VZ5000

02 G H VK Manual override (Non-locking) (Mounting hole) VZ VF VFR VP4 (Lead wire length) VZS G: 300 mm H: 600 mm 3-Rc 1/8, 1/4 (1(P), 4(A), 2(B) port) VFS VS4 2-Rc 1/4 (5(R1), 3(R2) port) VQ7 EVS (PE port) VFN L plug connector (L) VZ5140-LM plug connector (M) VZ5140-M(Lead wire length) 01 02 01 02 300 (Lead wire length) 300 DIN terminal (D) VZ5140-D: With light/surge voltage suppressor 01

Modular Design with Uniform Body Style

adapter*5, *6 E200-m01-D E200-m02-D E200-m03-D E300-m02-D E300-m03-D E300-m04-D E500-m06-D E500-m10-D p. 50 E300L-m01-D E300L-m02-D E300L-m03-D E400L-m02-D E400L-m03-D E400L-m04-D E600L-m04-D E600L-m06-D E600L-m10-D L-shaped piping adapter*5, *6 E200L-m01-D E200L-m02-D E500L-m04-D E500L-m06-D p. 51 E300T-m01-D E300T-m02-D E300T-m03-D E400T-m02-D E400T-m03-D E400T-m04-D E600T-m04-D E600T-m06

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

KQ2

(inch) Mass (g) Applicable tubing D1 L M Model KQ2C03-00 KQ2C07-00 KQ2C09-00 KQ2C11-00 5 32 1 4 5 16 3 8 17 18 1 2 3 6 10.4 13.2 15.2 17.9 16 17 18.5 21 20.5 22.5 Plug: KQ2P, KQP Applicable fitting size d (inch) Mass (g) D L A Model Note) KQ2P-01 KQ2P-03 KQ2P-05 KQ2P-07 KQ2P-09 KQ2P-11 KQ2P-13 KQP-01 KQP-03 KQP-05 KQP-07 KQP-09 KQP-11 KQP-13 1 8 5 32 3 16 1 4 5 16 3 8 1 2 1 1 1 1 2 3.5 5

Air Fittings & Tubing

(mm) Weight (g) Part No. (1) L M D 16 17 3 3 4 6 KQ2C04-00 KQ2C06-00 10.4 12.8 17 18.5 8 KQ2C08-00 15.2 20.5 18.5 4 10 KQ2C10-00 18.5 23 21 6 12 KQ2C12-00 20.9 24 22 8 16 KQ2C16-00 26.5 28 25 13 Note1) D: max. diameter Color cap: KQ2C D1 D2 L Weight (g) Tube O.D.

Stainless Steel 316 Fittings

31.7 35 40.5 M L Q A D N M O L Q Note 1) D is maximum diameter.

Fieldbus system EtherCAT compatible SI Unit

(When L/A port1 LED is OFF.) LINK has not yet been established. L/A port1 or L/A port2 LEDs are OFF. (2) Check that the connectors of L/A port1 and L/A port2 communication cables are connected and there are no broken wires. (3) Keep noise sources away from the communication 9 cable.

Base Mounted Metal Seal/Rubber Seal Series VQ

Series Model A L D VQ2000 10 AN200-KM10 59.6 80.8 26 (1.4) 22 30 Elbow fitting assembly VVQ2000-F-L (C4, C6, C8) It is used for piping that extends upward or downward from the manifold.

Table of Contents

Maintenance Caution Model A B C D E Mounting dimension J H L K G F Port size Nominal size (B) ID200 240 240 320 320 1.

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L RR,IU1 E, A, L, t MM NX Part no A2 NDHIO boreSlzc Dl!:;;I~ '!I!

Valve Single Unit

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

Table of Contents

Material: Stainless steel 440 (Pin) Stainless steel 304 (Snap ring) D C d Dd9 H1 B1 t m t l m L Part no.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

1 8 Rc 1 8 Rc 1 8 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2

Rubber seal 5 Port Solenoid Valve Series SYJ7000

manifold mounting) 1/8 (A, B port) One-touch fitting (A, B port) (4.9) 2-3.2 (For mounting) (Light/surge voltage suppressor) Applicable tubing O.D.: 6, 1/4" : 8, 5/16" 35 36 + 28 25 16.1 31.5 [38.5] 21 1.6 P R2 R1 18 1.6 (PE port) 1/8 (P, R1, R2 port) 27.2 L plug connector (L): SYJ7220-L-01 M plug connector (M): SYJ7220-M-01 DIN terminal (D): SYJ7220-D-01 M8 connector (W0): SYJ7220-W0-01

VZ3000

G H (Mounting hole) Manual override (Non-locking) (Mounting hole pitch) (Mounting hole pitch) (Lead wire length) G: 300 mm H: 600 mm (Piping port) (PE port) (Lead wire length) L plug connector (L) VZ3140-L-01 M plug connector (M) VZ3140-M-01 300 (Lead wire length) 300 : With light/surge voltage suppressor DIN terminal (D) VZ3140-D-01 Built-in speed controllers VZ3150Applicable cable O.D.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Orifice symbol (diameter) Solenoid valve (Port size) DC 1 (2 mm) 2 (3 mm) 3 (4.5 mm) 4 (6mm) VX21 VX22 VX23 Model Class H 01 ( ) 02 ( ) 1 8 Rated voltage S L Z 1 4 02 ( ) 03 ( ) 02 ( ) 03 ( ) Port no.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimentions are the same as the grommet style. 1.2-36 Series SYJ5000 2 Position Single G H G H Built-in speed controller SYJ5150-l ll-01 Grommet (G), (H): SYJ5140-l ll-01 17 11.5 8.5 MAX.13.5 5.5 SY Manual override SYJ 2-4.3 (Mounting holes) Depress and turn to operate and lock override.

Modular/F.R.L. Units Series AC

G46-2-02-L G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L Round type Standard 0.02 to 0.2 MPa setting Standard 0.02 to 0.2 MPa setting Standard 0.02 to 0.2 MPa setting Pressure gauge Note 1) Round type (with color zone) Square embedded type Note 2) GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)]

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

L 285.5 21 273 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions (mm) Applicable fitting d Part number A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS TMH ASD AS Number of needle rotations Number of needle rotations Number of needle rotations AS-FE KE Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa AS-FG Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS-FP AS-FM AS-D AS-T AS-D AS-T ASP Number