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D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Air Cylinder

V V V V V V V V V V Standard CM2 V V V V V V V V V V V D CM3 v CJ2l-lA CG1 V v v v7 10-, 11CG3 v v v v v v v v v v v 25AJMB v v v v v v v v v XB6 MB MB1 v v v v v v v v XB7 CA2 v XB9 CS1 XB13 CS2 v v v v XC3 v v v v v v v XC8 v v v8 XC9 v v v v v v v v v XC10 v v v8 XC11 v v v v v v v v XC22 XC51 XC85 X446 X773 v v X2838 D-X Technical Data 45 A Air Cylinder

V100

S070 Entry is the same as standard products. 0 V Body option VQ Nil A Standard Large flow capacity Standard 0.55 W VKF Energy-saving type Rated voltage 0.22 W 5 6 VQZ 24 VDC 12 VDC 0 W 62 ms VZ VS Applied voltage VFN 24 V 0 V High flow type 0.8 W Energy-saving type 0.3 W 0 W 62 ms Low Wattage Specifications (0.45 W) How to Order

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Pitch = 21 Individual vacuum supply port Individual vacuum supply port PV Adapter D Adapter D M5 x 0.8 (or M6) Vacuum pad connection port (V port) M5 x 0.8 (or M6) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) Adsorption nozzle piping port 13-2-57 57 Series ZX Vacuum pad connection V port Vacuum pad connection V port Vacuum Pump System Manifold: Type K1 Common EXH Common

Compact Cylinder

x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 120L x 145L R V 10.5 15 7.5 R V R V R V 9.5 15.5 12.5 R V R V 9 14.5 160 Series CQ2 Construction 20, 25 40 to 100 32 Replacement Parts/Seal Kit Kit no.

15

type V type U type T type M1 type M2 type Z type Y type X type W type V type U type T MELSERVO-JN HF-KN V V V MELSERVO-J3 KF-KP V V V MELSERVO-J4 HG-KR V V V YASKAWA Electric Corporation -V SGMJV V V V SANYO DENKI CO., LTD.

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(mm) A B C D G E(g6) F(h9) H K L M N R S1 S2 T U V W X Y Model CRBU2WU15-D 5 0.004 0.012 0 0.043 1.5 18 21.2 25 3.2 34 48 36 29 3 15.5 10 0.5 10.5 10.5 M5 x 0.8 3.5 M3 x 0.5 21 12 CRBU2WU20-D 0.004 0.012 0 0.043 1.5 20 25 34.5 4 42 59 44 36 4 17 10 0.5 11.5 11 M5 x 0.8 4.5 M4 x 0.7 26 6 14 CRBU2WU30-D 0.005 0.014 0 0.043 2 22 29 47.5 4.5 50 69 52 42 4.5 17.5 12 1 12 13 M5 x 0.8 5.5 M5 x 0.8

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) A B C D G E(g6) F(h9) H K L M N R S1 S2 T U V W X Y Model CRBU2WU15-D 5 0.004 0.012 0 0.043 34 25 21.2 18 1.5 15.5 10 0.5 10.5 10.5 M5 x 0.8 3.5 M3 x 0.5 21 3 29 36 48 3.2 12 CRBU2WU20-D 0.004 0.012 0 0.043 42 34.5 25 20 1.5 17 10 0.5 11.5 11 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 4 6 14 CRBU2WU30-D 0.005 0.014 0 0.043 50 47.5 29 22 2 17.5 12 1 12 13 M5 x 0.8 5.5 M5 x 0.8 29 4.5 42 52 69

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) A B C D G E(g6) F(h9) H K L M N R S1 S2 T U V W X Y Model CRBU2WU15-D 5 0.004 0.012 0 0.043 1.5 18 21.2 25 3.2 34 48 36 29 3 15.5 10 0.5 10.5 10.5 M5 x 0.8 3.5 M3 x 0.5 21 12 CRBU2WU20-D 0.004 0.012 0 0.043 1.5 20 25 34.5 4 42 59 44 36 4 17 10 0.5 11.5 11 M5 x 0.8 4.5 M4 x 0.7 26 6 14 CRBU2WU30-D 0.005 0.014 0 0.043 2 22 29 47.5 4.5 50 69 52 42 4.5 17.5 12 1 12 13 M5 x 0.8 5.5 M5 x 0.8

ZP

(With barb fitting) Type Symbol Size Pad diameter [mm] 10, 16 25 40 Type Symbol Size Pad diameter [mm] 10, 16 25 40 B5 M5 x 0.8 v v v B01 Rc1/8 v N01 NPT1/8 v T01 NPTF1/8 v v (uConnection thread: A6) v (uConnection thread: A6) M3 x 0.5 v (uConnection thread: A5/A6) Female thread Nil v (uConnection thread: A8) B5 M5 x 0.8 v v B6 M6 x 1 v v v B8 M8 x 1.25 v v B01 Rc1/8 v v v N01 NPT1

Rotary Actuator/Vane Type

2-wire 100 V R73 V V v XC30 Fluorine grease W, J Connector R73C V V V V Grommet No 48 V, 100 V 100 V R80 V V v IC circuit Reed auto switch X5 For M5 port (90/180) W, J Connector 24 V or less R80C V V V V * Lead wire length symbols: 0.5 m Nil (Example) R73C 3 m L (Example) R73CL 5 m Z (Example) R73CZ None N (Example) R73CN * Auto switches are shipped together, (but not

5 Port Solenoid Valve Series SY3000/5000/7000/9000

12 V 100 V 200 V 110 V 220 V Part no.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D L P Z E F G H I K1 K2 Th9 J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 3.5 25 1.5 32 5.2 5 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 1.5 6 3.5 29 38 6 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 2 8 4.5 36 47 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

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Apparent power (VA) Volt-ampere is the product of voltage (V) and current (A). Power dissipation (W): For AC , W = V/A cos. For DC, W = V/A. (Note) cos shows power factor. cos = 0.6 2. Surge voltage A high voltage which is momentarily generated in the shut-off unit by shutting off the power. 3.

Air Cylinder

) Note 13) v v v v v XC9 Note 15) Note 14) Note 14) v v v v v v v XC10 v v v v v v v XC11 v v v v v XC12 v v v v XC13 v v v v XC20 Note 15) v v v XC22 Note 2) v v v v v v XC27 v v v v v v v XC29 v v v v XC35 v v v v v v v XC37 v v v v v XC42 v v v XC85 X446 Note 8) Copper-free for the externally exposed part.

Modular F.R.L. Units

Example) AL30-03B-3RW-A q w e r t Nq Body size 10 20 30 40 50 60 Symbol Description Nw Pipe thread type Nil Metric thread (M5) V Rc V V V V V N NPT V V V V V F G V V V V V + M5 M5 x 0.8 V 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V V 10 1 V V + Ne Port size Nr Option (Mounting) Nil Without mounting option V V V V V V B*1 With bracket V V V V V + Nil Polycarbonate bowl

4/5 Port Solenoid Valve

Applied voltage 24 V 0 V Standard With power saving circuit 0.4 W 0.1 W 0 W 62 ms Back page 8 Series SYJ3000/5000/7000 Specific Product Precautions 4 Be sure to read before handling. Refer to back page 1 through to 5 for Safety Instruction and Common Precautions.

V

M5 M5 Thread VA LV E O P T I O N Standard (2W) V* Vacuum (2W) U* High Flow (4W) W High Flow, Vacuum (4W) *Power Saving Type E L E C T R I C A L E N T R Y L Plug Lead Type L Type Plug Connector with Lead Wire; w/Light and Surge Suppressor LO Plug Lead Type L Type Plug Connector without Lead Wire; w/Light and Surge Suppressor M Plug Lead Type M Type Plug Connector with Lead Wire; w/Light and

ISO Cylinder

V (1 pc.) W Double knuckle joint V (1 pc.) V (1 pc.) Standard Mounting Bracket/Accessory Part Nos.

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Example: Analog output = 1 to 5 [V] F.S. = 5 [V] 1 [V] = 4 [V] 3 [% F.S.] = 4 x 0.03 = 0.12 [V] The output error induced by the temperature change can be as much as 0.12 [V].