AS-FG/ASD-FG

Dimensions Metric size Inch size Model d Weight g D1 D2 L1 L2 L3 Model d Weight g D1 D2 L1 L2 L3 Max. Min. M1 Max. Min.

Series AS-FM/AS-M/ASD-FM

L2 Metric sizes A M1 L5 Max.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

L3 M1 L4 H(1) A(2) D1 D2 L1 L2 L3 L4 T M1 Weight (g) Model Model Min.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

tubing O.D. d A (2) L5 (3) A (2) Model T D1 D2 D3 L1 L2 L3 L4 M1 L5 (3) Weight Weight (g) (g) T D1 H (1) H (1) D2 D3 L1 L2 L3 L4 M1 Min.

30

(inch) H (Width across flat) 12.7 17.46 12.7 17.46 12.7 17.46 22.23 14.29 17.46 22.23 17.46 22.23 23.81 22.23 23.81 Connection thread NPT Note 1) D M Weight (g) L1 L2 Model KQB2F01-N01 KQB2F01-N02 KQB2F03-N01 KQB2F03-N02 KQB2F07-N01 KQB2F07-N02 KQB2F07-N03 KQB2F09-N01 KQB2F09-N02 KQB2F09-N03 KQB2F11-N02 KQB2F11-N03 KQB2F11-N04 KQB2F13-N03 KQB2F13-N04 24.1 29.1 24.6 29.6 25 30 31.2 27.2 32.2

Vacuum System Peripherals:

Check valve: Series AK 13-14-15 Manifold Specification Sheet 1. For ejector system: Series ZX 13-14-18 2. For vacuum pump servies: Series ZX 13-14-19 3. Series ZM 13-14-20 4.

Speed Controller with One-touch Fittings

2 t AQ ASV AK VCHC ASR ASQ i q o !0 !1 i q o !0 !

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS-FM AS-D AS-T ASP ASN AQ Dimensions ASV Universal type AK Applicable tubing O.D. d VCHC Applicable tubing O.D. d Weight (g) T H1 H2 D1 D2 D3 L1 L2 L3 L4 L5 (1) A (2) M1 Max. Min. Max. Min.

ISE7xG.eng

Bracket A Bracket B [F 0] Display units, switch output specifications and diagnostic information selection function ISE70(G): 0.500 MPa/ISE71: 0.800 MPa/ ISE75G: 1.000 MPa/ISE76G: 2.50 MPa/ ISE77G: 5.00 MPa/ISE78G: 8.00 MPa Pressure setting Cross recessed round head screw: Nominal size M4 x 6L Cross recessed round head screw: Nominal size M4 x 6L Item Default setting ISE70(G): 0.050 MPa/ISE71

ISE70_71-AB.eng

Piping specification: -02 and -N02 After hand tightening, tighten the fitting using a spanner on the flat surfaces of the fitting. The tightening torque must be 8 to 12 Nm.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF 1.3 1.3 ASV220F-U10/32 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Type VQZ100 VQZ200 VQZ300 NAN110-N01 NAN200-N02 NAN200-N02 NAN200-N02 NAN110-N01 16 Q Q Q Body Ported Q Q Series VQZ100200300 Q Q Q

Quick Exhaust Valve Series AQ 1

Description AQ2000 AQ3000 AQ5000 AQ1500 AQ1510 Valve 30093 NBR 30073 30053 30063 30083 r O-ring 9 x 7 x 1 JIS B 2401P-7 NBR CA40-1601 CA50-1602 30066 t Dimensions AQ1500/1510 AQ2000/3000/5000 3-port size (Mounting hole) 3-port size L1 L2 L3 L4 L5 L6 L7 L8 L9 D L1 L2 L3 L4 Model Port size AQ2000 Model Port size 1 8 1 4 M5 x 0.8 AQ1500 23 20 14 3 12.5 12 15 5.5 6.5 3.1 45 40 10 45 , 3 8 1 4

Quick Exhaust Valve Series AQ

Description AQ2000 AQ3000 AQ5000 AQ1500 AQ1510 AS Valve 4 NBR 30073 30053 30063 30083 30093 O-ring 5 NBR CA40-1601 CA50-1602 30066 9 x 7 x 1 ASP JISB2401P-7 ASN Dimensions AQ AQ1500/1510 AQ2000/3000/5000 ASV AK VCHC ASS ASR ASQ 3 x port size KE (Mounting hole) 2 x D TMH 3 x port size L1 L2 L3 L4 L5 L6 L7 L8 L9 D L1 L2 L3 L4 Model Port size Model Port size 1 8 1 4 AQ2000 , M5 x 0.8 AQ1500

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

L1 M T D2 L2 L1 T Metric Size Min.

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

KE AS-FG Dimensions AS-FP H1 AS-FM (Hexagon width across flats) AS-D Applicable tubing O.D. d AS-T H2 ASP (Hexagon width across flats) L4 L3 ASN L5 AQ ASV D1 L2 AK VCHC M M L1 ASR ASQ Metric Size Inch Size L4 Max. L5 (1) L5 (1) L4 Max. Weight (g) Weight (g) Panel-cut dimensions Panel-cut dimensions H1 H2 d D1 L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M Model Model Min. Max. 34.4 Min.

Flow Control Equipment

ASV How to Order AK 01 06 S AS 1 1F G 2 2 ASS Body size 1 2 3 4 Options M5 S None Sealant 1 8, 1 4 8 3 Applicable tube O.D.

PSxx-OMV0008CN

-*309(0x0135) ISE75G-*-L2-*320(0x0140) ISE76G-*-L2-*321(0x0141) ISE77G-*-L2-*322(0x0142) ID ISE78G-*-L2-*362(0x016A) 1(0 ms) 2 3 ISE70G/ISE75G MPa/kPa ISE76G/ISE77G/ISE78G MPa 490 5https://www.smcworld.com 6 02 N02 F02 Rc1/4 NPT1/4 G1/4 Al2O3(96) ISE70GC3604()FKM+ ISE75G/ISE76G/ISE77G/ISE78GC3604()FKM ISE70G 179 g 178 g 175 g ISE75G/ISE76G/ISE77G 184 g 183 g 181 g M12 139 g -87No.PS-OMV0008CN-E

Pressure Range: ISE70 (0 to 1 MPa), Piping: N02 (NPT 1/4), Output Specification: AB (Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: None, Bracket: A (Bracket A, Interchangeable with ISE70)

Pressure Range: ISE70 (0 to 1 MPa), Piping: N02 (NPT 1/4), Output Specification: AB (Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: S (Lead Wire with M12 Connector; Straight, 5 m), Bracket: A (Bracket A, Interchangeable with ISE70)