ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

HRX-OM-Q026

HRX-OM-Q026-V Operation Manual Installation Operation Original Instructions Thermo Chiller HRSH Series HRSH100-A-20HRSH100-A-40HRSH100-A-20-S HRSH150-A-20HRSH150-A-40HRSH150-A-20-S HRSH200-A-20HRSH200-A-40HRSH200-A-20-S HRSH250-A-20HRSH250-A-40HRSH250-A-20-S HRSH300-A-20HRSH300-A-40HRSH100-W-20HRSH100-W-40HRSH100-W-20-S HRSH150-W-20HRSH150-W-40HRSH150-W-20-S HRSH200-W-20HRSH200-W-40HRSH200

•

:ro s s '" ?

VEX1

chamber is blocked at the A port of VEXY Y.

3 Port Solenoid Valve Metal Seal Series VZ200 1

Description No. t y NBR Stainless steel Material Note Spool/Sleeve Body Platinum silver Gasket Return spring w e r Polyacetal Piston O-ring u NBR Seal i NBR O-ring o NBR O-ring !0 NBR Mini Y seal !1 Carbon steel Round head combination screw NBR Aluminum die-casted Sub-plate Platinum silver Sub-plate Assembly Part No.: VZ200-S-01 !2 Carbon steel Round head combination screw !

VQZ1000/2000/3000

PE port 18 18 5-Rc 1/8, 1/4 1(P), 2(B), 3(R2), 4(A), 5(R1) port 2.1 28 M5 x 0.8 external pilot port (Only external pilot type (R)) L plug connector (L): VQZ2150 1(R)-L-01 02 DIN terminal (Y): VQZ2150 1(R)-Y-01 02 Indicator light 300 98 (Lead wire length) 68 Pg.7 51.5 <56.5> Applicable cable O.D. 3.5 to 7 101.5 Max. 10 Indicator light Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 82.5

Secondary Batteries

Suffix for stroke adjusting unit Nil S Piping Both sides One side Standard type Centralized piping type Nil G Note) S is applicable for stroke adjusting units L and H.

REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

Table of Contents

0 y !3 !5 @3 !0 !

SX

SX3120-C6 AS3001F-06 AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02 AN110-01 SZ Conditions [When using SGP (Steel pipe)] Base mounted Series MB

REA/REB

speed of 600mm/s.

SMC Electronic Switch Series Variations

AC/DC 100V AC/DC Voltage 50mA 40mA 20mA Max. operating current 30G Shock resistance Up to 100V AC/DC Operating Pressure Range Electrical Circuit ON pressure OFF pressure 0.5 Hysteresis Operating pressure (MPa) 0.4 Reed switch 0.3 0.2 0.1 0.1 0.2 0.3 0.4 0 Set pressure scale How to Order IS1000 01 S Optional Port size Sealant R(PT) 1/8 NPT 1/8 None With sealant 01 N01 S X201 Lead wire length

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

125

(R) e r Port 3 (R) Port 2 (A) Port 1 (P) Port 23(P2) (Pilot air port) y i Port 2(A) u r y Port 1(P) t q VEX3320 (Air operated) VEX3420 (Air operated) w e q r y y t w r e u t t 12(P1), 23(P2) Port Port 3(R) y y (Pilot air port) r i Port 2(A) u r Port 1(P) t q Port 1(P) Port 2(A) Port 3(R) Component Parts No.

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

IR1000/2000/3000

Description IR1000 IR3000 IR3020/3120 IR2020/2120 IR3010 IR1020 IR2000 IR2010 IR1010 Bracket Pressure gauge P36203018 P36202028 P36201023 G43-2-01 G43-4-01 G43-10-01 G43-4-01 G43-10-01 G33-4-01 G33-10-01 G43-2-01 G33-2-01 Accuracy 3% (Full span) 14-5-7 7 Series IR1000/2000/3000 Construction IR1000 IR2000 IR3000 q i o !4 q o i !

Shock Absorbers and Rate Controls

I Clevis Mounting OEM {+ * OEIVI 4.0lvl oErr/ 1.oNa rA ov Y SPr ng OPtona OE[,4 1.151V] * OEM 1.25M (otoloq o. lltloJel) (s) Slroke (nnl 25 w x (R Iltodel Weight 394 s o;illt.0t[ct{15 162.1 6.4 0/.0.1 31,8 N/-A r,r/A 5 I U ll P 0 I ll/A N/A 9.0 6,4 N/A 3.2 (LRl0[trt l. | 5lUtx | (llJl{S) 25 163.6 6 I izi l o/'oJ 12.7 ll/A 38.1 22_36.0 8.3 5.9 10.0 725 s (tRl0[ltl. | 5iltx2(lul(S) 50 I H/A

LEC-OM02704CN

S S S () 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N L S N O F F L S N O F F 6 39 6 6.4.4 (PC31PC34) PD20 PD20 0 1

HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.