Modular F.R.L. Units

e q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

SYJ300/500/700

External pilot type is not available. 1 SYJ3 2 5 M M3 Body ported SYJ3 4 5 M 1 Base mounted Port size 3 port Nil: Without sub-plate M5: M5 port With sub-plate Coil specifications Nil Standard With power saving circuit (24, 12 VDC only) T Power saving circuit is not available in the case of W type.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(For type 20 manifold) 1 10 SYJ3 2M 5 M M3 Body ported 1 4M 5 M 10 SYJ3 Base mounted Port size Clean series 3 port M5: M5 port with sub-plate Nil: Without sub-plate Coil specifications Nil Standard With power saving circuit <24, 12 VDC only> T Power saving circuit is not available in the case of "W" type.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 t 10.5 15 18 20 t 10.5 15 18 20 Series Assembly part no.

AC

T Type Interface: (T) M5 X 0.8, 1/8, 1/4, 3/8, 1/2 Makes it easy to diverge air out with T type interface.

Best Pneumatics Vol. 14

1 Drain q r e w t i u y o !0 !

0.4

wire kit) Lead wire length 3.0 m T kit (Terminal block kit) Single wiring T kit (Terminal block kit) Double wiring L kit (Lead wire kit) Lead wire length 0.6 m L0 TS C L1 TW kit L2 L0 S kit (Serial transmission kit) Single wiring S kit (Serial transmission kit) Double wiring L kit (Lead wire kit) Lead wire length 1.5 m L kit (Lead wire kit) Lead wire length 3.0 m SS L1 Manifold Options Manifold

Table of Contents

0 IS1000 No. q w e r t y u i o !

Table of Contents

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

ZP3

Type/ZP3-T ZP3-T-B ZP3-T-A w w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

locking slotted type Coil type M5: With M5 port sub-plate Nil Standard With power saving circuit T For sub-plate, type 41, S41, 46, S46 manifold (24, 12 VDC only) Power saving circuit is not available for W type.

Magnetically Coupled Rodless Cylinder

6 t !0 i q o u y !7 r !9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Note Hard anodized Material Aluminum alloy No.

A

Center Back Mount 18 or 14 Connection 42mm Diameter Face GZ46 A T H R E A D T Y P E Rc(PT) N NPT M O U N T I N G Standard C Panel Mounting C O N N E C T I O N T H R E A D 01 1/8 02 1/4 M M5 (10-32Nom) Female I N T E R N A L T H R E A D Courtesy of Steven Engineering, Inc. !

Modular F.R.L. Unit

t q e OUT IN OUT IN e q r r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Color No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

One-touch Fittings

[inch] Model T (M) Weight [g] X Y Nylon Urethane 11 mm or less Metric Size M, R, Rc Inch Size UNF, NPT Inch Size M, R, Rc Metric Size G Metric Size R, Rc Inch Size NPT Inch Size R Metric Size Uni Inch Size Uni H T 3/16 KQ2E05-00Mm1 M14 x 1 17 8.4 11 27.3 15 13.3 7.8 6.5 3.5 30.5 m: A (Brass), N (Brass + Electroless nickel plating) L M M Sealant/Gasket Seal Face Seal Gasket Seal Release button

Compact Hydraulic Cylinder

7 @6 r u #1 t @4 @5 #2 @0 y i !9 !0 q !1 w !

Made to Order

Compact guide cylinder MGP Air cushion type only MGP -AZ w-2 From P. 452 Double acting Compact slide MXH 5 mm spacer only MXH-Z w-2 From P. 19 Dual rod cylinder Double acting CXS 5 mm spacer only CXS w-2 From P. 749 M L Double acting Dual rod cylinder compact type CXSJ 5 mm spacer only CXSJ M L w-2 From P. 737 Standard model no.

Free Mount Cylinder Series CU

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Rotary Actuator

$Applicable shaft type: J, K, T $Applicable shaft type: J, K, T (mm) (mm) Q1 Q2 L2 + (3 x P) L2 + (3 x P) K axis (T axis) J axis Shaft Shaft J K T J K T type type Q1 = M Size Size L1 = L1 + (3 x P) L2 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 30 30 M3, M4, M5 M3, M4, M5 L2 = Q2 = M Q2 = M 40 40 M3, M4, M5 M3, M4, M5 Symbol: A37 The long shaft can be further shortened