prepared for other items than the above, too.

S070 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6

(For mounting) 2 x 3.2 35 3 Manual override 3 22 A B + + B A PE X P EB EA 42.7 10.2 32.4 [34.6] 97.3 [101.7] G: Approx. 300 H: Approx. 600 M5 x 0.8 (External pilot port) M5 x 0.8 (Pilot EXH port) (Lead wire length) 53.5 [60.5] 50 7.5 16.5 24.5 11 11 20.5 41 (P, EA, EB port) 1/8 L plug connector (L): 10-SY3 40(R)-L-01 3 4 5 M plug connector (M): 10-SY3 40(R)-M-01

-lLll-01 M plug connector (M): SYJ5 40-lMll-01 VFS 2-4.3 (Mounting holes) 2-4.3 (Mounting holes) VS 24 (Mounting holes pitch) (Mounting holes pitch) A B A B VS7 B A 24 B A R P R P 37.5 4 37.5 4 (Mounting holes pitch) 43.3 (Mounting holes pitch) 43.3 18.1 48.9 18.1 (Lead wire length) 60.5 35.3 39.3 [40.6] 103.8 [106.4] 300 123 300 (Lead wire length) 45 62.6 [69.1] 51.5 [58] 45 39.1 32.5

M AR50, 60 AR30, 40 J G J G A A IN OUT IN OUT H M M H Parts list Material Note No.