Rc 1/8 Body side VZA412-P-01 M5 x 0.8 0.53 0.17 2.2 0.49 0.14 2.0 N.C. Rc 1/8 Body side VZA422-P-01 M5 x 0.8 0.53 0.17 2.2 0.49 0.17 2.0 N.O. Rc 1/8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C.
( 2 ) P 1 1 DC (FR-BEL) P 2 LEC-MR-J3BAT P C 1. 3.
AdaprOf PHiS I J t ~ (r I Re I .m."~ =~~P~a'~-t -, .~.@. Deteriorated Pad 36 Vacuum Pad/Components VacuumPad/Components Part/ Pad(With Lock Ring) Flat type pad Flat type pad with rib ZPlOCO-5OCO ZP02UO 08UO .0 oC (mm, ' , 19.5 3,e I C 'A . t El' K; 11'0 E ' Part No.
Poriing No. of Ports 'xx" M84010-02 Ta"NPTFSide l l M84011-02 7a" NPTF Side: Y.r" Bottom A & B 1 3 MB 4210-02 %"NPTFSid(2); % Botlom(5) 7 t 5 Manifolds *(OptionsT & P Only) Part No. Poding No.of Ports "xx" Subplates .
roller VM220-02-07 VM220-02-07S VM230-02-07 VM230-02-07S Cross roller plunger Toggle lever VM220-02-08 VM230-02-08 VM-30AR Red VM220-02-30R VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y Push button (Mushroom) VM-30AB Black VM220-02-30B VM-30AG Green VM220-02-30G VM-30AY Yellow VM220-02-30Y VM-32AR Red VM220-02-32R VM230-02-32R VM230-02-32B VM230-02-32G VM230-02-32Y VM-32AB Black VM220
t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.
0 e w t y q o 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center 4(A) (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i Component Parts 2 position single with back pressure check valve Material Note Description No. q w e r t y u i Zinc die-casted Body r u !
P P P Stations are counted from station 1 on the left side, with the A (OUT) ports in front. PA PB PA P PB A A A N.O. PA PB PA A (OUT) port PB A A A Double acting N.C. N.O. Double acting
PA02] 0 0 00: 100W 200W, 400W, 750W 02:LEC-MR-RB-032 03:LEC-MR-RB-12 11.2.3 11.5 100 5m 11 9 11. (1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.
of P port and exhaust air from both sides of R port. 40R-2 Applicable solenoid valve VZ314RVZ324RApplicable blanking plate assembly DXT200-8-3A How to Order VV3Z3 40R 05 2 01 X port R port Stations P/R port Thread type P port A port side 2 stations 02 P port Nil Rc G NPT NPTF M5 01 M5 x 0.8 1/8 A port F N T 20 stations 20 R port Note) For more than 9 stations, supply air to both sides
P and R port Type 40R Applicable solenoid valve SYJ514RSYJ524RHow to Order SS3YJ5 40R 05 01 R port 1/8 X port (External pilot type) Applicable blanking plate assembly SYJ500-10-3A P, R port thread type P port 1/8 R Stations A port size + + + + M5 x 0.8 02 : 20 2 stations : 20 stations P port 1/8 M5 01 M5 x 0.8 Nil Rc G NPT NPTF P A A X F N T 1/8 R P A port M5 x 0.8, 1/8 R port 1/8 Note) For
) p. 14 qConcentration Meter p. 36 Water-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 14 wParticle Filter Element for Replacement p. 36 Specifications eDI Filter Replacement Cartridge p. 36 Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 15 rAnti-quake Bracket p. 36 Water-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 16 tPiping Conversion Fitting (For
Swivel Elbow KFG2V Metric Inch P. 324 P. 329 Metric Inch P. 325 P. 331 KDM KB KR KA KQG2 Straight Union KFG2H Female Connector KFG2F KG Metric Inch P. 324 P. 330 Metric Inch P. 326 P. 331 KFG2 KFG2 MS KKA KP LQ Union Tee KFG2T Union Nut KFG2N MQR Metric Inch P. 324 P. 330 Metric Inch P. 326 P. 331 T IDK 321 Stainless Steel 316 Insert Fittings Applicable Tubing: Metric Size, Connection Thread
P, E port location U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Pilot type Internal pilot External pilot Nil R Valve stations Series 10-SV1000 Series 10-SV2000 P: Flat ribbon cable 26 pins PH: Flat ribbon cable 10 pins P: Flat ribbon cable 26 pins PH: Flat ribbon cable 10 pins 02 02 02 02 2 stations 2 stations 2 stations 2 stations Double wiring
(R) e r Port 3 (R) Port 2 (A) Port 1 (P) Port 23(P2) (Pilot air port) y i Port 2(A) u r y Port 1(P) t q VEX3320 (Air operated) VEX3420 (Air operated) w e q r y y t w r e u t t 12(P1), 23(P2) Port Port 3(R) y y (Pilot air port) r i Port 2(A) u r Port 1(P) t q Port 1(P) Port 2(A) Port 3(R) Component Parts No.
: Change this to a smooth cylinder (CS2). 1 1 DCQSY CQ2Y CM2Y CG1Y CA2Y CQSX CQ2X CM2X CJ2X CUX CS2Y -X P. 1168 P. 1176 P. 1189 P. 1203 P. 1214 P. 1228 P. 1261 P. 1268 P. 1280 P. 1246 P. 1256 1165 Series CY/CX Smooth Cylinder/Low Speed Cylinder Added compact type foot brackets. Compact foot bracket has the same width as the cylinder. Overall width reduced by up to 43% (for 12).
Stations 12 13 14 15 16 17 18 19 20 21 22 23 24 11 10 9 8 7 6 5 1 2 3 4 Description/Model A B Single PEB EA A B Double P EA EB A B Valves Options Closed center EAPEB A B Exhaust center P EA EB A B Pressure center EB P EA A B Perfect EB P EA Blanking plate VVQ4000-10A-1 Individual SUP spacer VVQ4000-P-1-02/03 Individual EXH spacer VVQ4000-P-1-02/03 Throttle valve spacer VVQ4000-20A-1 Perfect
T V V 2-Rc P Cushion adjustment screw 4-J GA F GA A MA a A MA a Air release R (max.)
plate assembly u F kit L kit T kit S kit P (J) kit q !