High Vacuum Angle Valve seal material) Surface treatment External: Hard anodized Internal: Raw material Pilot pressure [MPa(G)] 0.4 to 0.7 Pilot port size XLA M5 Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.
CHKDB Bore size Rod end thread type Stroke Y7BA S R Water resistant cylinder Water resistant solid state switch with 2-color display NBR Seal (nitrile rubber) FKM Seal (fluoro rubber) R V F9BA Y7BA 20 and 25 32 to 100 Refer to page 2 for specifications.
(mm) Connection thread R H 1(P) 2(A) B S (Width across flats) Weight (g) L3 L4 L5 L6 M1 Q L1 L2 Model C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-04F-M5 18 2.0 3.4 1.2 19 49 11 21 51 13 4 29.1 31.6 55.4 52.9 M5 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-04F-01S VHK-06F-M5 3.5 11 41 23.8 16.5 15.8 1 8 53.9 29.6 56.9 24.3 32.6 16.5 3.5 16.8 11 7.2 21 50 11 23 53 13 M5 2.0 VHK-B1A 44.5 14.5 1 27 22
F R L T B 1 R Axial entry Right entry 200/230VAC (50/60Hz) 2 Y 0 Without motor Bottom entry Specifications Intermediate strokes 100 5.1 200 5.9 300 6.7 400 7.4 500 8.2 5 to 40 (with no condensation) 10 225 400 mm kg C kg N mm/s mm Standard stroke Strokes other than the standard strokes on the left are available by special order. Consult SMC.
Refer to page 449 for details of the replacement. 10 Straight type Elbow type Fitting size One-touch fittings for centralized supply block Straight R 3 3 5 Elbow S 12.5 12.5 13.5 Elbow T 19 19 21 Elbow U 35.5 35.5 38.5 4, 5/32 6 1/4 8, 5/16 R S T Note) The O-ring is attached. Refer to page 449 for details of the replacement.
B C D R Model CDRBU2WU10-S 22 45.5 14 M5 x 0.8 MRQ CDRBU2WU15-S 25 47 18 M5 x 0.8 CDRBU2WU20-S 34.5 51 20 M5 x 0.8 CDRBU2WU30-S 47.5 55.5 22 M5 x 0.8 CDRBU2WU10, 15-D Double vane type CDRBU2WU20, 30-D A port B port A port B port A port B port Free mounting rotary actuator Free mounting rotary actuator Free mounting rotary actuator 2 x R 2 x R 2 x R Cover Angle adjuster Angle adjuster Angle
Ml0 X l ' It ~jath across fl ats 14 I W\dt~ acro ss fl ats 12 \lj ~ I W ,r~ --~ o ,..---. NM iniature tube fitling (Serie s M5) Width across flats 7 ~ ~~~S~ _ M5 ) 0 , >.2:1 'B ~ ~ ,...!
(Example) For M3: L1 = 6 mm Applicable shaft types: S, W, Y Q1 = M L1 + (3 x P) L1 = (mm) Q1 M3 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 Symbol: A2 Machine female threads into the short shaft.
How to Order LEFS 32 R T7 B 200 B S 5 S2 q w e r t y !
Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 0 2 06 AS 1F S E M5 Body size 1 S Body size 2/3/4 AS 01 2 0 2 1F S 06 With indicator Made to Order Refer to page 15 for details. Body size 2 1/8, 1/4 3 3/8 4 1/2 Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Control type Note) Note) Face seal type is used for the G thread type.
, 16 Mounting nut Piping port M5 x 0.8 Rod end nut Piping port 2 x M5 x 0.8 Cover surface B 0 -0.3 Mounting hole Port location on head cover: Axial location (R) S + Stroke Z + Stroke For details of the mounting nut, refer to page 1250.
F FK FL FY GC GA Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5(1) ZC(D)UKR16 ZC(D)UKR20 ZC(D)UKR25 ZC(D)UKR32 Rc 1 8 M5 x 0.8(2) 7 20 32 2 6 7 8 13 17 28 19 5 8 9 10.5 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 21.5 22 22.5 19 21.5 23 M5 x 0.8 M5 x 0.8 Rc 1 8 6.6 5 to 50 8 5 to 50 11.5 5 to 50 SA H HA J L P Q QA R S T W Y Z Model ZC(D)UKR16
Applicable shaft types: S, W, Y d1 = Q1 = M L2 + (3 x P) L1 = L2 = (mm) Size 30 50 63 80 100 Q2 = M Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc1/8 Rc 1/4 2.5 4 5 4 5 6.8 (mm) (mm) d1 Size 30 50 63 80 100 100 Q2 M3, M4 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 6.8 8.5 10.3 8 6.8 8.5 10.3 8 11 2.5 4 to 7 4.5 to 18 6.8 to 11 6.8 to 13
R 7 P = 11 19.2 2-C6 R (EXH port) (7.5) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread The broken lines indicate the DIN rail mounting style [-D] and the top entry connection [-PU].
[Option] Conforms to ISO 15407-2 Standard Size 18 mm, 26 mm Plug-in Type 5 Port Solenoid Valve Series VS 8-2/VS 8-4 S R S R Series VS 8-4 S R Series VS 8-2 S R Conforms to ISO 15407-2 Standard S R S R ISO Standard: Interface conforming to 18 mm size (VS 8-2) and 26 mm size (VS 8-4) Accommodates IP65 enclosure.
VQ4 Type D side End Plate Ass'y U side End Plate Ass'y Kit Common exhaust type VVQ0-3A-4-P VVQ0-2A-4-R F, P, S Kit VQZ Built in silencer, direct exhaust VVQ0-3A-4-P VVQ0-2A-4-S Common exhaust type VVQ0-3A-4-P VVQ0-2A-4-R VQD C Kit Built in silencer, direct exhaust VVQ0-3A-4-S VVQ0-2A-4-S VZS U Side End Plate Assembly VFS u VVQ0-2A-4VS Option S: Built-in silencer
x 0.8 thread depth 10 2 x 2-M5 x 0.8 (Hexagon socket head cap plug) 2-M5 x 0.8 Cylinder port 4-4.3 through 4-8 counterbore depth 4.5 2 x 2-M5 x 0.8 Thread depth 10 2-M8 x 1.0 RB0805 Shock absorber 2 x 2-5H7 depth 6 +0.012 0 8-26-18 17 Series CXWM Slide Unit: Build-in Shock Absorber Slide Bearing Type 16 With End Lock: CXWM16Stroke/50 to 200 R 2 x 2-M5 x 0.8 thread depth 10 2 x 2-5H7 depth
F Kit P Kit T Kit S Kit 1 to 12 (24) Special wiring specifications Note 3) (except for double wiring) With name plate External pilot Note 4) K N R S Cylinder port size 2 C3 C4 C6 M5 CM With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread 1 to 12 (24) Direct exhaust with built-in silencer Note 5) When specifying two or more options, list symbols in alphabetical
40 6 38 M5 0.8 depth 8 5.5 10 M10 x 1.25 35.5 1/8 40 Up to 200 30 27 19 26 16 25 2 13 10 50 8 47 M6 1 depth 12 6 14 M14 x 1.5 44 1/8 Female Rod End (mm) Bore size TA TB TC 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st S ZZ S ZZ S ZZ S ZZ 20 11 11 M5 x 0.8 94 131 119 156 144 181 25 11 11 M6 x 0.75 94 136 119 161 144 186 169 211 32 11 10 M8 x 1.0 96 138 121 163 146 188 171 213 40
x 0.8 0.6 0.7 Weight [kg] 0.79 0.74 0.78 0.73 0.79 0.74 Outlet pressure [MPa] 0.5 Effective area at supply side [mm2] S at P1 = 0.7 MPa/P2 = 0.5 MPa P R A 33 75 29 0.4 P R B 64 33 28 0.3 Effective area at exhaust side [mm2] S at P2 = 0.5 MPa A R EA 36 75 78 0.2 B R EB 68 38 69 0.1 Note 1) Set the pressure within the operating pressure range of the valve.