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D4-MM thread depth L (Thread for mounting attachment) 20K K J J B A A D G D B F C S W O (mm) Model A B C D F G Open Closed Double acting Single acting J K L Weight (g) MM W MHZL2-103 MHZL2-163 MHZL2-203 MHZL2-253 +2.2 0 2H9 2.5H9 3H9 4H9 0 0.2 0 0.2 0 0.2 0 0.2 +0.025 0 5 8 10 12 0 0.05 0 0.05 0 0.05 0 0.05 70 145 290 505 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 60 135 270 460 7 9

NCQ2/CQ2

Note 2) ( ): Same dimensions as for those of -X202 Dimensions: Applicable to CQ2B -10D(C)Z Only 20 32 Double acting, Single rod Single acting, Spring return Single acting, Spring extend A B L A B L B A L Symbol Bore size Symbol Bore size Symbol Bore size 20 32 33 29.5 3.5 20 32 33 29.5 3.5 20 32 43 29.5 13.5 A B L A B L A B L 36.5 33 3.5 36.5 33 3.5 46.5 33 13.5 With Auto Switch: Applicable

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mounting screw M5 x 0.8 x 16 l 1.

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mounting screw M5 x 0.8 x 16 l 1.

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

M5 x 0.8 (A, B port) 2-2.6 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4 and 5/32" : 6, 1/4" (3.2) 32.3 (Light/surge voltage suppressor) + 23 20 12.7 28.1[35.1] 3 11 2-2.6 (For mounting) P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 L plug connector (L): 10-SYJ5223-L-M5 M plug connector (M): 10-SYJ5223-M-M5 DIN Terminal (D): 10-SYJ5223-D-M5 M8 connector (WO): 10

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(mm) <M5> <M5> Note) Weight (g) Model D1 P A M D2 L 2-applicable tubing M5 x 0.8 KJU23-M5 KJU23-01S KJU04-M5 KJU04-01S KJU06-M5 KJU06-01S 5.9 8.3 6.4 8.8 7.4 9.9 Reference dimensions after R thread installation.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Values at the initial period) JIS Symbol (A) 4 (B) 2 1 (P) 3 (R) 2-8-4 5 4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Valve model Port size C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv L M L M L M L M Body ported VQD1121-M5 0.05 0.31 0.19 0.05 0.16 0.22 U W VQD1121 -M5 0.07 0.28 0.28 0.07 0.24 0.27

Metal Seal/Rubber Seal Series VQ Body Ported

) B B B B B B B B VQD 11 7.5 73 (L plug connector) 44.5 6 2n-C3, C4, M5 C3: One-touch fitting for 3.2 C4: One-touch fittings for 4 P = 10.5 18.4 M5: M5 thread Built-in silencer types are equipped with a 1 (P) SUP port on both D and U sides. 3 position needs two stations.

5-Port Solenoid Valve

A 4 B A A 4 B A 16 11 92.7 A 4 89 17.2 16.8 16.2 15.9 79 64.4 56.9 32.2 32.1 29.8 26.6 21.8 B 2 B 2 B 2 B 2 B 2 M5 x 0.8 [4(A), 2(B) port] 8.6 4 x 4.5 (For mounting) One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 2 14.5 2 x M2.6 2 x 4-40 UNC [For NPT(F) thread] L1 L2 4 (L5) 8 22.1 : 3.2, 1/8" : 4, 5/32" : 6, 1/4" 28 1/8 [1(P), 5(EA), 3(EB) port] M5 x 0.8 (External pilot) X: External

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D L P Z E F G H I K1 K2 Th9 J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 3.5 25 1.5 32 5.2 5 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 1.5 6 3.5 29 38 6 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 2 8 4.5 36 47 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

Air Slide Table

A B C D1 E F G M (Fine pitch) P2 MXQ6(L, A) MXQA-AS8-X2202 41.5 2.5 3 M3 x 12 18 5.8 8.3 M6 x 0.75 M3 x 6 MXQ8(L, A, C, CL) MXQ6B(L) MXQ12(L, A, C, CL) MXQ8B(L) MXQA-AS12-X2202 46.5 2.5 4 M3 x 12 24 7.1 10.4 M8 x 1 M4 x 8 MXQ16(A) MXQ12B(L) MXQA-AS16-X2202 51.5 3 5 M4 x 12 29.4 9.2 12.6 M10 x 1 M5 x 10 MXQ20(A) MXQ16B MXQA-AS20-X2202 58.5 4 6 M5 x 12 36 11.2 16.2 M12 x 1 M6 x 12 MXQ25(A)

Base Mounted Metal Seal/Rubber Seal Series VQ

5.5 9 (4(A), 2(B) port) 9 9 9 SMC 5 3-C4, M5(1(P), 4(A), 2(B) port) M5(5(R1) , 3(R2) port) 8.7 8.7 C4: One-touch fitting for 4 M5: M5 thread < >: AC 2 position double: VQ025 0 1 15.2 15.8 12.3 5 5 Manual override A B A B (For C4) 31.5 10.5 25 18 A A B B ~ = ~ = EB P EA EB EB P EA EA 23.4 mounting holes 38 31 Lead wire length = 300 121<131> M plug connector 108<118.5> L plug connector 51 (

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(For mounting) 2 x 3.2 35 3 Manual override 3 22 A B + + B A PE X P EB EA 42.7 10.2 32.4 [34.6] 97.3 [101.7] G: Approx. 300 H: Approx. 600 M5 x 0.8 (External pilot port) M5 x 0.8 (Pilot EXH port) (Lead wire length) 53.5 [60.5] 50 7.5 16.5 24.5 11 11 20.5 41 (P, EA, EB port) 1/8 L plug connector (L): 10-SY3 40(R)-L-01 3 4 5 M plug connector (M): 10-SY3 40(R)-M-01

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

) 87.2 [91.6] 43 3.5 11 5 B A B A Manual override 19 10 10.6 M5 x 0.8 (A, B port) 2 x 2.6 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D. : 4, 5/32" : 6, 1/4" (3.2) 32.3 (Light/surge voltage suppressor) + 23 20 2 x 2.6 (For mounting) 3 11 28.1 [35.1] 12.7 P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 L plug connector (L): 10-SYJ5223-L-M5 M plug connector (M): 10-SYJ5223

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D E G H K1 K2 L P Th9 Z F I J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 25 1.5 5.2 5 3.5 32 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 3.5 29 1.5 6 6 38 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 4.5 36 2 47 8 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

SYJ3000/5000/7000

28.1 [35.1] 12.7 2-2.6 (For mounting) Built-in One-touch fitting: SYJ5120(-F) G H C4, N3 C6, N7 4 3.5 19.5 3.5 B A P R1 16 15 10.6 R2 One-touch fitting (A, B port) 32.3 (3.2) 21 M5 x 0.8 (P, R1, R2 port) 1.4 (PE port) Applicable tubing O.D.: 4, 5/32" : 6, 1/4" (2.3) L plug connector (L): SYJ5120-L-M5(-F) M plug connector (M): SYJ5120-M-M5(-F) DIN terminal (D): SYJ5120-D-M5(-F) M8 connector

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Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B 10 10 A B 14.4 10 With across flats 7 M3: M3 x 0.5 M5: M5 x 0.8 A PSE54-M5 PSE54-M3 PSE54-R06 PSE54-R04 A A 11.5 10.8 6 4 B 3.5 3 B 20 18 Common dimensions PSE54-IM5 18 3000 13 9.6 8.7 9 4 M5 x 0.8 PSE5401 N01 PSE54

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Single solenoid coil is located on same side as the A, B port. 2 stations 02 R port Rc(PT)1/8 : : 20 stations 20 A, B port side S R port Rc(PT)1/8 M5 X 0.8 M5 A/B port M5 X 0.8, C4 A/B port P port Rc(PT)1/8 P port Rc(PT)1/8 4 One-touch fitting C4 M5 X 0.8, C4 41 Type (5 Port/Base mounted) Applicable solenoid valve SYJ3l40-l SYJ3l43-l How to Order SS5YJ3-41-05 -C4 41 Type S41 Type Single