VQ5000

n Dimensions Formulas: L1 = 41n + 76, L2 = 41n + 96 L n Dimensions Formulas: L1 = 41n + 76, L2 = 41n + 96 1 117 137 9 445 465 1 117 137 9 445 465 2 158 178 10 486 506 2 158 178 10 486 506 4 240 260 12 568 588 4 240 260 12 568 588 5 281 301 5 281 301 3 199 219 11 527 547 3 199 219 11 527 547 6 322 342 6 322 342 7 363 383 7 363 383 8 404 424 L1 L2 8 404 424 L1 L2 n: Stations (12 stations max

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10, 11, 12 08, 09 1000 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-53 12 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 @1 !

LEC-OM07605CN

(3) (a) LE-CSS-L [mm] (37.65) (13.4) (15) (6.7) (20.9) 8+0 +50 0 150 (2.3) (1.7) (b) LE-CSS-K, LE-CSS-J, LE-CSS-1, LE-CSS-3 (L)(1) [mm] () () (100) (100) L . LEC-CSS-L 11.2 11.2.1 [W] LECLECMR-RB-032 MR-RB-12 [40] [40] LECSS2-T5 30 LECSS2-T7 10 30 100 LECSS2-T8 10 30 100 LECSS2-T9 20 30 100 11 8 11. 11.2.2 [Pr. PA02] [Pr.

VQ7-6/7-8

/2, 3/4 35 L: Dimensions Formula L n 10 9 8 7 6 5 4 3 1 2 Port P, R1, R2 n: stations L1 = 56n + 64 L2 = 56n + 80 n: stations L1 = 56n + 90 L2 = 56n + 106 L1 624 568 512 456 400 344 288 120 232 176 Rc1/2 L2 640 584 528 472 416 360 304 136 248 192 L1 650 594 538 482 426 370 314 146 258 202 Rc3/4 L2 666 610 554 498 442 386 330 274 162 218 Dimensions inside ( ) are for Rc3/4 Dimensions inside

2/3 Port Valve

Solenoid valve (Port size) D, T G, C S S L, Z S L, Z T 1 (2mm) 2 (3mm) 3 (4.5mm) 4 (6mm) 5 (8mm) 6 (10mm) VX21 VX22 VX23 (1) 01( ) 02( ) 02( ) 03( ) 04( ) 02( ) 03( ) 04( ) 1 8 1 4 1 4 1 4 3 8 1 2 AC 3 8 1 2 Ordering Example (Example) Series VX21, Orifice size 2 mm, Rc(PT)1/8, 100V AC Grommet. With surge voltage suppressor.

ARM10/11

P P C C U U O O S S L L H H 8 3 11.5 5 L2 dimension Stations 1 2 3 4 5 6 7 8 9 M DIN rail part no.

ARM10/11

P P C C U U O O S S L L H H 8 3 11.5 5 L2 dimension Stations 1 2 3 4 5 6 7 8 9 M DIN rail part no.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

connecter G L LO M MO Y YO YZ YOS (1) Standard (1) High pressure (Metal seal only) (1) (1.0W) K (1) Model Sub-plate part No. (1) (0.5W) Y Low wattage (2) (1) VQZ100-S-01(R) VQZ100 (1.0W) (3) L Latching (2) 01[Rc1/8] 02[Rc1/4] 02 [Rc1/4] 03 [Rc3/8] VQZ200-SVQZ200 Note 1) Option Note 2) When specifying more than one option, please indicate them alphabetically.

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

AS-FG/ASD-FG

) 1/4 28.2 46.5 34.4 11 29.4 15.2 18.5 ASD430FG-02-08S 10 31 19.7 49.3 18.5 21 ASD430FG-02-10S 6 25.2 48.3 12.8 17 ASD530FG-02-06S 20.3 28.2 8 51.3 15.2 18.5 ASD530FG-02-08S 23 19.8 46.9 41.9 48.8 43.8 19 R(PT) 1/4 42.8 15.4 37.8 32.6 10 54.1 18.5 21 ASD530FG-02-10S 23.1 34.4 12 55.9 20.9 22 ASD530FG-02-12S 25.2 48.3 6 17 12.8 ASD530FG-03-06S 20.3 28.2 51.3 8 18.5 15.2 ASD530FG-03-08S 23

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 H (Width across flats) L4 Applicable tubing O.D. d L6 A D L5 M T L1 L3 L2 Max.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VT 51 45 2(A) port 22 VP 13.5 16 9 9 VG 17 10.5 M5 x 0.8 external pilot port (Only external pilot port (R)) PE port (For Rc 1/8) (For Rc 1/8) 3-Rc 1/8, 1/4 1(P), 2(A), 3(R) port VP 18 10 (For Rc 1/4) (For Rc 1/4) S070 VQ DIN terminal (Y): VQZ25(R)-Y01 02 L plug connector (L): VQZ25(R)-L01 02 VKF Indicator light VQZ 300 83.5 (Lead wire length) VZ VS Cross section 0.23 mm2 Cover diameter 1.5

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

P 1 3 R 1.5 A Rc 1/8 3(R) port Rc 1/4 1(P) port 2-3 die-cast hole For manifold gasket positioning DIN terminal (Y): VQZ32(R)-Y-C6/C8/C10/02 L plug connector (L): VQZ32(R)-L-C6/C8/C10/02 89 300 (Lead wire length) Indicator light 30.5 <35.5> 92.5 Max. 10 Pg.7 Applicable cable O.D. 3.5 to 7 Indicator light Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 61 53.5 M plug connector (M): VQZ32(

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

1/4, 1/8 port (A port) 25 12 12 G: Approx. 300 H: Approx. 600 (Lead wire length) 48.5 70.7 [72.9] A 18 20 27 34 R P Manual override 2-4.5 (For mounting) 40 4 (Light/surge voltage suppressor) M5 x 0.8 (SYJ714R: X port) + 58 [65] 54.5 42.6 26 20 X 1/4, 1/8 (P, R port) 23 15 48 L plug connector (L): SYJ74-LM plug connector (M): SYJ74-M01 02 01 02 DIN terminal (D): SYJ74-D01 02 M8 connector

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

10.5 Foot bracket 15.4 16.7 PE port P 1 3 R 1.5 A Rc(PT)1/8 R port Rc(PT)1/4 P port 2-3 Die cast hole For manifold gasket positioning DIN terminal (Y): VQZ3l2(R)-lYl-C6, C8, C10, 02 L plug connector (L): VQZ3l2(R)-lLl-C6, C8, C10, 02 88.5 89.5 300 (Lead wire) Indicator light 31.5 35 92.5 MAX.10 Pg.7 Applicable cord O.D.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

: 01) EVS1-02 (Size: 02) 100 80 1000 l/min (ANR) 400 l/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Lightweight Size 01 (3 position): 0.26 kg Size 02 (3 position): 0.18 kg 3-11-11 12 ISO Standard Solenoid Valve Size 1,2/Single Unit Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 Courtesy of Steven Engineering, Inc

VS 8-2/VS 8-4

16 stations) Dimension (mm) 7 L n 9 328 447 112 231 1 166 285 301 420 8 274 393 10 355 474 11 382 501 12 409 528 13 436 555 14 463 582 15 490 609 16 517 636 6 5 4 3 2 247 366 220 339 193 312 139 258 L1 L2 In case of 1 piece in the input block.

5 Port Solenoid Valve, Series VQC

30 25 13.5 C10 1(P) port 25 (7.5) 45 P = 16 2-C12 1(P) port 2n-C4, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting (mm) Formulas: L1 = 16n + 57, L2 = 16n + 102 n: Stations (maximum 16 stations) n L L1 L2 L3 L4 1 73 118 137.5 148 2 89 134 150 160.5 3 105 150 175 185.5 4 121 166 187.5 198 5 137 182 200 210.5 6 153 198 212.5 223 7 169 214 237.5 248 8 185 230 250

VQ7-6/7-8

Dimension Formula L n 10 9 8 7 6 5 4 3 1 2 P , R1, R2 port n: Stations L1 = 56n + 64 L2 = 56n + 80 n: Stations L1 = 56n + 90 L2 = 56n + 106 L1 624 568 512 456 400 344 288 232 120 176 1/2 L2 640 584 528 472 416 360 304 248 136 192 L1 650 594 538 482 426 370 314 258 146 202 3/4 L2 666 610 554 498 442 386 330 274 162 218 ( ): 3/4 Dimensions inside are for rubber seals. 3-10-28 29 ISO Standard