Possible to transfer a workpiece at low-speed.

(Example) For M3: L1 = 6 Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5, M6

MXS

Model *1) * A B C D E E1 F G H K L M N J P Q MGF MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BT 8 38 23 12.5 14 40.8 5 8 12 1.4 16.6 7 15.5 14.6 M8 X 1 M3 X 12 M3 X 16 MXS-BT12 45 31 18 14 40.8 6 8 12 1.4 20.5 10 15 18.5 M8 X 1 M4 X 8 M4 X 15 CY1 MXS-BT16 55 37 23.5 16 46.7 7 10 14 1.4 23 12 18.5 21 M10 X 1 M5 X 10 M5 X 18 MXS-BT20 70 47 29 23 67.3 11 12 19 12 27 13 25.5 25 M14 X 1.5 M5 X 12 M6 X 25

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

-83503) C8 [3(R) EXH port] C8: 8 One-touch fitting R R 63.5 61 DIN rail clamp screw 40.7 25 B B B B B B B B X X 9.3 P P 7.7 18.7 13 A A A A A A A A P = 10.5 31.5 18.1 C8 [1(P) SUP port] C8: 8 One-touch fitting C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2 L n Dimensions Formula L1 = 10.5n + 45.5, L2 = 10.5n + 63

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

-83503) C8 [3(R) EXH port] C8: 8 One-touch fitting R R 63.5 61 DIN rail clamp screw 40.7 25 B B B B B B B B X X 9.3 P P 7.7 18.7 13 A A A A A A A A P = 10.5 31.5 18.1 C8 [1(P) SUP port] C8: 8 One-touch fitting C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2 L n Dimensions Formula L1 = 10.5n + 45.5, L2 = 10.5n + 63

Air Cylinder

CA2 Bore size MM NA P S TA TC** ZZ WA W WH 20 M8 x 1.25 24 M5 x 0.8 77 11 M5 x 0.8 147 16 25 1.5 25 M10 x 1.25 29 M5 x 0.8 77 11 M6 x 0.75 157 16 25 1.5 32 M10 x 1.25 35.5 Rc1/8 79 11 M8 x 1.0 159 16 25 1.5 40 M14 x 1.5 44 Rc1/8 87 12 M10 x 1.25 187 17 20 1.5 50 M18 x 1.5 55 Rc1/4 102 13 M12 x 1.25 218 18 20 3 63 M18 x 1.5 69 Rc1/4 102 13 M14 x 1.5 218 18 20 3 80 M22 x 1.5 86 Rc3/8 122

5

(mm) Bore size (mm) Stroke range (mm) A AL B1 C D E F H H1 I J K KA MM NA 20 18 15.5 13 14 8 12 2 35 5 26 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 25 22 19.5 17 16.5 10 14 2 40 6 31 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 32 22 19.5 17 20 12 18 2 40 6 38 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 40 30 27 19 26 16 25 2 50 8 47 M6 x 1 depth 12 6 14 M14 x 1.5 44 Up to 1500 50 35 32 27 32 20 30 2 58 11

MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

MY1

M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 M14 x 2 M16 x 2 K 10 12 9.5 16 15 28 32 LH 22.5 23 27 35 38 29 32.5 L 80 100 102 132 162 200 230 LD 3.6 4.8 5.6 6.8 8.6 11 13.5 MW 66 80 96 HG 13.5 17 22 27 34.5 45 59 MM M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 Model MY1M16 MY1M20 MY1M25 MY1M32 MY1M40 MY1M50 MY1M63 U section detail dimensions P M5 x 0.8 M5 x 0.8 Rc 1/8 Rc

SQ1000/2000

plate assembly u F kit L kit T kit S kit P (J) kit q !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l M5 x 30l x 35l M5 x 35l x 40l M6 x 45l x 55l M3 x 25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l M5 x 30l x 35l M5 x 35l x 40l M6 x 45l x 55l 6.5 6.5 5 5 7.5 7.5 9.5 9.5 9 9 7.5 7.5 12.5 12.5 7-6-45 46 Series CQ2 Construction Spring extend Spring return Port size For M5 x 0.8 With boss in head side Rod end male thread Built-in

High Vacuum Angle Valve

1010 (FKM) 1.3 x 1011 (FKM) A w, e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CRB2 L1= CRBU2 L1= Q1=M Q1=M Q1=M L1= Q1=M L1= CRB1 W1= Q1 MSU L1 Q1 Q1 Q1 L1 L1 J axis X axis L1 K axis T axis CRJ L3= L1= (mm) (mm) X= Size Size 30 50 63 80 100 30 50 63 80 100 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 CRA1 2.5 4 5 2.5 4 5 (mm) 4 5 6.8 6.8 8.5 10.3 8 4 5 6.8 6.8

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: S, W, Y d1 = Q1 = M L2 + (3 x P) L1 = L2 = (mm) Size 30 50 63 80 100 Q2 = M Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc1/8 Rc 1/4 2.5 4 5 4 5 6.8 (mm) (mm) d1 Size 30 50 63 80 100 100 Q2 M3, M4 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 6.8 8.5 10.3 8 6.8 8.5 10.3 8 11 2.5 4 to 7 4.5 to 18 6.8 to 11 6.8 to 13

Modular Design with Uniform Body Style

K H J H J H J H J AW20K-D 1/8, 1/4 1/8 40 87.6 71.8 26 M28 x 1 40 26 5 m28 27 m27.8 37.5 37.5 62.5 37.5 63.5 AW30K-D 1/4, 3/8 1/8 53 115.3 86.5 31.5 30 M38 x 1.5 55 31.5 3.5 m28 32.5 m27.8 43 37.5 68 37.5 69 AW40K-D 1/4, 3/8, 1/2 1/8 70 147.1 91.5 40.5 38.4 M42 x 1.5 80 40.5 m28 41.5 m27.8 52 42.5 78 42.5 78 AW40K-06-D 3/4 1/8 75 149.1 93 40.5 38.4 M42 x 1.5 80 40.5 m28 41.5 m27.8 52 42.5

LX

Top mount type Guide l Model Bolt Max. tightening torque Nm Body thickness (l mm) Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) LXS M5 x 0.8 4.4 28 LXS M5 x 0.8 4.4 10 Use bolts at least 0.5mm shorter than the maximum screw-in depth, so they do not touch the body. Caution 3.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

1 M5 x 0.8 10 to 16 6 tube Pad dia.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Buffer/Female Thread) ZPT 20/25/32 F J/K 10-B01-A14 (With Buffer/Female Thread) Rc(PT)1/8 Width across flats 13 Width across flats 8 M5 x 0.8 5 M10 x 1 M14 x 1 6.2 Width across flats 14 3 3 Width across flats 19 I 5 5 D C J H F I M5 x 0.8 Width across flats 8 J H F Width across flats 10 Width across flats 2 Width across flats 12 M8 x 1.25 Y D C Width across flats12 Width across flats 3 2

Auto Switch Guide

x 0.8 x 20 CC M5 x 0.8 x 25 Dimensions ( ): Denotes the values of D-A44C RB D-A3C D-A44C 2-M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland 2-M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland J D-X G 1/2 G 1/2 Applicable cable O.D. 6.8 to 9.6 Applicable cable O.D. 6.8 to 11.5 20Hexagon socket head cap bolt Hexagon socket head cap bolt Data Indicator light Most sensitive

Battery-less

G x M8 x 1.25 x 16 A G x 11 38 2 x M8 x 1.25 x 16 Top mounting not available G x 6.8 6.3 39.5 A 12 J (G/2 1) x J F Connector With lock 180 Lock cable (3.5)6 65 Motor cable 24 Motor cable (2 x 5)6 24 Lock cable 20 15 (2.2) 65 117 180 [mm] Model L B D E F G J K LESH25DE-50237.5 75 4 143 84 40.5 144.5 LESH25DE-50B278 LESH25DE-100299.5 48 207 98.5 4 88 206.5 LESH25DE-100B340 LESH25DE-150377.5

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

8 Note) Brass for 6 to 20 8-15-30 30 Series CY1B Magnetically Coupled Rodless Cylinder Basic Type Dimensions Basic type CY1B6/10 MX MTS (mm) MY D 7.6 12 B 17 25 F 9 9 G 5 5 H 14 12.5 K 5 4 L 35 38 N 10 11 NA 14 14 MM x J M3 x 0.5 x 4.5 M3 x 0.5 x 4.5 NN M10 x 1.0 M10 x 1.0 S 63 63 W 25 30 X 10 16 ZZ 81 81 Model CY1B6 CY1B10 Port size M5 x 0.8 M5 x 0.8 CY MG Courtesy of Steven Engineering,