VM

(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

AC

0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%F.S. 0.5%F.S. 16 0.9 25 1.4

Table of Contents

A B P A B P A B P VFR3000 VFR4000 ARBF5050 VFR5000 1.0 MPa (1) 0.1 to 0.83 MPa (2) 0.05 to 0.83 MPa 5 to 60C (No freezing) (3) 1 8 0.16 0.46 0.72 0.83 5.5 5.1 12 11 M5 x 0.8 Rc 21 18.5 11 35 31 26 18.5 22 12 31 31 40 55 36 45 24 44 38 32 38 40 90 77 P A P B A EA B EB Effective area at supply side (mm 2) S at P1 = 0.7 MPa/P2 = 0.5 MPa 31 Effective area at exhaust side (mm 2) S at P2 =

Magnetically Coupled Rodless Cylinder

wire (NPN) 3-wire (PNP) P P A96V A96 s s s s 5V p P P F9NV F9N IC circuit 5V 12V p P P F9PV F9P s p P P 12V F9BV F9B 2-wire s Relay PLC Grommet Yes 24V s 3-wire (NPN) 3-wire (PNP) p P P F9NWV F9NW Diagnostic indication IC circuit 5V 12V p P P F9PWV F9PW 2-color display p P P F9BWV F9BW 2-wire 12V s Lead wire length symbols 0.5m/ Nil (Example) F9NW 3m/ L F9NWL 5m/ Z F9NWZ Solid state switches

Series VQ Base Mounted Metal Seal/Rubber Seal

P.1.10-140 P.1.10-144 VFS C C3 (3.2) C4 (4) M5 (M5 thread) VS C6 (6) kit VS7 N1 (1/8) N3 (5/32) N7 (1/4) Built-in silencer P.1.10-178 P.1.10-182 P.1.10-186 Terminal block C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C8 (8) kit N1 (1/8) N3 (5/32) N7 (1/4) N9 (5/16) Built-in silencer P.1.10-178 P.1.10-182 P.1.10-186 Terminal block 1.10-115 Cylinder Speed Chart Series VQ0 Cylinder

ZP3

adapter Vertical VAC VAC ZP3-T VAC p. 138 p. 144 p. 150 p. 156 With adapter Lateral ZP3-Y Construction Precautions Mounting Bracket Assembly VAC VAC VAC p. 139 p. 145 p. 151 p. 157 With adapter VAC VAC VAC Vertical ZP3-T p. 140 p. 146 p. 152 p. 158 With buffer Lateral ZP3-Y p. 141 p. 147 p. 153 p. 159 With buffer VAC VAC VAC 134 Compact Type ZP3 Series Specifications Pad Material Material

KQ2

Male run tee Union Y Use to branch line in the same direction from female thread and in 90 direction. P. 52 KQ2Y KQ2U P. 54 Use to branch line in the same direction. 41 Series KQ2 Male Connector: KQ2H <M5, M6> <M5, M6> H (width across flats) 7 7 Connection thread R M M5 x 0.8 (1) (2) Applicable tubing O.D.

SQ1000/2000

R1) (P)(R2) (R1) (P)(R2) Double (double solenoid): SQ1230D Double (double solenoid): SQ1231D y e e q w y e e q w SQ1231D SQ1230D (A)(B) (A) (B) 4 2 4 2 5 13 5 1 3 (R1) (P)(R2) (R1)(P)(R2) u u 3 position: SQ1 30 3 4 5 3 position: SQ1 31 3 4 5 SQ1331 SQ1330 (A)(B) (A)(B) y e e q y e e q w w 4 2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) SQ1431 SQ1430 (A)(B) (A)(B) 4 2 4 2 5 1 3 (R1) (P)(R2)

Made to Order

P.1729 P.1731 P.1732 P.1733 P.1738 P.1739 P.1742 P.1743 P.1744 P.1747 P.1748 P.1752 P.1755 P.1756 P.1760 P.1765 P.1766 P.1769 P.1770 P.1776 P.1781 P.1786 P.1794 P.1796 P.1801 P.1802 P.1803 P.1804 P.1806 P.1806 P.1807 P.1809 P.1817 P.1818 P.1819 P.1820 P.1822 P.1823 P.1829 P.1829 P.1830 P.1831 P.1832 P.1832 P.1833 P.1836 P.1838 P.1839 P.1839 P.1841 P.1844 P.1844 P.1845 P.1848 P.1849 P.1850

KJ

360 around the stud axis For reducing R 1/8 female to M5. 1 8 For nylon tubing 1 8 R x M5 female M-5B 6/4 x R 6/4 x M5 M-01AN-6 P. 56 M-5HL-6 P. 58 P. 59 1 8 Plug Use to plug unused M5 port.

4/5 Port Solenoid Valve

+ + + + + + + 20 20 stations S P P A, B port size P Nil Rc A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 A A B B B A, B port M5 x 0.8, C4 A M5 M5 x 0.8 F G C4 One-touch fitting for 4 N NPT N3 One-touch fitting for 5/32" T NPTF 13 Series SYJ3000 Flat Ribbon Cable Manifold Common SUP/Common EXH Note) For more than 10 stations, supply air to both sides of P port and exhaust air from both

Electric Actuators

Driver for Non-standard Motor Regenerative Absorption Unit Series LC7R Teaching Box Dedicated AC Servomotor Controller Series LC1 P. 205 P. 200 P. 185 P. 196 Features 5 Electric Actuator Line-up of Products Short Stroke Electric Actuator Series LX Series LX Stepper motor High Rigidity Slide Table Type Series LXS Low Profile Slide Table Series LXF Guide Rod Type Series LXP P. 250 P. 210 P

VQZ1000/2000/3000

Rc 1/8 1(P) port L plug connector (L): VQZ2220 1(R)-L-C4/C6/M5 DIN terminal (Y): VQZ2220 1(R)-Y-C4/C6/M5 Indicator light 300 136.5 68 (Lead wire length) Pg.7 31 <36> 142.5 MAX.10 71.5 Applicable cable O.D.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

How to Order Manifold Assemblies (Example) VFR Double solenoid (24VDC) SY3260-5G-C6-Q (2 sets) Cylinder port size M5: M5 x 0.8 Example VP7 Single solenoid (24VDC) SY3160-5G-M5-Q (2 sets) Cylinder port size C6: With 6 One-touch fitting Manifold base (4 stations) SS5Y3-60-04U-Q VQC SQ R D side Port R C8: With 8 One-touch fitting P VQ Stations 1 2 n Port P C8: With 8 One-touch fitting VQ4 U

0.55

Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) M5 VF1;20-;;1-M5 5(EA), 3(EB) M5 4(A), 2(B) 1/8 VF1;20-;;1-01 5(EA), 3(EB) M5 VF1;3;-;;1-M5 VF1000 4(A), 2(B) M5 VF1;3;-;;1-01 4(A), 2(B) 1/8 1(P), 5/3(R) 1/8 Type 30 manifold base 1(P) 1/8 Type 31 manifold base 5(EA), 3(EB) M5 Applicable tubing O.D.

Stability of suction position,

Stroke 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EU-(T/Y)F1JB10 10 V V V V ZP3EU-(T/Y)F1JB30 30 ZP3EU-(T/Y)F1JB50 50 ZP3EU-(T/Y)F2JB10 10 V V ZP3EU-(T/Y)F2JB30 30 ZP3EU-(T/Y)F2JB50 50 ZP3EU-(T/Y)F3JB10 10 V V V ZP3EU-(T/Y)F3JB30 30 ZP3EU-(T/Y)F3JB50 50 ZP3EU-(T/Y)F4JB10 10 V V ZP3EU-(T/Y)F4JB30 30 ZP3EU-(T/Y)F4JB50 50 ZP3EU-(T/Y)F5JB10 10 V V ZP3EU-(T/Y)F5JB30 30 ZP3EU-(T/Y)F5JB50

5 Port Solenoid Valve Series VQZ1000/2000/3000

16.5 15 R1 5 3 R2 1 P X (Pitch) P = 10.5 16.1 57 32.8 M5 x 0.8 [4(A), 2(B) port] A 33.5 20.5 6.5 20 6 4 B 2 External pilot 3.2 (Pitch) P = 10.5 14.5 M5 The dashed lines indicate the DIN rail mounting [-D].

Compact Hydraulic Cylinder

10 9 7 CHA M5 10 9 10 Related Y-type double knuckle joint Bracket pin Equipment 20: Y-020B 25: Y-032B 32: Y-04D 40: Y-04B D-m 2 x D drill through RR1 RR1 C1 Chamfer NDH10 NDH10 MM C E1 E1 C1 Chamfer NX NZ NZ NX A1 A1 U1 L1 A B U1 L1 Material: Carbon steel Material: Cast iron Material: Rolled steel Part no.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.

Rotary Actuator/Vane Type

Q1 = M Applicable shaft type: W Applicable shaft type: W Q2 = M L1 = Y = X = L2 = [mm] Size CRB2, CRBU2 Y L2 max Q2 10 7 to 8 Y-3 M4 15 8.5 to 9 Y-3.5 M5 20 10 Y-4 M6 30 13 Y-5 M8 40 15 Y-6 M10 [mm] Size CRB2 CRBU2 X L1 max Q1 X L1 max Q1 10 9 to 14 X-5 M4 7 to 14 X-3 M4 15 11 to 18 X-6 M5 8.5 to 18 X-3.5 M5 20 13 to 20 X-7 M6 10 to 20 X-4 M6 30 16 to 22 X-8 M8 13 to 22 X-5 M8 Symbol: A5