Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Lead wire length symbols: 0.5 m Nil(Example) Y59B 3 m L (Example) Y59BL 5 m Z (Example) Y59BZ Z76 5 V IC circuit Reed switch Solid state switch Yes 100 V Z73 12 V Grommet Relay, PLC 24 V 2-wire 100 V or less No 5 V, 12 V Z80 IC circuit Y59A 3-wire (NPN) IC circuit 5 V, 12 V Y7P 3-wire (PNP) Y59B 2-wire 12 V Relay, PLC Yes Grommet 24 V 3-wire (NPN) Y7NW Diagnostic indication (2-color

Table of Contents

VAC specification] Terminal block K L H M N J 4-13 P [200 VAC specification] Power cord outlet (17) [100 VAC specification] Power cord (mm) A B C D E F G H J K L M N P Q Port size Model IDF1E IDF2E IDF3E IDF4E IDF6E IDF8E IDF11E 69 101 270 32 21 330 413 38 150 3/8 226 410 240 15 51 232 138 24 327 125 67 304 33 73 31 36 154 21 330 473 1/2 13 453 283 275 498 455 15 270 31 80 230 32 15 240

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Lead wire length (m) Load voltage Auto switch model Indicator light Pre-wire connector Wiring (Output) Special function Type Electrical entry Applicable load 0.5 (Nil) 3 (L) 5 (Z) None (N) AC DC Perpendicular In-line 3-wire (NPN equivalent) IC circuit A76H 5 V Reed switch Solid state switch Grommet A72H A73H A72 A73 A73C 200 V 100 V Yes Relay, PLC 12 V 2-wire Connector 24 V Diagnostic

High Vacuum Angle Valve, XL Series

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

Tie-rod Type Hydraulic Cylinder

V Width across flats G Width across flats G MM MM R (max.) d W W D d E E D M MA a a M MA F NA NA F K A A K C H + Stroke S + Stroke H B ZZ + 2 strokes (mm) Bore size (mm) B C A a d E D F G GA J K M MA MM NA P R S T V W H ZZ 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 23 10 60 44 18 25 14 17.5 M8 x 1.25 18 13 20 M14

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Tie-rod mounting Band mounting 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Wiring (Output) Type Special function Electrical entry M9N V V V v v 3-wire (NPN) G59 V V v v 24 V 5 V, 12 V IC circuit 3-wire (PNP) M9P V V V v v G5P V V v v Grommet 2-wire 12 V M9B V V V v v K59 V V v v Terminal

ZP

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-Y2A(J/K)3-B5 ZP3B-Y2A(J/K)6-B5 ZP3B-Y2A(J/K)10-B5 ZP3B-Y2A(JB/K)15-B5 ZP3B-Y2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.

ZP

Model Model ZPR20B-0-A10 ZPR40B-0-A14 23.5 38.5 49.3 67.1 12.4 47.5 58.3 76.1 24.4 20 25 40 48 16 22 43 34 10.5 25 ZPR25B-0-A10 19 ZPR50B-0-A14 50 24 39 49.8 67.6 15.6 51.5 62.3 80.1 32.4 28 57 27 53 38 14 ZPR32B-0-A10 32 29 44 54.8 72.6 18.9 37 34 Dimensions by Stroke Dimensions by Stroke 40 50 J K: 6 K: 8 Model 20 25 32 J K: 4 K: 6 K: 8 G H G H L M L M Model G H G H G H L M L M L M ZPRB10

MY1

Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V 3-wire (PNP) Relay, PLC 2-wire 12 V Grommet 24 V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example)Y59A 3 m L (Example)Y59AL 5 m Z (Example)Y59AZ Solid state switches marked with are produced upon receipt of order.

MHZ

5 V 12 V MHS Relay, PLC Grommet Yes MHC 2-wire 12 V MHT Lead wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Auto switches marked with a symbol are produced upon receipt of order.

MHZ

F9NW Y7PW F9PW Y7BW F9BW Standard Standard Standard Standard Standard Standard Standard Standard Standard 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) Solid state switch Relay, PLC 2-wire Grommet Yes 24 V 12 V 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) Diagnosis (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z

2/3 Port Valve

M G H J K A H G, J S Q E P K K A H B J V M V M E, X N, P Polyacetal B Stainless steel L Stainless steel, Silver Trichloro ethane Trichloroethylene Polyacetal M (Non-leak) N P Q S T Perchloroethylene Brake oil Helium Non-leak(105atm cc/sec) Water Stainless steel H Brass, Copper (High temperature) B Polyacetal X V (Non-leak) Note 1) The leakage amount(105atm cc/sec) of "V", "M" option is

Modular F.R.L. Unit

Note 3) Bowl assembly for AF30 to 60 models comes with a bowl guard (steel band material). 25 Air Filter AF10 to 60 Dimensions L AF10, 20 AF50, 60 A G D Bracket (accessory) L Bracket (accessory) F D M G K K F M J J B E E B OUT IN H C OUT IN H C Port size OUT OUT Port size o s Drain A P Min. clearance for maintenance 25 AF30, 40, 40-06 L Bracket (accessory) A D G F M K J 40 B E Drain Min.

Electric Actuator/Slider Type

Weight [g] Auto switch model D-M9NW(V) D-M9PW(V) D-M9BW(V) Auto Switch Internal Circuit 0.5 8 8 7 D-M9NW/M9NWV 1 14 14 13 Lead wire length (m) 3 41 41 38 DC (+) Brown 5 68 68 63 Main circuit of switch OUT Black How to Order D-M9 N W V L DC () Blue Series Lead wire length D-M9PW/M9PWV Nil 0.5 m M 1 m L 3 m Z 5 m Nil In-line V Perpendicular Wiring/Output type DC (+) Brown Electrical entry N

Possible to transfer a workpiece at low-speed.

L1 L1 = L1 = L1 L1 = Q1 = M Q1 = M Q1 = M Q1 = M L1= L1 L1= Q1 = M Q1 K axis Q1 T axis (mm) Q1 Q1 L1 L1 Size Thread M 3 x 0.5 M 4 x 0.7 M 5 x 0.8 M 6 x 1 M 8 x 1.25 M10 x 1.5 Rc 1/8 Q1 J axis Z axis (mm) 15 20 30 40 10 (mm) Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 4.2 5 6.8 8.5 8.2 2.5 2.5 3.3 2.5 3.3 4.2 5 20 10 15 40 30 Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 3.3

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VXZ 2 x P Port size I F J a b 2 x 8.5 VXS e d L K VXB (D) VXE VXP VXR DIN terminal U V E Cable 6 to 12 G1/2 VXH C VXF (44) T 31.5 VX3 VXA B A IN OUT M 2 x P Port size I F J (D) K L (mm) Model Grommet DIN terminal Electrical entry Port size P A B C E F I J K L U T D M U 53 (59) T V 3/8, 1/2 96.5 (102.5) 25.5 30 28 61 (67) 4 B VXD2 70 20 11.5 14 50 33 37 27 64.5 52.5 Model Mounting bracket

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

1.0 Communication speed [bps] 156 k/625 k/2.5 M /5 M/10 M 125 k/250 k/500 k 9.6 k/19.2 k/45.45 k/ 93.75 k/187.5 k/500 k/ 1.5 M/3 M/6 M/12 M 10 M/100 M Configuration file Note 2) EDS file GSD file EDS file Communication specifications Input 896 points 108 words 4 stations occupied (8 times setting) Input 200 bytes Output 200 bytes Input 57 words Output 57 words Input 256 bytes Output 256

energy saving effect

IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option.

MXS

Combination of Options v: Possible X: Not possible Functional option F R P FR FP Adjuster option v v v v v v v (3) v (3) v (3) AS v v v X X X X AT v v v (3) X X X X A v X X X BS v v v X X X X BT v v X X X X X B v Note 3) For combination of buffer mechanism style and stroke adjuster at extension end style, the buffer stroke is shortened by the adjusted length with the stroke adjuster at extension

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SANMOTION R R2 V V OMRON Corporation Sysmac G5 R88M-K V V Panasonic Corporation MINAS-A4 MSMD V V MINAS-A5 MSMD/MHMD V V FANUC CORPORATION is V V (1 only) V NIDEC SANKYO CORPORATION S-FLAG MA/MH/MM V V KEYENCE CORPORATION SV SV-M/SV-B V V FUJI ELECTRIC CO., LTD. ALPHA5 GYS/GYB V V FALDICGYS V V ORIENTAL MOTOR Co., Ltd.