ZSE F/ISE 02 22 M L For positive pressure ZSE50 02 M F 22 L For compound pressure Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping specifications Option 02 T2 G2 R 1/4 (M5 with female screw), Piping in backward direction Nil None NPT 1/4 (M5 with female screw), Piping
and Japanese NPT1/4 (M5 female threaded) N02 Option 1 G1/4 (M5 female threaded) Rc1/8 URJ1/4 TSJ1/4 Note) Fixed unit ISE80H: MPa Others : MPa, kPa With unit display switching function Fixed SI unit Note) F02 Nil C01 A2 B2 M P Initial value psi Option 2 Bottom ported R1/4 (M5 female threaded) Nil None 02L With bracket NPT1/4 (M5 female threaded) N02L A C01L A2L B2L Rc1/8 ZS-24-A ZS-35-A URJ1
Nil A B C D E F G H J K L M N O P Q R AR425 to 935 AMR ARM With pressure guage With digital pressure switch ARP IR Common supply block Common supply block with pressure switch IRV L side L side VEX1 SRH Note 1) Pressure display means a pressure gauge or digital pressure switch is attached.
L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.
LV E D I M E N S I O N S (N)VM1000 R O L L E R L E V E R A C T U AT O R 00 Basic Type 01 Roller Lever 02 One way Trip 08 Toggle 32 Push Button P U S H B U T T O N C O L O R R Red G Green B Black S Y M B O L S (N)M1000 B A S I C VA LV E S Y M B O L S (N)VM1000 R O L L E R L E V E R D I M E N S I O N S (N)VM1000 O N E W AY T R I P D I M E N S I O N S (N)VM1000 T O G G L E D I M E N S I O N
ISE60 A2 22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.
AS431FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08, 09 06, 07 Number of needle rotations Number of needle rotations 681 AS-FG Series Construction: Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.
Nil L Z N 0.5 m 3 m 5 m None (Example) A73C (Example) A73CL (Example) A73CZ (Example) A73CN Refer to page 11-11-36 for detailed solid state switches with prewire connectors. Since other auto switches are available other than those listed above, refer to page 11-10-16 for details on other applicable auto switches.
Thread size M6 x 1.0 l-9 M4 x 0.7 l-7 M5 x 0.8 l-8 M8 x 1.25 l-12 Bolt dimensions l-8 Dimension t N m 4.4 1.37 2.65 13.2 Tightening torque Square nut l t Service Life and Replacement Period of Shock Absorber Caution 1.
ISE60 A2 22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.
M5 x 0.8 thread depth 12 Data 5.5 NN-M5 x 0.8 NN 2 ( 1) x H 13 G Section AA A M 12 Operating port 2-M5 x 0.8 0.5 25 (Table length) N 2 ( 1): The number of pitches 27 7 12 J 3 Z Max. 9.5 ZZ H G 33.5 (mm) 6 Z M J NN H G N ZZ Model 5H9 +0.030 0 depth 5 MXF20-30 91 91 57 4 30 29 4 104 MXF20-50 113 113 77 4 45 36 4 126 MXF20-75 162 162 125 6 45 40 6 175 MXF20-100 211 211 175 6 60 59 6 224 8
R L NE C NG R R L L G R L A N L R Z + Stroke Slide table operating direction (mm) Model MY3A16 MY3A20 MY3A25 MY3A32 MY3A40 MY3A50 MY3A63 MM M4 x 0.7 N 6 M 55 A 6 B 18 C 2 E 9.5 G 27 H 5 HG M4 x 0.7 JJ 5 KK 65 L 3.5 LD 22.5 LL 41 LW 13.5 M4 x 0.7 15.5 6 64 7.5 22 2 9.5 32 6.5 M4 x 0.7 8.5 80 4.5 24 51 M5 x 0.8 20 8 75 9.5 25 2 14 37 7.4 M5 x 0.8 7.5 95 5.5 27.5 61 M5 x 0.8 22.5 8 96.5 11 32.5
06, 07 10 6 4 500 5 2 0 5 10 0 0 0 5 10 Needle rotation (Turns) Needle rotation (Turns) 4.1-14 Series ASD Dimensions/Metric Applicable tube O.D. d ASD230F ASD330F/430F ASD530F/630F Applicable tube O.D.d L2 L2 L3 L3 M M D2 D2 L1 L1 L4 L4 H H (Width across flats) (Width across flats) D3 D3 A1 L5 L5 A1 A2 D1 D1 A2 T T Metric L4 L5 A1 A2 M MAX.
m P 0.1 x mcos + msin P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m mv P Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 29) 1 Review of operating conditions Determination of load factor () = Load mass (m) Maximum allowable load (m max) + Static moment (M) Allowable static moment (Mmax)+ Dynamic moment (ME) Allowable dynamic moment
flats) D3 D3 L5 A1 A2 L5 A1 A2 D1 D1 T T Metric Size L4 L5 A1 A2 M Max.
0.1 x mcos + msin P m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8
x mcos + msin P m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8
[m] 1 3 5 (10) (11) (30) (60) 1.5 3 5 (L) Conductor size: AWG26 Terminal no.
Consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order. For D-P3DWA, 32 to 63 are available.