CATALOG

F O L D T Y P E 40 S I D E P O R T E D D I M E N S I O N S M A N I F O L D T Y P E 40 S I D E P O R T E D (N)VV3Z3 40 1 N U M B E R O F S TAT I O N S 02 2 Stations to 20 20 Stations S I Z E O F A, B P O R T M5 10-32Nom (P, R Port PT) M5T 10-32Nom (P, R Port NPTF) B3T One Touch Fitting 5/32 B7T One Touch Fitting 1/4 ACCESSORIES M A N I F O L D T Y P E 40 S I D E P O R T E D T Y P E G DXT200

V100

S : : P R 20 20 stations A A + + + + P, R port thread type R port A port size A port M5 x 0.8, C4 P port R P 1/8 M5 M5 x 0.8 P port Nil Rc A 1/8 1/8 C4 4 One-touch fitting F G R port N3 5/32" One-touch fitting N A port M5 x 0.8, C4 NPT 1/8 T NPTF Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port.

ZP

Form w 1 Material e Vacuum inlet r M5 x 0.8 Connection thread N S U F GN GS B4 M4 x 0.7 4 N4 N6 U4 U6 ZP Y 10 13 16 UT 2.52 B5 M5 x 0.8 5 Construction p. 115 Adapter Assembly p. 123 Dimensions Per Vacuum Inlet Model C D Fitting part min. hole size Vacuum inlet direction q Pad dia.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

20.5 P=20.5 19.5 (A, B port) 1/4 7 7 Applicable tubing O.D.: 10, 3/8" 9.4 9.4 B B B B 28.9 28.9 A A A A + + + L1 Manual override L2 6 37 (External pilot port) M5 x 0.8 (Pitch) 19.1 P=20.5 23.5 + + 42 (For mounting) 4 x 4.5 (5.5) 72.9 9.9 29 3.1 21 31.4 41.9 B B B B EB P EA X 26 26.6 21 21 80.1 110.2 112.2 PE A A A A (P , EA, EB port) 1/4 + + + + M5 x 0.8 Output no.

ZP

P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model ZP2-R3507WK ZP2-

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Tubing G: M5 x 0.8 Y G: M6 x 1 G: M8 x 1.25 G: M4 x 0.7 G: M5 x 0.8 D ZPY02U 2 4 6 8 Applicable tube O.

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Y-J010B Applicable bore size Applicable bore size d C C B d H B H Part no. Part no. 10 16.2 8 21 M4 x 0.7 CE2 SNJ-010B NTJ-010A Y-J016B 16 10 16 10 16 16.6 11 21 M5 x 0.8 8.1 11 12.7 M8 x 1.0 4 7 M4 x 0.7 3.2 SNJ-016B NTJ-015A 9.2 14 16.2 M10 x 1.0 4 8 M5 x 0.8 4 NDd9 NDH10 R1 NX U1 Part no.

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YES Model selected Without shock absorber Model selected With shock absorber 8-27-5 6 Series CXT Non-rotating Accuracy of Slide Block CXTM CXTL (Slide bearing) (Ball bushing bearing) p (= y) r p (= y) r Bore size (mm) p y r 12 0.09 0.12 0.05 0.05 16 0.08 0.10 0.05 0.04 20 0.07 0.08 0.04 0.03 Pitching direction Rolling direction Yawing direction 25 0.07 0.07 0.04 0.03 32 0.08 0.07 0.04 0.03

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

x 0.8 15.5 48 4 Manual override A B + 35 + B A X PE EA EB P M5 x 0.8 62.8 107.2 [111.6] (Lead wire length) G: Approx. 300 H: Approx. 600 (Pilot EXH port) 22 50.6 [57.6] 9.5 18 18 28 (P, EA, EB port) 1/4 56 L plug connector (L): 10-SY5240(R)-L-02 M plug connector (M): 10-SY5240(R)-M-02 DIN terminal (D, Y): 10-SY5240(R)-02 M8 connector (WO): 10-SY5240(R)-WO-02 D Y

V

(N)VV4Z1 20 S TAT I O N S 1 T H R E A D T Y P E 02 2 Stations to 20 20 Stations PT 00T NPTF D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D M P L U G T Y P E F Bracket O P T I O N D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D G R O M M E T T Y P E Lead Wire Length ACCESSORIES M A N I F O L D T Y P E 20 T O P P O R T E D DXT170-25-1A Blanking Plate Assembly

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Y: 4.5 to 7 D: 6 to 8 Manual override (Non-locking) Manual override (Non-locking) Bracket Bracket (EA, EB port) (P, A, B port) 3-M5 x 0.8, Rc 1/8 3-M5 x 0.8, Rc 1/8 (P, A, B port) (EA, EB port) ( ): M5 x 0.8 ( ): M5 x 0.8 : With light/surge voltage suppressor : With light/surge voltage suppressor 3-4-7 8 Series VF1000 2 Position Single Solenoid L plug connector: VF1120-L-M5 01 300 (Lead wire

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine

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(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine

CRB2/CRBU2/CRB1

(Example) For M4: L2 = 8mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 Shaft type Shaft type L1 = S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Symbol

Micro Mechanical Valve Series VM1000

25.4 1 (P) 2 x 4.6 mounting hole (A) 2 3 port 14 8.5 12 10 2 x M5 x 0.8 depth 4 1 (P) 3 (R) * 0.5 MPa supply F .O.F .* 27 N T.T. 6.5 mm Twist selector (2 position) VM122-M5-34 (R, B, G, Y) A VM132-M5-34 (R, B, G, Y) A Panel mounting hole ON Max. 6 T.T. 40 39 OFF 38 24.5 Symbol 2 port (A) 2 1.5 1.5 (80.1) (52.1) 30 22.1 28 3 10.5 12 10 R port (3 port only) 1 (P) (A) 2 3 port 12 10 1 (P) 3

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three sides) 0 -0.062 37h9 M5 x 0.8 Port A M5 x 0.8 Port B 4-M4 x 0.7 depth 6 I N J E A D P A A M N 2 R SMC R E O P P T 6 A I R R G Y R A I 18 6 21 9 5 5 23 34 Side A Side B 12-11-13 14 Series MRHQ Dimensions MRHQ16 A B 41 50 66.5 4-M5 x 0.8 depth 8 30 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

12.7 11 3 28.1 [35.1] P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors L plug connector (L): 10-SYJ5 23-L-M5 3 4 5 M plug connector (M): 10-SYJ5 23-M-M5 3 4 5 DIN terminal (D, Y): 10-SYJ5 23-M5 M8 connector (WO): 10-SYJ5 23-WO-M5 3 4 5 3 4 5 D Y Approx. 300 (Lead wire length) Applicable

Air Fittings & Tubing

<M5, M6> D P M Part No.

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size A B 2-P Port size A B M M 2-J, thread depth K 2-J, thread depth K G1/2 Specifications with bracket Orifice 2, 3, 4.5, 6 Orifice 8, 10 7.5 2.3 Bracket Y 29 Mounting hole 2-5.3 Bracket 22 5.5 52 28 W U 67 X (mm) Grommet Conduit DIN terminal Electrical entry Mounting dimensions Bracket mounting Port size P Model Orifice size A B C D E F H Conduit terminal J M4 M5 M5 M5 M5 K M Q R 50 60